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    OPTICAL PRODUCT DETECTION SENSOR
    2.
    发明申请
    OPTICAL PRODUCT DETECTION SENSOR 有权
    光学产品检测传感器

    公开(公告)号：US20090097029A1

    公开(公告)日：2009-04-16

    申请号：US12247743

    申请日：2008-10-08

    申请人： Eugene Tokhtuev ,  Christopher J. Owen ,  Anatoly Skirda ,  Viktor Slobodyan ,  William M. Christensen ,  Paul Schilling ,  Joseph P. Erickson

    发明人： Eugene Tokhtuev ,  Christopher J. Owen ,  Anatoly Skirda ,  Viktor Slobodyan ,  William M. Christensen ,  Paul Schilling ,  Joseph P. Erickson

    IPC分类号： G01N21/25 ,  G01N21/00

    CPC分类号： G01N21/85 ,  A61M5/1684 ,  A61M2205/3313 ,  G01N2021/3133 ,  G01N2021/3148 ,  G01N2021/3181 ,  G01N2201/0627

    摘要： An optical detection sensor detects presence or absence of a product within a fluid delivery medium. An emitter directs radiation into the fluid delivery medium. Each of a plurality of detectors detects light within an associated one of a plurality of wavelength ranges transmitted through the fluid delivery medium. The output of each detector is further associated with at least one out-of-product threshold. A controller may further combine detector outputs, such as by multiplication, summation, or other mathematical operation, to produce additional measures of product presence or absence. Each combination output is also associated with at least one out-of-product threshold. The controller compares the output of each detector with the associated out-of-product threshold(s) and compares each combination output with the associated out-of-product threshold(s) to determine presence or absence of product within the fluid delivery medium. The sensor is able to determine presence or absence of a variety of products having different color, transparency or turbidity.

    摘要翻译： 光学检测传感器检测流体输送介质内产品的存在或不存在。 发射器将辐射器引导到流体输送介质中。 多个检测器中的每一个检测器检测通过流体输送介质传输的多个波长范围中的相关联的一个中的光。 每个检测器的输出进一步与至少一个产品外阈值相关联。 控制器可以进一步组合检测器输出，例如乘法，求和或其他数学运算，以产生产品存在或不存在的附加测量。 每个组合输出也与至少一个产品外阈值相关联。 控制器将每个检测器的输出与相关的产品外阈值进行比较，并将每个组合输出与相关联的产品外阈值进行比较，以确定流体输送介质内产品的存在或不存在。 传感器能够确定具有不同颜色，透明度或浊度的各种产品的存在或不存在。

    METHOD OF CALIBRATION FOR NONLINEAR OPTICAL SENSOR
    6.
    发明申请
    METHOD OF CALIBRATION FOR NONLINEAR OPTICAL SENSOR 有权
    非线性光学传感器校准方法

    公开(公告)号：US20090150106A1

    公开(公告)日：2009-06-11

    申请号：US12370358

    申请日：2009-02-12

    申请人： Joseph Erickson ,  Eugene Tokhtuev ,  Christopher Owen ,  Paul Schilling

    发明人： Joseph Erickson ,  Eugene Tokhtuev ,  Christopher Owen ,  Paul Schilling

    IPC分类号： G06F19/00

    CPC分类号： G01N35/085 ,  G01N21/05 ,  G01N21/274 ,  G01N35/1097 ,  G01N2021/0346 ,  G01N2035/0097 ,  Y10T436/201666 ,  Y10T436/206664

    摘要： A use composition monitor determines the concentration of peracid and/or peroxide in a use composition using a kinetic assay procedure. A sample mixture containing a sample of the use composition, a diluent and at least one reagent is prepared and analyzed using, for example, an optical detector. Response data obtained by the detector is used to determine the concentrations of peracid and/or peroxide in the use composition based upon an evaluation function determined by a calibration method. The calibration method includes determining coefficients of the evaluation function based upon known concentrations, and measured response data of calibration samples.

    摘要翻译： 使用组合物监测器使用动力学测定程序确定使用组合物中过酸和/或过氧化物的浓度。 使用例如光学检测器制备并分析含有使用组合物样品，稀释剂和至少一种试剂的样品混合物。 基于通过校准方法确定的评价函数，使用检测器获得的反应数据用于确定使用组合物中过酸和/或过氧化物的浓度。 校准方法包括基于已知浓度确定评估函数的系数，以及校准样本的测量响应数据。

    Method of passivating of low dielectric materials in wafer processing
    8.
    发明授权
    Method of passivating of low dielectric materials in wafer processing 失效
    在晶圆加工中钝化低介电常数材料的方法

    公开(公告)号：US07270941B2

    公开(公告)日：2007-09-18

    申请号：US10379984

    申请日：2003-03-04

    申请人： Dorel Ioan Toma ,  Paul Schilling

    发明人： Dorel Ioan Toma ,  Paul Schilling

    IPC分类号： G03F7/26

    CPC分类号： C23C8/10 ,  C23C26/00 ,  C23C30/00 ,  H01L21/02063 ,  H01L21/02101 ,  H01L21/02126 ,  H01L21/02137 ,  H01L21/02203 ,  H01L21/02343 ,  H01L21/3105 ,  H01L21/31058 ,  H01L21/3121 ,  H01L21/3125 ,  H01L21/316 ,  H01L21/31629 ,  H01L21/31633

    摘要： A method of passivating silicon-oxide based low-k materials using a supercritical carbon dioxide passivating solution comprising a silylating agent is disclosed. The silylating agent is preferably an organosilicon compound comprising organo-groups with five carbon atoms such as hexamethyldisilazane (HMDS) and chlorotrimethylsilane (TMCS) and combinations thereof. The silicon oxide-based low-k material, in accordance with embodiments of the invention, is maintained at temperatures in a range of 40 to 200 degrees Celsius, and preferably at a temperature of about 150 degrees Celsius, and at pressures in a range of 1,070 to 9,000 psi, and preferably at a pressure of about 3,000 psi, while being exposed to the supercritical passivating solution. In accordance with further embodiments of the invention, a silicon oxide-based low-k material is simultaneously cleaned and passivated using a supercritical carbon dioxide cleaning solution.

    摘要翻译： 公开了一种使用包含甲硅烷化剂的超临界二氧化碳钝化溶液钝化基于氧化硅的低k材料的方法。 甲硅烷基化剂优选为包含具有五个碳原子的有机基团的有机硅化合物，例如六甲基二硅氮烷（HMDS）和氯代三甲基硅烷（TMCS）及其组合。 根据本发明的实施方案的基于氧化硅的低k材料保持在40至200摄氏度的温度，优选在约150摄氏度的温度下，并且在 1,070至9,000psi，优选在约3,000psi的压力下，同时暴露于超临界钝化溶液。 根据本发明的另外的实施方案，使用超临界二氧化碳清洗溶液同时清洗和钝化基于氧化硅的低k材料。

    Method of calibration for nonlinear optical sensor
    10.
    发明授权
    Method of calibration for nonlinear optical sensor 有权
    非线性光学传感器校准方法

    公开(公告)号：US08076154B2

    公开(公告)日：2011-12-13

    申请号：US12370358

    申请日：2009-02-12

    申请人： Joseph Erickson ,  Eugene Tokhtuev ,  Christopher Owen ,  Paul Schilling

    发明人： Joseph Erickson ,  Eugene Tokhtuev ,  Christopher Owen ,  Paul Schilling

    IPC分类号： G01N21/00

    CPC分类号： G01N35/085 ,  G01N21/05 ,  G01N21/274 ,  G01N35/1097 ,  G01N2021/0346 ,  G01N2035/0097 ,  Y10T436/201666 ,  Y10T436/206664

    摘要： A use composition monitor determines the concentration of peracid and/or peroxide in a use composition using a kinetic assay procedure. A sample mixture containing a sample of the use composition, a diluent and at least one reagent is prepared and analyzed using, for example, an optical detector. Response data obtained by the detector is used to determine the concentrations of peracid and/or peroxide in the use composition based upon an evaluation function determined by a calibration method. The calibration method includes determining coefficients of the evaluation function based upon known concentrations, and measured response data of calibration samples.

    摘要翻译： 使用组合物监测器使用动力学测定程序确定使用组合物中过酸和/或过氧化物的浓度。 使用例如光学检测器制备并分析含有使用组合物样品，稀释剂和至少一种试剂的样品混合物。 基于通过校准方法确定的评价函数，使用检测器获得的反应数据用于确定使用组合物中过酸和/或过氧化物的浓度。 校准方法包括基于已知浓度确定评估函数的系数，以及校准样本的测量响应数据。