公开(公告)号：US09297071B2

公开(公告)日：2016-03-29

申请号：US13504838

申请日：2010-10-21

申请人： Ravi Kanjolia ,  Chris Platts ,  Nam Nguyen ,  Mark Wilkinson

发明人： Ravi Kanjolia ,  Chris Platts ,  Nam Nguyen ,  Mark Wilkinson

IPC分类号： C23C14/24 ,  C23C16/448

CPC分类号： C23C16/4483 ,  C23C14/243 ,  C23C16/4481 ,  Y10T137/0318 ,  Y10T137/4891 ,  Y10T137/7976 ,  Y10T137/8122 ,  Y10T137/8622

摘要： A solid precursor delivery assembly generally includes a container having upper and lower portions and chambers defined within the container, including an inlet chamber, an outlet chamber, and first and second precursor chambers. The first and second precursor chambers are configured for holding precursor material within the container. Sintered frits are fixedly coupled and sealed to an interior portion of the container, and define at least part of the chambers within the container. At least one of the sintered frits is configured for retaining precursor material thereon within the first precursor chamber, and at least one of the sintered frits is configured for retaining precursor material thereon within the second precursor chamber. An inlet is coupled to the container for delivering carrier gas into the container, and an outlet is coupled to the container for use in removing vaporized precursor material and carrier gas from the container.

摘要翻译： 固体前体输送组件通常包括具有限定在容器内的上部和下部和室的容器，包括入口室，出口室以及第一和第二前体室。 第一和第二前体室被配置用于将前体材料保持在容器内。 烧结玻璃料被固定地联接并密封到容器的内部，并且限定容器内的至少一部分室。 烧结的玻璃料中的至少一个被配置用于将第一前体室内的前体材料保持在其上，并且至少一个烧结的玻璃料构造成用于在第二前体室内保留前体材料。 入口耦合到容器以将载气输送到容器中，并且出口连接到容器以用于从容器中除去汽化的前体材料和载气。

公开(公告)号：US20120266967A1

公开(公告)日：2012-10-25

申请号：US13504838

申请日：2010-10-21

申请人： Ravi Kanjolia ,  Chris Platts ,  Nam Nguyen ,  Mark Wilkinson

发明人： Ravi Kanjolia ,  Chris Platts ,  Nam Nguyen ,  Mark Wilkinson

IPC分类号： C23C16/455

CPC分类号： C23C16/4483 ,  C23C14/243 ,  C23C16/4481 ,  Y10T137/0318 ,  Y10T137/4891 ,  Y10T137/7976 ,  Y10T137/8122 ,  Y10T137/8622

摘要： A solid precursor delivery assembly generally includes a container having upper and lower portions and chambers defined within the container, including an inlet chamber, an outlet chamber, and first and second precursor chambers. The first and second precursor chambers are configured for holding precursor material within the container. Sintered frits are fixedly coupled and sealed to an interior portion of the container, and define at least part of the chambers within the container. At least one of the sintered frits is configured for retaining precursor material thereon within the first precursor chamber, and at least one of the sintered frits is configured for retaining precursor material thereon within the second precursor chamber. An inlet is coupled to the container for delivering carrier gas into the container, and an outlet is coupled to the container for use in removing vaporized precursor material and carrier gas from the container.

摘要翻译： 固体前体输送组件通常包括具有限定在容器内的上部和下部和室的容器，包括入口室，出口室以及第一和第二前体室。 第一和第二前体室被配置用于将前体材料保持在容器内。 烧结玻璃料被固定地联接并密封到容器的内部，并且限定容器内的至少一部分室。 烧结的玻璃料中的至少一个被配置用于将第一前体室内的前体材料保持在其上，并且至少一个烧结的玻璃料构造成用于在第二前体室内保留前体材料。 入口耦合到容器以将载气输送到容器中，并且出口连接到容器以用于从容器中除去汽化的前体材料和载气。