公开(公告)号：US06511922B2

公开(公告)日：2003-01-28

申请号：US09818359

申请日：2001-03-26

申请人： Padmanabhan Krishnaraj ,  Robert Duncan ,  Joseph D'Souza ,  Alan W. Collins ,  Nasreen Chopra ,  Kimberly Branshaw

发明人： Padmanabhan Krishnaraj ,  Robert Duncan ,  Joseph D'Souza ,  Alan W. Collins ,  Nasreen Chopra ,  Kimberly Branshaw

IPC分类号： H01L2131

CPC分类号： H01L21/02131 ,  C23C16/401 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/31629 ,  H01L21/76801 ,  H01L21/76807

摘要： Methods and apparatus of the present invention deposit fluorinated silicate glass (FSG) in such a manner that it strongly adheres to an overlying or underlying barrier layer or etch stop layer, and has a lower dielectric constant, among other benefits. In one embodiment, silicon tetrafluoride (SiF4), oxygen (O2), and argon (Ar) are used as the reactant gases, with the ratio of oxygen to silicon controlled to be at between about 2:1 to 6:1. Such O2 levels help reduce the amount of degradation of ceramic chamber components otherwise caused by the elimination of silane from the process recipe.

公开(公告)号：US06633076B2

公开(公告)日：2003-10-14

申请号：US10283996

申请日：2002-10-30

申请人： Padmanabhan Krishnaraj ,  Robert Duncan ,  Joseph D'Souza ,  Alan W. Collins ,  Nasreen Chopra ,  Kimberly Branshaw

发明人： Padmanabhan Krishnaraj ,  Robert Duncan ,  Joseph D'Souza ,  Alan W. Collins ,  Nasreen Chopra ,  Kimberly Branshaw

IPC分类号： H01L3100

CPC分类号： H01L21/02131 ,  C23C16/401 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/31629 ,  H01L21/76801 ,  H01L21/76807

摘要： Methods and apparatus of the present invention deposit fluorinated silicate glass (FSG) in such a manner that it strongly adheres to an overlying or underlying barrier layer or etch stop layer, and has a lower dielectric constant, among other benefits. In one embodiment, silicon tetrafluoride (SiF4), oxygen (O2), and argon (Ar) are used as the reactant gases, with the ratio of oxygen to silicon controlled to be at between about 2:1 to 6:1. Such O2 levels help reduce the amount of degradation of ceramic chamber components otherwise caused by the elimination of silane from the process recipe.

摘要翻译： 本发明的方法和装置以这样的方式沉积氟化硅酸盐玻璃（FSG），使得它强烈地粘附到上覆的或下面的阻挡层或蚀刻停止层，并具有较低的介电常数以及其它益处。 在一个实施方案中，使用四氟化硅（SiF），氧（O 2 PDAT>）和氩（Ar） 作为反应气体，其中氧与硅的比例控制在约2:1至6:1之间。 这样的O 2 水平有助于减少陶瓷室组分的降解量，否则由于工艺配方中硅烷的消除而引起。

公开(公告)号：US20080041821A1

公开(公告)日：2008-02-21

申请号：US11877502

申请日：2007-10-23

申请人： Sudhir Gondhalekar ,  Robert Duncan ,  Siamak Salimian ,  Muhammad Rasheed ,  Harry Smith Whitesell ,  Bruno Geoffrion ,  Padmanabhan Krishnaraj ,  Rudolf Gujer ,  Diana Gujer

发明人： Sudhir Gondhalekar ,  Robert Duncan ,  Siamak Salimian ,  Muhammad Rasheed ,  Harry Smith Whitesell ,  Bruno Geoffrion ,  Padmanabhan Krishnaraj ,  Rudolf Gujer ,  Diana Gujer

IPC分类号： C23F1/00

CPC分类号： C23C16/4558

摘要： Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber. In one embodiment, a gas distribution system comprises a gas ring including an outer surface and an inner surface, and a gas inlet disposed at the outer surface of the gas ring. The gas inlet is fluidicly coupled with a first channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of gas outlets are distributed over the inner surface of the gas ring, and are fluidicly coupled with a second channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of orifices are fluidicly coupled between the first channel and the second channel. The plurality of orifices are spaced from the gas inlet by a plurality of distances, and have sizes which vary with the distances from the gas inlet as measured along the first channel, such that the size of the orifice increases with an increase in the distance between the orifice and the gas inlet as measured along the first channel.

摘要翻译： 本发明的实施例涉及一种将气体更均匀地分配到处理室中的气体分配系统。 在一个实施例中，气体分配系统包括包括外表面和内表面的气环，以及设置在气环的外表面处的气体入口。 气体入口与设置在气体环的外表面和内表面之间的第一通道流体耦合。 多个气体出口分布在气环的内表面上，并且与设置在气体环的外表面和内表面之间的第二通道流体连接。 多个孔流体耦合在第一通道和第二通道之间。 多个孔与气体入口间隔多个距离，并且具有随着沿着第一通道测量的与气体入口的距离而变化的尺寸，使得孔的尺寸随着气体入口之间的距离的增加而增加 沿着第一通道测量的孔口和气体入口。

公开(公告)号：US20060113038A1

公开(公告)日：2006-06-01

申请号：US11123453

申请日：2005-05-04

申请人： Sudhir Gondhalekar ,  Robert Duncan ,  Siamak Salimian ,  Muhammad Rasheed ,  Harry Whitesell ,  Bruno Geoffrion ,  Padmanabhan Krishnaraj ,  Rudolf Gujer

发明人： Sudhir Gondhalekar ,  Robert Duncan ,  Siamak Salimian ,  Muhammad Rasheed ,  Harry Whitesell ,  Bruno Geoffrion ,  Padmanabhan Krishnaraj ,  Rudolf Gujer

IPC分类号： H01L21/306 ,  C23F1/00

CPC分类号： C23C16/4558

摘要： Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber. In one embodiment, a gas distribution system comprises a gas ring including an outer surface and an inner surface, and a gas inlet disposed at the outer surface of the gas ring. The gas inlet is fluidicly coupled with a first channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of gas outlets are distributed over the inner surface of the gas ring, and are fluidicly coupled with a second channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of orifices are fluidicly coupled between the first channel and the second channel. The plurality of orifices are spaced from the gas inlet by a plurality of distances, and have sizes which vary with the distances from the gas inlet as measured along the first channel, such that the size of the orifice increases with an increase in the distance between the orifice and the gas inlet as measured along the first channel.

摘要翻译： 本发明的实施例涉及一种将气体更均匀地分配到处理室中的气体分配系统。 在一个实施例中，气体分配系统包括包括外表面和内表面的气环，以及设置在气环的外表面处的气体入口。 气体入口与设置在气体环的外表面和内表面之间的第一通道流体耦合。 多个气体出口分布在气环的内表面上，并且与设置在气体环的外表面和内表面之间的第二通道流体连接。 多个孔流体耦合在第一通道和第二通道之间。 多个孔与气体入口间隔多个距离，并且具有随着沿着第一通道测量的与气体入口的距离而变化的尺寸，使得孔的尺寸随着气体入口之间的距离的增加而增加 沿着第一通道测量的孔口和气体入口。

公开(公告)号：US07722737B2

公开(公告)日：2010-05-25

申请号：US11123453

申请日：2005-05-04

申请人： Sudhir Gondhalekar ,  Robert Duncan ,  Siamak Salimian ,  Muhammad M. Rasheed ,  Harry Smith Whitesell ,  Bruno Geoffrion ,  Padmanabhan Krishnaraj ,  Rudolf Gujer ,  Diana E. Gujer, legal representative

发明人： Sudhir Gondhalekar ,  Robert Duncan ,  Siamak Salimian ,  Muhammad M. Rasheed ,  Harry Smith Whitesell ,  Bruno Geoffrion ,  Padmanabhan Krishnaraj ,  Rudolf Gujer

IPC分类号： H01L21/326 ,  C23C16/505

CPC分类号： C23C16/4558

摘要： Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber. In one embodiment, a gas distribution system comprises a gas ring including an outer surface and an inner surface, and a gas inlet disposed at the outer surface of the gas ring. The gas inlet is fluidicly coupled with a first channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of gas outlets are distributed over the inner surface of the gas ring, and are fluidicly coupled with a second channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of orifices are fluidicly coupled between the first channel and the second channel. The plurality of orifices are spaced from the gas inlet by a plurality of distances, and have sizes which vary with the distances from the gas inlet as measured along the first channel, such that the size of the orifice increases with an increase in the distance between the orifice and the gas inlet as measured along the first channel.

摘要翻译： 本发明的实施例涉及一种将气体更均匀地分配到处理室中的气体分配系统。 在一个实施例中，气体分配系统包括包括外表面和内表面的气环，以及设置在气环的外表面处的气体入口。 气体入口与设置在气体环的外表面和内表面之间的第一通道流体耦合。 多个气体出口分布在气环的内表面上，并且与设置在气体环的外表面和内表面之间的第二通道流体连接。 多个孔流体耦合在第一通道和第二通道之间。 多个孔与气体入口间隔多个距离，并且具有随着沿着第一通道测量的与气体入口的距离而变化的尺寸，使得孔的尺寸随着气体入口之间的距离的增加而增加 沿着第一通道测量的孔口和气体入口。

公开(公告)号：US07584299B2

公开(公告)日：2009-09-01

申请号：US11192771

申请日：2005-07-29

申请人： David John Maxwell ,  Robert Duncan ,  Steven James Urouhart ,  Mike Moran

发明人： David John Maxwell ,  Robert Duncan ,  Steven James Urouhart ,  Mike Moran

IPC分类号： G06F15/16

CPC分类号： H04L41/082 ,  H04L12/4675 ,  H04L45/02

摘要： The gateway devices in a VPN require configuration when the VPN is set up and to reflect changes. To process the configuration tasks efficiently, a method is described of configuring a virtual private network (VPN) within a shared network, in which a queue of configuration tasks is created for gateway devices belonging to the VPN. The configuration tasks include sending static network routing information to said gateway devices. The tasks are deployed by retrieving a next task from the queue, and interrogating the gateway device to which the task relates, to identifying any change in subnetworks connected thereto since the task was created. If no change is identified, the retrieved task is performed. If, on the other hand, a change is identified, update configuration tasks are created for all relevant gateway devices in the VPN. The update task for each gateway device is then merged with any not yet performed task in the queue for that gateway device, and the task retrieved from the queue merged with the and update task is performed.

摘要翻译： 当VPN建立并反映更改时，VPN中的网关设备需要配置。 为了有效地处理配置任务，描述了在共享网络内配置虚拟专用网络（VPN）的方法，其中为属于VPN的网关设备创建配置任务队列。 配置任务包括向网关设备发送静态网络路由信息。 通过从队列中检索下一个任务并询问与该任务相关的网关设备来部署任务，以识别自创建任务以来连接到其上的子网络的任何变化。 如果没有发现变化，则执行检索到的任务。 另一方面，如果识别出更改，则会为VPN中的所有相关网关设备创建更新配置任务。 然后，每个网关设备的更新任务与用于该网关设备的队列中的任何尚未执行的任务合并，并且执行从与队列和更新任务合并的队列检索到的任务。

公开(公告)号：US07499745B2

公开(公告)日：2009-03-03

申请号：US09794612

申请日：2001-02-27

申请人： Peter Littrup ,  Robert Duncan

发明人： Peter Littrup ,  Robert Duncan

IPC分类号： A61B5/05

CPC分类号： A61B5/4312 ,  A61B5/053 ,  A61B5/4869 ,  A61B5/6806 ,  G01N33/48728

摘要： A method and apparatus that use complex impedance measurements of tissue in human or animal bodies for the detection and characterization of medical pathologies is disclosed. An analysis of the complex impedance measurements is performed by a trained evaluation system that uses a nonlinear continuum model to analyze the resistive, capacitive, and inductive measurements collected from a plurality of sensing electrodes. The analysis of the impedance measurements results in the construction of a multidimensional space that defines the tissue characteristics, which the trained evaluation system uses to detect and characterize pathologies. The method and apparatus are sufficiently general to be applied to various types of human and animal tissues for the analysis of various types of medical pathologies.

摘要翻译： 公开了一种使用人体或动物体中的组织的复杂阻抗测量来检测和表征医学病症的方法和装置。 复杂阻抗测量的分析由经过训练的评估系统执行，该系统使用非线性连续模型来分析从多个感测电极收集的电阻，电容和感应测量。 阻抗测量的分析导致定义组织特征的多维空间的构造，训练的评估系统用于检测和表征病理学。 所述方法和装置足够普遍以适用于各种类型的人和动物组织用于分析各种类型的医学病理学。

公开(公告)号：US4709909A

公开(公告)日：1987-12-01

申请号：US809703

申请日：1985-12-17

申请人： Robert Duncan ,  Wade H. Widener

发明人： Robert Duncan ,  Wade H. Widener

IPC分类号： B25B5/10 ,  B25B5/14 ,  G21C3/34 ,  B25B1/20

CPC分类号： B25B5/10 ,  B25B5/142 ,  G21C3/3424 ,  Y02E30/40

摘要： An improved retention strap for maintaining a fuel assembly grid in an assembled condition during manufacture in a grid assembly fixture includes four members extendible along the respective outer grid straps, between the corners and about the periphery of the grid. Each member has a pair of end posts and a cross member extending between and connected with the end posts. The end posts of the members are disposed adjacent the respective corners of the grid when the grid is in the assembled condition. Pairs of brackets interconnect respective ones of the end posts of the members, whereas pairs of releasable connectors fasten respective others of the end posts of the members so as to form diagonally opposite pairs of substantially rigidly squared first fixed and second openable corners. Also, the retention strap includes a pair of clamps disposed at each of the fixed and openable corners formed by the end posts. The clamps are engagable with a selected one of the end portions of the outer grid straps forming the respective grid corner disposed adjacent one of the squared corners of the retention strap. The outer grid strap end portion selected is the one having a terminal edge defining the inner part of the lap joint at the grid corner. The clamps have inner hook-shaped elements which engage on the selected end portion to pull outwardly thereon and thereby pull outwardly on the other end portion of the pair thereof forming the grid corner which secures the end portions against the respective one of the squared corners of the retention strap and thereby prevents distortion of the grid corner during welding of each respective lap joint at a corner of the grid. Each clamp also has a second adjustable element adapted to bear against the retention strap member and exert an outwardly-directed pulling force on the outer grid strap end portion via the first element thereon.

摘要翻译： 在网格组装夹具的制造过程中，用于将燃料组件网格保持在组装状态的改进的保持带包括沿着相应的外网格带，在拐角之间和围绕网格周边延伸的四个部件。 每个构件具有一对端柱和在端柱之间延伸并与端柱连接的横梁。 当栅格处于组装状态时，构件的端柱设置在栅格的各个角附近。 配对的支架将部件的各个端柱互相连接，而成对的可拆卸连接器将部件的端柱中的各个固定件相互紧固，从而形成斜对置的基本刚性方形的第一固定和第二可开启角。 此外，保持带包括一对夹具，其设置在由端柱形成的每个固定和可打开角处。 所述夹具可与外格栅带的所选择的一个端部接合，形成邻近所述保持带的平方角之一的相应格栅角。 选择的外网格带端部是具有限定搭接接头在网格角处的内部的端子边缘。 夹具具有内钩形元件，其接合在所选择的端部上以向外拉动，从而在其对的另一端部向外拉动，形成网格角，其将端部固定在相应的一个平角 保持带，从而防止在网格的角落处的每个相应搭接接头的焊接期间格栅的变形。 每个夹具还具有第二可调元件，其适于抵靠保持带构件并且经由其上的第一元件在外格栅带端部上施加向外定向的拉力。

公开(公告)号：US4521374A

公开(公告)日：1985-06-04

申请号：US414232

申请日：1982-09-01

申请人： Robert Duncan

发明人： Robert Duncan

IPC分类号： G21C3/00 ,  G21C3/33 ,  G21C3/356 ,  G21C3/34

CPC分类号： G21C3/33 ,  G21C3/3566 ,  G21Y2002/302 ,  G21Y2004/30 ,  Y02E30/40

摘要： A grid of a fuel assembly structure for a nuclear reactor comprises two sets of uniformly spaced straps perpendicular to each other for receiving and supporting cylindrical sleeves. The straps forming cells which receive the sleeves have notches at their edges, and the sleeves are joined to the straps by lap welding at the notches.

摘要翻译： 用于核反应堆的燃料组件结构的格栅包括彼此垂直的两组均匀间隔的带，用于接收和支撑圆柱形套筒。 接收套筒的条带形成单元在其边缘处具有凹口，并且通过在凹口处的搭接焊接将套筒连接到带子。

公开(公告)号：US20110162390A1

公开(公告)日：2011-07-07

申请号：US13046274

申请日：2011-03-11

申请人： PETER J. LITTRUP ,  Alexei V. Babkin ,  Robert Duncan ,  Sergey Boldarev

发明人： PETER J. LITTRUP ,  Alexei V. Babkin ,  Robert Duncan ,  Sergey Boldarev

IPC分类号： F17C13/02 ,  F25D3/10 ,  F25B19/00 ,  F17C7/02

CPC分类号： A61B18/02 ,  A61B2018/0262 ,  F25B9/02 ,  F25B2309/021

摘要： Methods and systems are provided for cooling an object with a cryogen having a critical point defined by a critical-point pressure and a critical-point temperature. A pressure of the cryogen is raised above a pressure value determined to provide the cryogen at a reduced molar volume that prevents vapor lock. Thereafter, the cryogen is placed in thermal communication with the object to increase a temperature of the cryogen along a thermodynamic path that maintains the pressure greater than the critical-point pressure for a duration that the cryogen and object are in thermal communication.

摘要翻译： 提供了用具有由临界点压力和临界点温度限定的临界点的冷冻剂冷却物体的方法和系统。 冷冻剂的压力升高到高于确定为以减少的摩尔体积提供冷冻剂以防止气体锁定的压力值。 此后，冷冻剂被放置成与物体热连通，以在致冷剂和物体处于热连通的持续时间内沿着保持压力大于临界点压力的热力学路径增加冷冻剂的温度。