Multi-Layer Reconfigurable Switches
    2.
    发明申请
    Multi-Layer Reconfigurable Switches 审中-公开
    多层可重配置开关

    公开(公告)号:US20110121359A1

    公开(公告)日:2011-05-26

    申请号:US13056101

    申请日:2008-07-31

    IPC分类号: H01L29/86 B82Y99/00

    摘要: Embodiments of the present invention are directed to reconfigurable two-terminal electronic switch devices (100) comprising a compound (102) sandwiched between two electrodes (104,106). These devices are configured so that the two electrode/compound interface regions can be either rectifying or conductive, depending on the concentration of dopants at the respective interface, which provides four different device operating characteristics. By forcing charged dopants into or out of the interface regions with an applied electric field pulse, a circuit element can be switched from one type of stable operation to another in at least three different ways. A family of devices built to express these properties display behaviors that provide new opportunities for nanoscale electronic devices.

    摘要翻译: 本发明的实施例涉及包括夹在两个电极(104,106)之间的化合物(102)的可重新配置的两端子电子开关装置(100)。 这些器件被配置为使得两个电极/复合界面区域可以是整流或导电,这取决于各个界面处的掺杂剂的浓度,其提供四种不同的器件工作特性。 通过用施加的电场脉冲将带电荷的掺杂剂强制进出界面区域,电路元件可以以至少三种不同的方式从一种类型的稳定操作切换到另一种。 一系列用于表现这些属性的设备显示出为纳米级电子设备提供新机会的行为。

    Compensation for distortion in contact lithography
    8.
    发明授权
    Compensation for distortion in contact lithography 失效
    接触光刻中的失真补偿

    公开(公告)号:US07613538B2

    公开(公告)日:2009-11-03

    申请号:US11492365

    申请日:2006-07-24

    摘要: A method of contact lithography includes predicting distortions likely to occur in transferring a pattern from a mold to a substrate during a contact lithography process; and modifying the mold to compensate for the distortions. A contact lithography system includes a design subsystem configured to generate data describing a lithography pattern; an analysis subsystem configured to identify one or more distortions likely to occur when using a mold created from the data; and a mold modification subsystem configured to modify the data to compensate for the one or more distortions identified by the analysis subsystem.

    摘要翻译: 接触光刻的方法包括预测在接触光刻工艺期间将图案从模具转移到衬底可能发生的变形; 并修改模具以补偿失真。 接触光刻系统包括设计子系统,被配置为产生描述光刻图案的数据; 分析子系统被配置为识别当使用从数据创建的模具时可能发生的一个或多个失真; 以及模具修改子系统,被配置为修改数据以补偿由分析子系统识别的一个或多个失真。

    Compensation for distortion in contact lithography
    10.
    发明申请
    Compensation for distortion in contact lithography 失效
    接触光刻中的失真补偿

    公开(公告)号:US20080021587A1

    公开(公告)日:2008-01-24

    申请号:US11492365

    申请日:2006-07-24

    IPC分类号: G06F17/50 G06F19/00

    摘要: A method of contact lithography includes predicting distortions likely to occur in transferring a pattern from a mold to a substrate during a contact lithography process; and modifying the mold to compensate for the distortions. A contact lithography system includes a design subsystem configured to generate data describing a lithography pattern; an analysis subsystem configured to identify one or more distortions likely to occur when using a mold created from the data; and a mold modification subsystem configured to modify the data to compensate for the one or more distortions identified by the analysis subsystem.

    摘要翻译: 接触光刻的方法包括预测在接触光刻工艺期间将图案从模具转移到衬底可能发生的变形; 并修改模具以补偿失真。 接触光刻系统包括设计子系统,被配置为产生描述光刻图案的数据; 分析子系统被配置为识别当使用从数据创建的模具时可能发生的一个或多个失真; 以及模具修改子系统,被配置为修改数据以补偿由分析子系统识别的一个或多个失真。