摘要:
A cover is provided for a substrate table in an immersion lithographic apparatus that covers at least the gap between a substrate and a recess in a substrate table in which the substrate is received.
摘要:
A photonic material comprising a core and an envelope is provided for use in telecommunications, diagnostics, imaging and other applications. In its simplest form, the core comprises at least one nanoparticle. The nanoparticle comprises an inorganic material and at least one luminescent ion, wherein the inorganic material is suitably selected to bind the luminescent ion. The envelope comprises a suitably selected organic stabilizing layer that overlays the core. The core and envelope may have a shell located between them.