摘要:
The invention is directed to a process of purifying metal fluoride materials used to make metal fluoride single crystals suitable for making optical elements used in the transmission of wavelengths below 200 nm, and in particular to a process of purifying such materials by the use of a halogen containing plasma to convert metal oxygenates contaminating the feedstocks used in the preparation of the crystals to metal fluorides. The invention also is directed to a process of growing a metal fluoride single crystal using a crystal growth furnace to carry out the foregoing purification procedure followed by the steps of melting the purified material and cooling it using s selected time and temperature cycle to from a metal fluoride single crystal. The plasmas used in practicing the invention can be derived from a variety of halogenated materials including, for example, fluorocarbons, chlorocarbons, boron trihalides, chlorine, fluorine, xenon difluoride and other gaseous or easily volatilized halogenated substances known in the art.
摘要:
The invention is directed to improving the lifetime of optical assemblies by placing such assemblies in a housing and placing a “getter” material within the housing to remove substances that affect the surface of the optical elements used in such assemblies. The “getter” materials are those materials that can remove H2O and O2 from the operating environment of the optical element. The invention is useful in protecting the optical elements of below 250 nm laser lithography systems from damage due to pitting.
摘要:
What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
摘要:
A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.
摘要:
A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.
摘要:
Optical fiber having a coating surrounding and in direct contact with the silica based cladding region of the fiber, the coating having a Young's modulus of elasticity greater than 30 MPa. The optical fiber has low bend losses, especially low microbend induced losses. The optical fiber has a core surrounded by a cladding, and the cladding has a ring portion that includes holes or doped silica or both.
摘要:
Microstructured optical fiber and method of making. Glass soot is deposited and then consolidated under conditions which are effective to trap a portion of the consolidation gases in the glass to thereby produce a non-periodic array of voids which may then be used to form a void containing cladding region in an optical fiber. Preferred void producing consolidation gases include nitrogen, argon, CO2, oxygen, chlorine, CF4, CO, SO2 and mixtures thereof.
摘要:
Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1 and a pulse length of about 25 ns for 5×109 pulses.
摘要:
The invention includes methods and apparatus for depositing soot onto a glass surface to minimize water in the deposited soot and the diffusion of the water into the glass surface. The invention includes depositing a first layer of soot a on the glass surface at a first forward traverse rate and depositing a second layer of soot at a second forward traverse rate.
摘要:
Hydrophobic polymer surfaces whose level of protein binding is less than about 50-80 ng/cm2 are achieved by: (1) applying a coating solution composed of a solvent and a non-ionic surfactant having a HLB number of less than 5 to the surface; and (2) drying the surface to remove the solvent and thereby bring the surfactant into direct contact with the hydrophobic polymer. The combination of a low HLB number and the drying step have been found to produce low binding surfaces which can withstand multiple washes with water and/or protein-containing solutions Alternatively, the low binding surfaces can be produced by applying the non-ionic surfactant to the mold surfaces which contact molten polymer and form the polymer into a desired shape, e.g., into a multi-well plate, a pipette tip, or the like. Further, the low binding surfaces may be produced by incorporating non-soluble, non-ionic surfactants having an HLB number of less than or equal to 10 into a polymer blend prior to molding the article.
摘要翻译:蛋白质结合水平小于约50-80ng / cm 2的疏水性聚合物表面通过以下方式实现:(1)施加由溶剂和具有HLB的非离子表面活性剂组成的涂布溶液 数量小于5的表面; 和(2)干燥表面以除去溶剂,从而使表面活性剂与疏水性聚合物直接接触。 已经发现低HLB值和干燥步骤的组合产生低结合表面,其可以经受水和/或蛋白质溶液的多次洗涤。或者,低结合表面可以通过将非离子表面活性剂施加到 接触熔融聚合物并将聚合物形成所需形状的模具表面,例如多孔板,移液管尖端等。 此外,低粘合表面可以通过将HLB数小于或等于10的非可溶性非离子表面活性剂在模制制品之前掺入聚合物共混物中来制备。