Free-form dual dual-conductor integrated radio frequency media

    公开(公告)号:US11342647B2

    公开(公告)日:2022-05-24

    申请号:US16695695

    申请日:2019-11-26

    Abstract: A free-from radio frequency (RF) media includes a substrate having a first dielectric layer formed thereon and a second dielectric layer on an upper surface of the first dielectric layer. A first conductive layer is formed on an upper surface of the first dielectric layer and has a first overall profile. A second conductive layer having a second overall profile is formed on an upper surface of the second dielectric layer such that the second dielectric layer is interposed between the first and second conductive layers. The first overall profile of the first conductive layer is different from the second overall profile of the second conductive layer.

    SYSTEMS AND METHODS FOR PROVIDING HIGH-CAPACITANCE RF MEMS SWITCHES
    5.
    发明申请
    SYSTEMS AND METHODS FOR PROVIDING HIGH-CAPACITANCE RF MEMS SWITCHES 有权
    提供高容量RF MEMS开关的系统和方法

    公开(公告)号:US20130111738A1

    公开(公告)日:2013-05-09

    申请号:US13727524

    申请日:2012-12-26

    CPC classification number: H01H11/00 H01G5/16 H01H57/00 Y10T29/49105

    Abstract: Systems and methods for providing high-capacitive RF MEMS switches are provided. In one embodiment, the invention relates to a micro-electro-mechanical switch assembly including a substrate, an electrode disposed on a portion of the substrate, a dielectric layer disposed on at least a portion of the electrode, a metal layer disposed on at least a portion of the dielectric layer, and a flexible membrane having first and second ends supported at spaced locations on the substrate base, where the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, and where, in the actuated position, the flexible membrane is in electrical contact with the metal layer.

    Abstract translation: 提供了用于提供高电容RF MEMS开关的系统和方法。 在一个实施例中,本发明涉及一种微机电开关组件,其包括衬底,设置在衬底的一部分上的电极,设置在电极的至少一部分上的电介质层,至少设置在金属层上的金属层 所述电介质层的一部分以及柔性膜,所述柔性膜具有第一和第二端部,其支撑在所述基板基底上的间隔位置处,其中所述柔性膜被配置为响应于施加在所述介电层之间的预选开关电压而从默认位置移动到致动位置 柔性膜和电极,并且其中在致动位置中柔性膜与金属层电接触。

    FREE-FORM DUAL DUAL-CONDUCTOR INTEGRATED RADIO FREQUENCY MEDIA

    公开(公告)号:US20210159578A1

    公开(公告)日:2021-05-27

    申请号:US16695695

    申请日:2019-11-26

    Abstract: A free-from radio frequency (RF) media includes a substrate having a first dielectric layer formed thereon and a second dielectric layer on an upper surface of the first dielectric layer. A first conductive layer is formed on an upper surface of the first dielectric layer and has a first overall profile. A second conductive layer having a second overall profile is formed on an upper surface of the second dielectric layer such that the second dielectric layer is interposed between the first and second conductive layers. The first overall profile of the first conductive layer is different from the second overall profile of the second conductive layer.

    Method for manufacturing a high-capacitance RF MEMS switch
    9.
    发明授权
    Method for manufacturing a high-capacitance RF MEMS switch 有权
    高容量RF MEMS开关的制造方法

    公开(公告)号:US09373460B2

    公开(公告)日:2016-06-21

    申请号:US13727524

    申请日:2012-12-26

    CPC classification number: H01H11/00 H01G5/16 H01H57/00 Y10T29/49105

    Abstract: Systems and methods for providing high-capacitive RF MEMS switches are provided. In one embodiment, the invention relates to a micro-electro-mechanical switch assembly including a substrate, an electrode disposed on a portion of the substrate, a dielectric layer disposed on at least a portion of the electrode, a metal layer disposed on at least a portion of the dielectric layer, and a flexible membrane having first and second ends supported at spaced locations on the substrate base, where the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, and where, in the actuated position, the flexible membrane is in electrical contact with the metal layer.

    Abstract translation: 提供了用于提供高电容RF MEMS开关的系统和方法。 在一个实施例中,本发明涉及一种微机电开关组件,其包括衬底,设置在衬底的一部分上的电极,设置在电极的至少一部分上的电介质层,至少设置在金属层上的金属层 所述电介质层的一部分以及柔性膜,所述柔性膜具有第一和第二端部,其支撑在所述基板基底上的间隔位置处,其中所述柔性膜被配置为响应于施加在所述介电层之间的预选开关电压而从默认位置移动到致动位置 柔性膜和电极,并且其中在致动位置中柔性膜与金属层电接触。

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