System for cleaning contamination from magnetic recording media rows
    6.
    发明授权
    System for cleaning contamination from magnetic recording media rows 失效
    用于清洁磁记录媒体行污染的系统

    公开(公告)号:US06419566B1

    公开(公告)日:2002-07-16

    申请号:US09502883

    申请日:2000-02-11

    IPC分类号: B24C332

    摘要: A system having an array of nozzles is used to clean fabricated rows of magnetic heads. Each nozzle contains a pair of concentric tubes. The inner tube of the nozzle discharges a plume of fine dry material at a target. The outer tube of the nozzle simultaneously discharges a hollow tube of water that completely surrounds the plume discharged by the inner tube. This nozzle design prevents the dry material from mixing with the water during discharge so that the plumes remain dry until they strike the target with the tubes of water. As the nozzles pass over various portions of the target, the plumes remove most forms of process contamination, while the water serves multiple purposes. The leading stream of water in front of each plume loosens some contaminants and moistens the target prior to contact by the dry material. In addition, the trailing streams of water flush the target and removes any remaining contamination left behind after the plumes pass by. The tube of water for each nozzle also reduces dry powder overspray or dust and provides ESD protection for the target. A final rinse with a set of fan nozzles removes any residual contamination and/or cleaning media.

    摘要翻译: 使用具有喷嘴阵列的系统来清洁制造的磁头列。 每个喷嘴包含一对同心管。 喷嘴的内管将目标物上的细干物料排出。 喷嘴的外管同时排出完全包围由内管排出的羽流的中空水管。 这种喷嘴设计可以防止干燥物料在排放过程中与水混合,从而使羽毛保持干燥,直到它们与水管撞击。 当喷嘴通过目标的各个部分时,羽流消除大多数形式的过程污染,同时水用于多种目的。 在每个羽毛前面的主要水流松动一些污染物,并在干物质接触之前润湿目标物。 此外,尾流的水冲洗目标,并消除羽毛通过后留下的剩余污染物。 每个喷嘴的水管也可以减少干粉过量喷溅或灰尘,并为目标提供ESD保护。 用一组风扇喷嘴进行最终冲洗可以清除残留的污染物和/或清洁介质。