-
公开(公告)号：US07033433B2
公开(公告)日：2006-04-25
申请号：US10757751
申请日：2004-01-14
申请人： Qiao Li , William R. Rosch , Paul M. Schermerhorn
发明人： Qiao Li , William R. Rosch , Paul M. Schermerhorn
IPC分类号： C30B11/02
摘要： The invention is directed to method of preparing metal fluoride single crystals and particularly to crystals where the metal is calcium, barium, magnesium or strontium, or a mixture thereof. The invention uses a decreasing fast cooling profile and an increasing slow cooling profile for the hot zone and the cold zone, respectively, after crystal formation during cooling from melt temperatures to a first temperature. A substantially constant cooling rate is then applied to the both zones during cooling from the first temperature to a final temperature, usually room temperature. It has been found that the substantially constant cooling rate during the annealing process results in crystals having improved homogeneity and birefringence.
摘要翻译： 本发明涉及制备金属氟化物单晶，特别是金属为钙，钡，镁或锶的晶体或其混合物的方法。 本发明在从熔融温度冷却至第一温度后晶体形成之后分别使用减少的快速冷却曲线和对于热区和冷区的缓慢冷却曲线。 然后在从第一温度到最终温度（通常为室温）的冷却期间，将两个区域基本上恒定的冷却速率施加到两个区域。 已经发现，在退火过程中基本恒定的冷却速率导致具有改善的均匀性和双折射的晶体。
-
2.发明授权
公开(公告)号：US4961767A
公开(公告)日：1990-10-09
申请号：US373628
申请日：1989-06-29
IPC分类号： C03B19/06 , C03B19/10 , C03B37/012 , C03C1/00
CPC分类号： C03C1/006 , C03B19/06 , C03B19/066 , C03B19/1065 , C03B20/00 , C03B37/01282
摘要： A method for consolidating a green body is disclosed which involves: (1) drying and partially sintering the green body at a temperature above about 1000.degree. C. and in an atmosphere containing chlorine; (2) fully sintering the green body under vacuum at a temperature above about 1720.degree. C.; and (3) hot isostatic pressing ("hipping") the green body at a temperature above about 1150.degree. C. and at a pressure above about 100 psig. The process produces glass articles which have a low water content and are essentially bubble free.This is a continuation of co-pending application Ser. No. 07/271,709 filed Nov. 16, 1988, now abandoned which is a divisional application of application Ser. No. 07/052,619, filed May 20, 1987 now U.S. Pat. No. 4,789,389.
摘要翻译： 公开了一种用于固化生坯的方法，其包括：（1）在高于约1000℃的温度下和在含氯气氛中干燥和部分烧结生坯; （2）在高于约1720℃的温度下在真空下完全烧结生坯。 和（3）在高于约1150℃的温度和高于约100psig的压力下对生坯进行热等静压（“揉”）生坯。 该方法生产具有低含水量且基本上无气泡的玻璃制品。 这是共同未决申请的延续。 1988年11月16日提交的No.07 / 271,709，现在已经放弃了这是应用程序系列的分案申请。 1987年5月20日提交的No.07 / 052,619，现为美国专利No. 第4,789,389号。
-
公开(公告)号：US06915665B2
公开(公告)日：2005-07-12
申请号：US10835858
申请日：2004-04-30
申请人： Nicholas F. Borrelli , Paul S. Danielson , Michael R. Heslin , Stephan L. Logunov , Johannes Moll , Paul M. Schermerhorn , Charlene M. Smith
发明人： Nicholas F. Borrelli , Paul S. Danielson , Michael R. Heslin , Stephan L. Logunov , Johannes Moll , Paul M. Schermerhorn , Charlene M. Smith
CPC分类号： G03F7/70941 , C03B19/1423 , C03B2201/21 , C03B2207/36 , C03C23/0025 , G02B13/143 , G03F7/70958
摘要： The invention provides an ultraviolet lithography method/system. The lithography method and system include providing a below 200 nm radiation source, providing a photolytically improved transmitting fused silica glass lithography optical element, transmitting below 200 nm photons through said photolytically improved transmitting fused silica glass lithography optical element to form a lithography pattern which is reduced and projected onto a radiation sensitive lithography printing medium to form a printed lithography pattern. Providing the photolytically improved transmitting fused silica glass lithography optical element includes providing a photolytically improved transmitting fused silica glass lithography optical element preform body and forming the photolytically improved transmitting fused silica glass lithography optical element preform into said lithography optical element.
摘要翻译： 本发明提供一种紫外光刻方法/系统。 光刻方法和系统包括提供低于200nm的辐射源，提供光解改进的透射熔融石英玻璃光刻光学元件，通过所述光解改进的透射熔融石英玻璃光刻光学元件在低于200nm的光子下传输，以形成减小的光刻图案 并投影到辐射敏感光刻打印介质上以形成印刷光刻图案。 提供光解改进的透射熔融石英玻璃光刻光学元件包括提供光解改性的透射熔融石英玻璃光刻光学元件预制体，并将光解改进的透射熔融石英玻璃光刻光学元件预成型体形成到所述光刻光学元件中。
-
公开(公告)号：US5951730A
公开(公告)日：1999-09-14
申请号：US71403
申请日：1998-05-01
申请人： Paul M. Schermerhorn
发明人： Paul M. Schermerhorn
CPC分类号： C03B19/1453 , C03B19/1407 , C03B19/1484 , C03B2207/52 , Y10S501/90 , Y10S65/08
摘要： Fused silica boules (19) having improved off-axis homogeneity are produced by controlling the air flow around the boule (19) during its formation. The boule is formed in a containment vessel (13) which collects soot from a plurality of burners (14). The containment vessel (13) rotates and oscillates relative to the burners (14) as the boule (19) is formed. Surrounding the containment vessel (13) is an air flow wall (130) which oscillates with the containment vessel (13). The air flow wall (130) is spaced from the containment vessel (13) by a gap (175) through which air flows during boule formation. The dimensions of this gap (175) remain constant as the boule is formed. Surrounding the air flow wall (130) is a stationary wall (160). The stationary wall (160) is spaced from the air flow wall (130) by a gap (165) whose dimensions change as the boule is formed. A motion accommodating seal (155) blocks air flow in this gap (165). By confining air flow to the gap (175) between the containment vessel (13) and the air flow wall (130), off-axis striae in the boule are essentially completely eliminated.
摘要翻译： 具有改善的离轴均匀性的熔融二氧化硅凝胶（19）通过在其形成期间控制围绕坯料（19）的空气流而产生。 该密封件形成在从多个燃烧器（14）收集烟灰的安全壳（13）中。 容纳容器（13）随着形成有毛坯（19）而相对于燃烧器（14）旋转和摆动。 围绕容纳容器（13）的是与容纳容器（13）一起摆动的空气流动壁（130）。 空气流动壁（130）与密封容器（13）间隔开一个间隙（175），空气流在孔中形成。 这个间隙（175）的尺寸保持恒定，因为形成了原子棒。 围绕空气流动壁（130）的是静止壁（160）。 固定壁（160）与空气流动壁（130）间隔一定距离（165），间隙（165）的尺寸随着形成的毛坯而变化。 运动容纳密封件（155）阻挡该间隙（165）中的气流。 通过将空气流限制在容纳容器（13）和空气流动壁（130）之间的间隙（175）上，基本上完全消除了原包中的轴外条纹。
-
公开(公告)号：US5547482A
公开(公告)日：1996-08-20
申请号：US270423
申请日：1994-07-05
CPC分类号： C03C3/06 , C03B19/06 , C03B19/066 , C03B19/12 , C03B20/00 , C03B32/00 , C03B2201/08 , C03B2201/20 , C03B2201/28 , C03B2201/30 , C03B2201/31 , C03B2201/32 , C03B2201/34 , C03B2201/40 , C03B2201/42 , C03B2201/50 , C03B2201/54 , C03C2201/06 , C03C2201/42 , C03C2203/26 , C03C2203/27 , C03C2203/50 , Y02P40/57
摘要： This invention is directed to the production of essentially defect-free high purity fused silica glass articles, the method comprising the following steps: (a) forming a green body from silica particulates or a porous body of amorphous silica; (b) sintering said body in a chamber by raising the temperature of the chamber to above 1720.degree. C., while purging the chamber with helium or applying a vacuum to the chamber; and (c) consolidating the sintered body in a chamber by raising the temperature within the chamber to at least 1750.degree. C., introducing an inert gas into the chamber at a pressure less than about 6.9 MPa (1000 psig), and cooling the chamber while maintaining the pressurized atmosphere to a temperature at least below the annealing point of the glass. In the most preferred practice, a green body of silica particulates will be prepared via a sol-gel process.
摘要翻译： 本发明涉及生产基本上无缺陷的高纯度熔融石英玻璃制品，该方法包括以下步骤：（a）由二氧化硅微粒或无定形二氧化硅的多孔体形成生坯; （b）通过将腔室的温度升高到1720℃以上，同时用氦气吹扫腔室或向室内施加真空来在室内烧结所述主体; 和（c）通过将室内的温度升高至至少1750℃将烧结体固化在室中，在小于约6.9MPa（1000psig）的压力下将惰性气体引入室中，并冷却室 同时将加压气氛保持在至少低于玻璃退火点的温度。 在最优选的实践中，将通过溶胶 - 凝胶法制备生物体的二氧化硅颗粒。
-
6.发明授权
公开(公告)号：US4816299A
公开(公告)日：1989-03-28
申请号：US052655
申请日：1987-05-20
IPC分类号： C08K3/26 , C08G59/00 , C08K3/34 , C08K3/36 , C08L63/00 , C08L101/00 , C09C1/30 , H01L23/29 , B05D7/00 , C03B23/20 , C04B5/00
CPC分类号： H01L23/295 , C08K3/36 , C09C1/3036 , C01P2004/51 , C01P2004/61 , C01P2006/10 , C01P2006/12 , H01L2924/0002 , Y10S65/901
摘要： Compositions for encapsulating electronic components are provided which comprise a blend of a curable resin and an ultra-pure silica filler. The filler is composed of fused silica granules which are prepared from a gel of a silicon-containing organic compound, such as TEOS, and which have a uranium content of less than about 0.1 parts per billion and a thorium content of less than about 0.5 parts per billion. The compositions can be readily manufactured in commercial quantities at reasonable costs and are particular well-suite for encapsulating components, such as, high density RAMs, which are sensitive to alpha particles.
-
7.发明授权公开(公告)号：US07306673B2
公开(公告)日：2007-12-11
申请号：US10971315
申请日：2004-10-22
申请人： Michelle M. L. Fredholm , Jeffrey T. Kohli , Nicholas LeBlond , Alexandre M. Mayolet , Viktoria Pshenitsyna , Pawan Saxena , Paul M. Schermerhorn
发明人： Michelle M. L. Fredholm , Jeffrey T. Kohli , Nicholas LeBlond , Alexandre M. Mayolet , Viktoria Pshenitsyna , Pawan Saxena , Paul M. Schermerhorn
IPC分类号： C30B11/00
摘要： The invention is directed to a method for growing metal fluoride crystals suitable for use in below 200 nm optical lithography systems, the method comprising including at least the step of heating a crystal growth furnace to a temperature in the range of 1400-2000° C. to purify the furnace by removal of sulfur and chlorine prior to using the furnace for growing metal fluoride single crystals.
摘要翻译： 本发明涉及一种用于生长适用于200nm以下的光刻系统的金属氟化物晶体的方法，该方法至少包括将晶体生长炉加热到1400-2000℃的温度的步骤。 在使用炉子生长金属氟化物单晶之前，通过除去硫和氯来净化炉。
-
8.发明授权Method and apparatus for reducing refractory contamination in fused silica processes 失效降低熔融二氧化硅工艺中难熔物质污染的方法和装置公开(公告)号：US06497118B1
公开(公告)日：2002-12-24
申请号：US09664822
申请日：2000-09-19
申请人： Paul M. Schermerhorn
发明人： Paul M. Schermerhorn
IPC分类号： C03B1906
CPC分类号： C03B19/1423 , C03B19/1407 , C03B2207/42 , F23M2900/05021 , Y02P40/57
摘要： In furnaces for producing high purity fused silica glass boules, the refractory in the area of the burner holes reaches such elevated temperatures that cause impurities to leach out and the dissociation of the refractory, causing contamination of the silica glass. In order to reduce the temperature of the burner hole refractory, a porous insert or liner is positioned within the burner hole and a suitable gas is supplied thereto. The gas diffuses through the porous liner and not only cools the liner and refractory, but also forms a boundary layer along an inside surface of the insert that prevents particle buildup. The cooling of the insert and surrounding burner hole refractory prevents contamination of the silica glass from the refractory.
摘要翻译： 在用于生产高纯度熔凝石英玻璃泡沫的炉子中，燃烧器孔区域中的耐火材料达到这样的升高的温度，这导致杂质浸出和耐火材料的解离，引起二氧化硅玻璃的污染。 为了降低燃烧器孔耐火材料的温度，将多孔插入件或衬套定位在燃烧器孔内，并向其供应合适的气体。 气体通过多孔衬里扩散，不仅冷却衬套和耐火材料，而且还沿着插入件的内表面形成防止颗粒积聚的边界层。 插入件和周围燃烧器孔耐火材料的冷却防止二氧化硅玻璃从耐火材料中的污染。
-
9.发明授权
公开(公告)号：US4789389A
公开(公告)日：1988-12-06
申请号：US52619
申请日：1987-05-20
IPC分类号： G02B6/00 , C01B33/18 , C03B8/02 , C03B19/06 , C03B19/10 , C03B20/00 , C03B37/012 , C03B37/014 , C03C1/00 , C03B37/023 , C03B37/016
CPC分类号： C03C1/006 , C03B19/06 , C03B19/066 , C03B19/1065 , C03B20/00 , C03B37/01282
摘要： A method for producing ultra-high purity, optical quality, glass articles is disclosed which involves: (1) forming a gel from a silicon-containing organic compound, such as, TEOS; (2) drying the gel to produce granules having a mean particle size of less than about 1 millimeter; (3) fully sintering the granules to produce high purity, artificial sand; (4) casting the artificial sand by conventional techniques, such as, slip casting, to form a high density, porous, green body; (5) drying and partially sintering the green body; (6) fully sintering the green body under vacuum; and (7) hot isostatic pressing ("hipping") the green body. The glass articles produced by the process have higher purity, greater homogeneity, and less IR absorption than existing, commercially available, premium quality, fused silica, glass articles. In addition, in accordance with the invention, high purity glass articles of complex shapes can be directly cast, rather than being machined or pressed from sheets of glass, as in the prior art.
-
-
-
-
-
-
-
-
搜索结果
9 条记录 (耗时 0.026 秒)