Method for making a liquid crystal alignment layer
    3.
    发明授权
    Method for making a liquid crystal alignment layer 失效
    液晶取向膜的制造方法

    公开(公告)号:US06331381B1

    公开(公告)日:2001-12-18

    申请号:US09548990

    申请日:2000-04-14

    IPC分类号: G02F11337

    CPC分类号: G02F1/13378 G02F1/133723

    摘要: A method is disclosed for forming an alignment layer for use in a liquid crystal cell layer for use in a liquid crystal cell using an ion beam source that includes the steps of: (1) providing a substrate having a surface; (2) providing an ion beam source that emanates an ion beam; (3) providing a mask layer disposed between the substrate surface and the ion beam source. The mask layer has at least two openings disposed between the ion beam source and the substrate surface. The shape and position of the openings reduce the irregularity of the beam exposure in a border region on the surface of the substrate resulting from the ion beam source. The present invention may be used in conjunction with substrate treatment using multiple sweeps with a single ion beam source, or with a substrate treatment using a single sweep with multiple ion beam sources. Also disclosed is an apparatus for practicing the disclosed method.

    摘要翻译: 公开了一种用于形成用于使用离子束源的液晶单元的液晶单元层中的取向层的方法,该方法包括以下步骤:(1)提供具有表面的基板; (2)提供发出离子束的离子束源; (3)提供设置在基板表面和离子束源之间的掩模层。 掩模层具有设置在离子束源和衬底表面之间的至少两个开口。 开口的形状和位置减小了由离子束源产生的衬底表面上的边界区域中的光束曝光的不规则性。 本发明可以与使用具有单个离子束源的多个扫描的基板处理结合使用,或者使用具有多个离子束源的单次扫描的基板处理结合使用。 还公开了一种用于实施所公开的方法的装置。