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公开(公告)号：US20120074315A1
公开(公告)日：2012-03-29
申请号：US12924320
申请日：2010-09-24
申请人： Ondrej L. Krivanek , Niklas Dellby
发明人： Ondrej L. Krivanek , Niklas Dellby
IPC分类号： G01N23/225 , G01N23/00
CPC分类号： H01J37/05 , H01J2237/053 , H01J2237/055 , H01J2237/1532 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and optionally also for improving the spatial resolution by correcting chromatic and geometric aberrations. The apparatus comprises a plurality of magnetic or electrostatic prisms that disperse an electron beam according to the energies of the electrons into an energy spectrum, a plurality of magnifying lenses such as electromagnetic or electrostatic quadrupoles that increase the energy dispersion of the energy spectrum, an energy-selecting slit that selects a desirable range of energies of the electrons, and optionally also sextupole, octupole and higher-order lenses that correct chromatic and geometric aberration of the electron-optical system. The apparatus also comprises further magnetic or electrostatic prisms and electron lenses arranged such that the energy dispersion of the electron beam emerging from the apparatus is cancelled.
摘要翻译： 一种高分辨率能量选择电子束装置和方法，用于通过限制允许的电子的能量范围来改善电子 - 光学系统的能量分辨率，并且还可以通过校正彩色和几何像差来提高空间分辨率。 该装置包括根据电子能量将电子束分散到能谱中的多个磁性或静电棱镜，增加能谱的能量分散的多个放大透镜，例如电磁或静电四极，能量 选择狭缝，其选择电子的所需能量范围，以及任选地还可以校正电子 - 光学系统的彩色和几何像差的六极，八极和高阶透镜。 该装置还包括进一步的磁性或静电棱镜和电子透镜，其布置成使得从装置出射的电子束的能量色散被消除。
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公开(公告)号：US08373137B2
公开(公告)日：2013-02-12
申请号：US12924320
申请日：2010-09-24
申请人： Ondrej L. Krivanek , Niklas Dellby
发明人： Ondrej L. Krivanek , Niklas Dellby
IPC分类号： H01J3/26
CPC分类号： H01J37/05 , H01J2237/053 , H01J2237/055 , H01J2237/1532 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and optionally also for improving the spatial resolution by correcting chromatic and geometric aberrations. The apparatus comprises a plurality of magnetic or electrostatic prisms that disperse an electron beam according to the energies of the electrons into an energy spectrum, a plurality of magnifying lenses such as electromagnetic or electrostatic quadrupoles that increase the energy dispersion of the energy spectrum, an energy-selecting slit that selects a desirable range of energies of the electrons, and optionally also sextupole, octupole and higher-order lenses that correct chromatic and geometric aberration of the electron-optical system. The apparatus also comprises further magnetic or electrostatic prisms and electron lenses arranged such that the energy dispersion of the electron beam emerging from the apparatus is cancelled.
摘要翻译： 一种高分辨率能量选择电子束装置和方法，用于通过限制允许的电子的能量范围来改善电子 - 光学系统的能量分辨率，并且还可以通过校正彩色和几何像差来提高空间分辨率。 该装置包括根据电子能量将电子束分散到能谱中的多个磁性或静电棱镜，增加能谱的能量分散的多个放大透镜，例如电磁或静电四极，能量 选择狭缝，其选择电子的所需能量范围，以及任选地还可以校正电子 - 光学系统的彩色和几何像差的六极，八极和高阶透镜。 该装置还包括进一步的磁性或静电棱镜和电子透镜，其布置成使得从装置出射的电子束的能量色散被消除。
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公开(公告)号：US06552340B1
公开(公告)日：2003-04-22
申请号：US09686805
申请日：2000-10-12
IPC分类号： H01J3721
CPC分类号： H01J37/153 , H01J37/21 , H01J37/28
摘要： An autoadjusting charged-particle probe-forming apparatus improving the resolution of probe-forming charged-particle optical systems by minimizing optical aberrations. The apparatus comprises a source of charged particles, a probe-forming system of charged-particle lenses, a plurality of detectors optionally comprising a two-dimensional image detector, power supplies, a computer and appropriate software. Images are recorded by the two-dimensional detector and analyzed to determine the aberration characteristics of the apparatus. Alternately, multiple scanned images are recorded by a scanned image detector and also analyzed to determine the aberration characteristics of the apparatus. The aberration characteristics are used to automatically adjust the apparatus for improved optical performance.
摘要翻译： 一种自动调节带电粒子探针形成装置，通过最小化光学像差来提高探针形成带电粒子光学系统的分辨率。 该装置包括带电粒子源，带电粒子透镜的探针形成系统，可选地包括二维图像检测器的多个检测器，电源，计算机和适当的软件。 图像由二维检测器记录并进行分析，以确定装置的像差特性。 或者，多个扫描图像由扫描图像检测器记录，并且还被分析以确定装置的像差特性。 像差特性用于自动调整装置以改善光学性能。
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公开(公告)号：US06770887B2
公开(公告)日：2004-08-03
申请号：US10189855
申请日：2002-07-08
IPC分类号： G21R510
CPC分类号： H01J37/153
摘要： Aberration-corrected charged-particle optical apparatus improving the resolution of charged-particle optical systems by eliminating or minimizing optical aberrations. The apparatus comprises a source of charged particles and a plurality of charged-particle lenses including non-round lenses, energized in such manner so as to correct axial aberrations of orders up to and including fifth order. The non-round lenses comprise quadrupoles and octupoles disposed in such manner that fifth order combination aberrations are precisely controlled in addition to third order aberrations. The resultant apparatus very significantly improves on resolution attainable with non-aberration corrected charged-particle round lenses. It also improves on resolution attainable with correctors of third order aberrations only.
摘要翻译： 经偏振校正的带电粒子光学装置通过消除或最小化光学像差来提高带电粒子光学系统的分辨率。 该装置包括带电粒子源和包括非圆形透镜的多个带电粒子透镜，以这样的方式被激励，以校正直到并包括五阶的阶数的轴向像差。 非圆形透镜包括以这样的方式布置的四极和八极，除了三阶像差之外，精确地控制五阶组合像差。 所得到的装置非常显着地提高了用无像差校正的带电粒子圆形透镜可达到的分辨率。 它也提高了只有三阶像差校正器可达到的分辨率。
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公开(公告)号：US5946033A
公开(公告)日：1999-08-31
申请号：US654398
申请日：1996-05-28
摘要： A method and apparatus are provided for CTD imaging device multiple read-out speeds with optimized operation at all of the available speeds. Image signals from a CTD imaging device are digitally sampled at a defined frequency with the read-out electronics being matched to the defined frequency for optimum operation at that frequency. Digital samples taken during both a first (reset reference) portion of each image signal and a second (image voltage) portion of each image signal are then discarded if taken during a noisy/unstable part of the image signal or accumulated and averaged if taken during a stable part of the image signal. The accumulated and averaged digital samples are then algebraically combined to produce signals representative of an image generated by the CTD imaging device. The read-out speed of the CTD imaging device is a fraction of the sampling speed and can be selected by setting an integer divisor for the defined sampling frequency. Selected ones of the samples are retained based on the selected read-out speed. For the fastest read-out speed, the number of samples taken per imaging signal is one and the divisor is equal to one. Selected slower speeds determine which samples are discarded and which samples are accumulated, averaged and combined to produce signals representative of an image generated by the CTD imaging device.
摘要翻译： 提供了一种用于CTD成像设备多个读出速度并且在所有可用速度下优化操作的方法和装置。 来自CTD成像设备的图像信号以定义的频率进行数字采样，读出的电子元件与定义的频率匹配，以在该频率下进行最佳操作。 在每个图像信号的第一（复位参考）部分和每个图像信号的第二（图像电压）部分）期间拍摄的数字样本然后如果在图像信号的噪声/不稳定部分期间被采集则被丢弃，或者如果在 图像信号的稳定部分。 然后将积累的和平均的数字样本代数组合以产生表示由CTD成像装置产生的图像的信号。 CTD成像设备的读出速度是采样速度的一小部分，可以通过为定义的采样频率设置整数除数来选择。 所选择的样本被保留基于所选择的读出速度。 为了获得最快的读出速度，每个成像信号采集的采样数为1，除数等于1。 所选较慢的速度决定哪些样本被丢弃，哪些样本被累积，平均和组合以产生表示CTD成像设备产生的图像的信号。
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6.发明授权Optically coupled large-format solid state imaging apparatus having edges of an imaging device 失效具有固定在支撑框架上或相对于支撑框架的成像装置的边缘的光耦合大幅面固态成像装置及其制造方法
公开(公告)号：US5818035A
公开(公告)日：1998-10-06
申请号：US714763
申请日：1996-09-16
IPC分类号： H01L31/0203 , H01L31/0232 , H04N5/225
CPC分类号： H01L31/0203 , H01L31/0232 , H04N5/2253 , H01L2224/48091
摘要： A large-format solid state imaging device which can detect optical images without loss of sharpness or resolution is provided and includes a solid state imaging device supported by and secured to a frame. To ensure that the imaging device does not deviate from its desired surface configuration, the device is pressed between an optical coupling plate and a support plate each having at least one matching surface whose curvature matches the other with a precision which permits the solid state imaging device to detect optical images without loss of sharpness or resolution and which conforms the imaging device into a desired configuration. Preferably, the frame is annular and the edges of the imaging device are secured to the frame by at least two spaced bonds.
摘要翻译： 提供了可以检测光学图像而不损失清晰度或分辨率的大幅面固态成像装置，并且包括由框架支撑并固定到框架的固态成像装置。 为了确保成像装置不偏离其期望的表面构造，该装置被按压在光学联接板和支撑板之间，每个光学联接板和支撑板具有至少一个匹配表面，该曲面的曲率与另一个具有匹配的精度，其允许固态成像装置 以检测光学图像而不损失清晰度或分辨率，并且使成像装置符合所需的配置。 优选地，框架是环形的，并且成像装置的边缘通过至少两个间隔开的结合固定到框架。
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7.发明授权Resolution-enhancement device for an optically-coupled image sensor for an electron microscope 失效用于电子显微镜的光耦合图像传感器的分辨率增强装置
公开(公告)号：US5635720A
公开(公告)日：1997-06-03
申请号：US539017
申请日：1995-10-03
申请人： Paul E. Mooney , Ondrej L. Krivanek
发明人： Paul E. Mooney , Ondrej L. Krivanek
IPC分类号： H01J29/89 , H01J37/22 , H01J37/244
CPC分类号： H01J37/224 , H01J29/892 , H01J2237/2443 , H01J2237/2445
摘要： An apparatus designed to be positioned in the projection chamber of an electron microscope to detect electron images and/or diffraction patterns from a sample and convert those electron images into light images is provided. The apparatus transfers light images to an imaging sensor for recording while enhancing resolution of the light images by absorbing substantially all laterally scattered light before it reaches the imaging sensor.
摘要翻译： 一种被设计为位于电子显微镜的投影室中以检测来自样品的电子图像和/或衍射图案并将这些电子图像转换成光图像的装置。 该装置将光图像传送到用于记录的成像传感器，同时通过在到达成像传感器之前基本上吸收所有横向散射的光，同时增强光图像的分辨率。
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公开(公告)号：US5640012A
公开(公告)日：1997-06-17
申请号：US519535
申请日：1995-08-25
申请人： Ondrej L. Krivanek
发明人： Ondrej L. Krivanek
CPC分类号： H01J49/06 , H01J37/09 , H01J2237/0455 , H01J2237/057 , H01J2237/2538
摘要： A precision-controlled slit mechanism having an adjustable width which is both accurate and reproducible is provided for apparatuses which are designed to exclude portions of an energy spectrum prior to analysis such as energy-selected imaging filters in electron microscopes. The slit mechanism includes a pair of slit halves, a light source for directing light between the slit halves, a detector for measuring the intensity of light passing from the light source through the slit halves, and an actuator for adjusting the width of the opening between the slit halves in response to the intensity of light measured by the detector.
摘要翻译： 提供了一种精确控制的狭缝机构，其具有可调节的宽度，其精度和可重现性都被设计成用于在分析之前排除能量谱的部分的装置，例如电子显微镜中的能量选择的成像滤光器。 狭缝机构包括一对狭缝半部，用于在狭缝半部之间引导光的光源，用于测量从光源通过狭缝半部的光的强度的检测器，以及用于调节光源的宽度的致动器， 相应于由检测器测量的光的强度，狭缝半部分。
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公开(公告)号：US5097126A
公开(公告)日：1992-03-17
申请号：US587665
申请日：1990-09-25
申请人： Ondrej L. Krivanek
发明人： Ondrej L. Krivanek
CPC分类号： H01J37/261 , H01J49/44 , H01J2237/053 , H01J2237/2602 , H01J2237/2823
摘要： A method and an apparatus comprising an electron gun, two energy analyzers, an energy-selecting slit with intensity sensors, a feedback circuit, a sample, and an electron detector. The beam produced by the electron gun is dispersed according to the energies of the electrons by the first energy analyzer. The dispersed beam impinges on a slit which monochromates the beam by selecting a narrow pass-band of energies. The two halves of the slit are equipped with electron intensity sensors whose output is used by a feedback circuit to stabilize the position of the dispersed beam on the slit so as to counteract instabilities in the power supplies of the electron gun and of the analyzer. The monochromated electron beam then passes through a sample, and the transmitted beam is dispersed according to the energies of the electrons by the second energy analyzer. The power supplies of the two analyzers are linked so that the energy selected by the second analyzer tracks the energy selected by the first analyzer. The second analyzer therefore automatically tracks instabilities in the gun high voltage, and the whole apparatus is able to achieve much higher energy resolution than if all the power supplies were operated independently.
摘要翻译： 一种包括电子枪，两个能量分析器，具有强度传感器的能量选择缝，反馈电路，样本和电子检测器的方法和装置。 由电子枪产生的光束由第一能量分析仪根据电子的能量分散。 分散的光束照射通过选择能量的窄通带来对光束进行单色的狭缝。 狭缝的两半配有电子强度传感器，其输出由反馈电路使用，以将分散光束的位置稳定在狭缝上，以抵消电子枪和分析器的电源的不稳定性。 单色电子束然后通过样品，并且透射束根据第二能量分析器的电子能量而分散。 两个分析器的电源被链接，使得由第二分析仪选择的能量跟踪由第一分析器选择的能量。 因此，第二分析仪自动跟踪枪高电压的不稳定性，并且与所有电源独立地操作相比，整个装置能够实现更高的能量分辨率。
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公开(公告)号：US5300776A
公开(公告)日：1994-04-05
申请号：US945603
申请日：1992-09-16
申请人： Ondrej L. Krivanek
发明人： Ondrej L. Krivanek
IPC分类号： H01J37/21 , H01J37/26 , H01J37/295
CPC分类号： H01J37/265 , H01J37/21 , H01J2237/1532 , H01J2237/216
摘要： A method and an apparatus comprising a transmission electron microscope, an electron camera, a computer, and microscope control electronics. The electron camera captures an image produced by the electron microscope, the computer transforms the image into a digital diffractogram, and determines the microscope defocus and astigmatism by analyzing the diffractogram. The computer uses the determined astigmatism and defocus values to stigmate the microscope, and to set the defocus to a user-selected value. The computer also changes the direction of electron illumination to different values, and works out the true location of the optic axis of the microscope from the changes in the diffractograms recorded for the different illumination directions.
摘要翻译： 一种包括透射电子显微镜，电子照相机，计算机和显微镜控制电子装置的方法和装置。 电子摄像机拍摄由电子显微镜产生的图像，计算机将图像转换为数字衍射图，并通过分析衍射图来确定显微镜散焦和散光。 计算机使用确定的散光和散焦值来扼杀显微镜，并将散焦设置为用户选择的值。 计算机还将电子照明的方向改变为不同的值，并根据不同照明方向记录的衍射图的变化，计算显微镜的光轴的真实位置。
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