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    Method of making microstructure device, and microstructure device made by the same
    1.
    发明授权
    Method of making microstructure device, and microstructure device made by the same 有权
    制造微结构器件的方法及其制造的微结构器件

    公开(公告)号：US07871687B2

    公开(公告)日：2011-01-18

    申请号：US11902011

    申请日：2007-09-18

    申请人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

    发明人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

    IPC分类号： B32B3/06 ,  G02B7/182 ,  H01L23/58 ,  G01P3/44 ,  G01P15/097

    CPC分类号： B81C1/00682 ,  B81B2203/0136 ,  Y10T428/24025 ,  Y10T428/2457 ,  Y10T428/24612

    摘要： A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.

    摘要翻译： 微结构装置是通过加工由例如玻璃， 布置在第一和第二处理层之间的第一处理层，第二处理层和中间层。 微结构装置包括第一结构部分和第二结构部分，其具有经由间隙面对第一结构部分的部分。 第一和第二结构部件通过跨越间隙延伸的连接部分相互连接。 该连接部形成在第一处理层中以与中间层接触。 微结构装置还包括从第一结构部件朝向第二结构部件延伸的保护部件，反之亦然。 保护部分形成在第一或第二处理层中以与中间层接触。

    MICRO ROCKING DEVICE AND METHOD FOR MANUFACTURING THE SAME
    2.
    发明申请
    MICRO ROCKING DEVICE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    微型摇动装置及其制造方法

    公开(公告)号：US20090267445A1

    公开(公告)日：2009-10-29

    申请号：US12249677

    申请日：2008-10-10

    申请人： Yoshihiro MIZUNO ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

    发明人： Yoshihiro MIZUNO ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

    IPC分类号： H02N11/00 ,  B44C1/22

    CPC分类号： G02B26/0841 ,  B81B3/0005 ,  B81C1/0096 ,  H02N1/008

    摘要： A micro rocking device includes a frame, a rocking portion, a torsion connecting portion, and a second comb-like electrode, the rocking portion including a first comb-like electrode. The torsion connecting portion connects the frame and the rocking portion. The torsion connecting portion defines the axis of rotational displacement of the rocking portion. The second comb-like electrode attracts the first comb-like electrode and rotationally displaces the rocking portion. The first comb-like electrode has a plurality of first parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction. The second comb-like electrode has a plurality of second parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction.

    摘要翻译： 微型摆动装置包括框架，摇摆部分，扭转连接部分和第二梳状电极，摇摆部分包括第一梳状电极。 扭转连接部分连接框架和摆动部分。 扭转连接部分限定摆动部分的旋转位移的轴线。 第二梳状电极吸引第一梳状电极并使摆动部分旋转移位。 第一梳状电极具有多个第一平行电极齿，该第一平行电极齿在轴线方向上延伸并且在与延伸方向交叉的方向上彼此间隔开。 第二梳状电极具有多个第二平行电极齿，该第二平行电极齿在轴线方向上延伸并且在与延伸方向交叉的方向上彼此间隔开。

    Method of making microstructure device, and microstructure device made by the same
    5.
    发明申请
    Method of making microstructure device, and microstructure device made by the same 有权
    制造微结构器件的方法及其制造的微结构器件

    公开(公告)号：US20080075924A1

    公开(公告)日：2008-03-27

    申请号：US11902011

    申请日：2007-09-18

    申请人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

    发明人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

    IPC分类号： B32B3/30 ,  H01B13/00

    CPC分类号： B81C1/00682 ,  B81B2203/0136 ,  Y10T428/24025 ,  Y10T428/2457 ,  Y10T428/24612

    摘要： A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.

    摘要翻译： 微结构装置是通过加工由例如玻璃， 布置在第一和第二处理层之间的第一处理层，第二处理层和中间层。 微结构装置包括第一结构部分和第二结构部分，其具有经由间隙面对第一结构部分的部分。 第一和第二结构部件通过跨越间隙延伸的连接部分相互连接。 该连接部形成在第一处理层中以与中间层接触。 微结构装置还包括从第一结构部件朝向第二结构部件延伸的保护部件，反之亦然。 保护部分形成在第一或第二处理层中以与中间层接触。

    MICROSTRUCTURE AND MICROSTRUCTURE MANUFACTURE METHOD
    8.
    发明申请
    MICROSTRUCTURE AND MICROSTRUCTURE MANUFACTURE METHOD 有权
    微结构和微结构制造方法

    公开(公告)号：US20110192635A1

    公开(公告)日：2011-08-11

    申请号：US13091728

    申请日：2011-04-21

    申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    IPC分类号： H05K1/00 ,  H01B13/06

    CPC分类号： B81C1/00698 ,  Y10T29/49117

    摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.

    摘要翻译： 微结构包括具有第一导体，第二导​​体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

    MICRO MOVABLE DEVICE AND OPTICAL SWITCHING APPARATUS
    9.
    发明申请
    MICRO MOVABLE DEVICE AND OPTICAL SWITCHING APPARATUS 有权
    微型可移动设备和光学切换设备

    公开(公告)号：US20100092130A1

    公开(公告)日：2010-04-15

    申请号：US12573393

    申请日：2009-10-05

    申请人： Hiromitsu SONEDA ,  Tsuyoshi Matsumoto ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Osamu Tsuboi

    发明人： Hiromitsu SONEDA ,  Tsuyoshi Matsumoto ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Osamu Tsuboi

    IPC分类号： G02B6/26 ,  H02N1/00 ,  G02B26/08

    CPC分类号： G02B26/0841 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81C3/001 ,  G01D5/285 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/006

    摘要： A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.

    摘要翻译： 微型移动装置包括：微型可移动基板，其中形成有微型可动单元，微型可移动单元包括框架，可移动部件和用于联接框架和可动部件的联接部件，以限定轴向旋转中心 的可动部分; 支撑基板; 以及设置在所述框架和所述支撑基板之间的加强固定部，并且包括将所述框架连接到所述支撑基板的第一间隔件和覆盖所述第一间隔件并将所述框架连接到所述支撑基板的粘合部，其中，所述框架包括 所述第一区域与所述第一区域不同的第二区域，所述加强固定部分接合到所述框架的第二区域。