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93 条记录 (耗时 0.042 秒)

    Apparatus for patterning a self-aligned coil using a damascene process
    7.
    发明授权
    Apparatus for patterning a self-aligned coil using a damascene process 有权
    用于使用镶嵌工艺图案化自对准线圈的装置

    公开(公告)号：US07075750B2

    公开(公告)日：2006-07-11

    申请号：US10652877

    申请日：2003-08-29

    申请人： Daniel Wayne Bedell ,  Quang Le ,  Edward Hin Pong Lee ,  Son Van Nguyen ,  Vladimir Nikitin ,  Murali Ramasubramanian

    发明人： Daniel Wayne Bedell ,  Quang Le ,  Edward Hin Pong Lee ,  Son Van Nguyen ,  Vladimir Nikitin ,  Murali Ramasubramanian

    IPC分类号： G11B5/147

    CPC分类号： G11B5/127

    摘要： An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.

    摘要翻译： 公开了一种使用镶嵌工艺图案化自对准线圈的装置。 在设置在第一极层上的第一绝缘层中形成线圈腔。 隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。 在线圈袋中形成铜，并在绝缘层上形成铜。 铜平坦化到绝缘层。 自对准线圈工艺将更多的铜包装到相同的线圈袋中，并松弛线圈对准公差。 由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚，所以防止了突起。

    Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer
    9.
    发明授权
    Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 失效
    制造具有可蚀刻粘合CMP停止层的垂直记录磁头极尖的方法

    公开(公告)号：US07024756B2

    公开(公告)日：2006-04-11

    申请号：US10631706

    申请日：2003-07-30

    申请人： Quang Le ,  Jui-lung Li ,  Jeffrey S. Lille ,  Son Van Nguyen

    发明人： Quang Le ,  Jui-lung Li ,  Jeffrey S. Lille ,  Son Van Nguyen

    IPC分类号： G11B5/187 ,  B44C1/22

    CPC分类号： G11B5/1278 ,  G11B5/3106 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.

    摘要翻译： 制造磁头组件的方法包括形成从头表面凹陷的第二极片层，在第二极片层上形成反应离子可蚀刻（可分离）极尖端形成层，形成钽的粘附/停止层 （Ta），在粘合/停止层上形成光刻胶掩模，其中具有用于使粘附/阻挡层和极尖形成层图案化的开口具有另一个开口，反应离子蚀刻（RIE）通过开口至 形成另一个开口，在另一个开口中形成具有位于粘附/停止层顶部之上的顶部的第二极靴极尖，并且在第二极片极尖的顶部进行化学机械抛光（CMP），直到CMP接触 粘附/停止层。 本发明还包括由这种方法制成的磁头。

    Perpendicular recording magnetic head with a write shield magnetically coupled to a first pole piece
    10.
    发明授权
    Perpendicular recording magnetic head with a write shield magnetically coupled to a first pole piece 失效
    具有与第一极片磁耦合的写入屏蔽的垂直记录磁头

    公开(公告)号：US07031121B2

    公开(公告)日：2006-04-18

    申请号：US10631642

    申请日：2003-07-30

    申请人： Gautam Khera ,  Quang Le ,  Son Van Nguyen ,  Aron Pentek ,  Mason Lamar Williams, III

    发明人： Gautam Khera ,  Quang Le ,  Son Van Nguyen ,  Aron Pentek ,  Mason Lamar Williams, III

    IPC分类号： G11B5/127 ,  G11B5/11

    CPC分类号： G11B5/127 ,  G11B5/1278 ,  G11B5/31 ,  G11B5/3153 ,  G11B5/3176 ,  G11B5/33

    摘要： A perpendicular recording write head has ferromagnetic first and second pole pieces which are connected at a back gap and an insulation stack with a write coil layer embedded therein is located between the first and second pole pieces and between a head surface of the write head and the back gap. The second pole piece has a pole tip which is located at the head surface and a recessed ferromagnetic write shield layer. A nonmagnetic isolation layer is located between the second pole piece and the write shield layer and at least one ferromagnetic stud is magnetically connected between the first pole piece layer and the write shield layer and is located between the head surface and the insulation stack.

    摘要翻译： 垂直记录写头具有在后隙连接的铁磁第一和第二极片，并且其中嵌有写入线圈层的绝缘堆叠位于第一和第二极靴之间以及写头的头表面和 背隙。 第二极片具有位于头表面的极尖和凹陷的铁磁写屏蔽层。 非磁性隔离层位于第二极靴和写入屏蔽层之间，并且至少一个铁磁螺柱磁性地连接在第一极靴层和写入屏蔽层之间，并位于头部表面和绝缘堆叠之间。