摘要:
Resist developers can attack some advanced dielectric materials such as silsesquioxane materials which can be used as an insulator between a surface of an integrated circuit chip and wiring layers formed on the surface of the dielectric material. A first protective layer is formed in situ on the dielectric material, such as by exposing the material to an oxygen-containing or flourine containing plasma. Also, by performing a resist stripping or etching process in which a reactant material is supplied externally or liberated from the dielectric material, an extremely thin surface protective covering of an intermediate material may be formed which is impervious to resist developers or any of a plurality of other materials which may damage the flowable oxide material. The first protective layer and the surface protective covering can be formed by essentially identical processes. A dual Damascene process for forming robust connections and vias to the chip can thus be made compatible with advanced dielectrics having particularly low dielectric constants to minimize conductor capacitance and support fast signal propagation and noise immunity even where conductors are closely spaced to each other.
摘要:
Resist developers can attack some advanced dielectric materials such as silsesquioxane materials which can be used as an insulator between a surface of an integrated circuit chip and wiring layers formed on the surface of the dielectric material. By performing a resist stripping or etching process in which a reactant material is supplied externally or liberated from the dielectric material, an extremely thin surface protective covering of an intermediate material may be formed which is impervious to resist developers or any of a plurality of other materials which may damage the flowable oxide material. A dual Damascene process for forming robust connections and vias to the chip can thus be made compatible with advanced dielectrics having particularly low dielectric constants to minimize conductor capacitance and support fast signal propagation and noise immunity even where conductors are closely spaced to each other.
摘要:
Resist developers can attack some advanced dielectric materials such as silsesquioxane materials which can be used as an insulator between a surface of an integrated circuit chip and wiring layers formed on the surface of the dielectric material. By performing a resist stripping or etching process in which a reactant material is supplied externally or liberated from the dielectric material, an extremely thin surface protective covering of an intermediate material may be formed which is impervious to resist developers or any of a plurality of other materials which may damage the flowable oxide material. A dual Damascene process for forming robust connections and vias to the chip can thus be made compatible with advanced dielectrics having particularly low dielectric constants to minimize conductor capacitance and support fast signal propagation and noise immunity even where conductors are closely spaced to each other.
摘要:
Biomarkers are provided for detecting, diagnosing and prognosing thymic cancer in individuals having or suspected of having thymic cancer. In addition, kits are provided for measuring expression levels or the presence of the biomarkers associated with thymic cancer for detecting, diagnosing and prognosing thymic cancer. Furthermore, methods are provided for detecting, diagnosing and prognosing thymic cancer in individuals having or suspected of having thymic cancer via the biomarkers.
摘要:
The invention relates to systems and methods for rapidly and isothermally expanding and compressing gas in energy storage and recovery systems that use open-air hydraulic-pneumatic cylinder assemblies, such as an accumulator and an intensifier in communication with a high-pressure gas storage reservoir on a gas-side of the circuits and a combination fluid motor/pump, coupled to a combination electric generator/motor on the fluid side of the circuits. The systems use heat transfer subsystems in communication with at least one of the cylinder assemblies or reservoir to thermally condition the gas being expanded or compressed.
摘要:
In various embodiments, cylinder assemblies are coupled in series pneumatically, thereby reducing a range of force produced by or acting on the cylinder assemblies during expansion or compression of a gas.
摘要:
In various embodiments, a mechanical assembly and/or storage vessel is fluidly coupled to a circulation apparatus for receiving pressurized heat-transfer fluid from an outlet at a first elevated pressure, boosting a pressure of the heat-transfer fluid to a second pressure larger than the first pressure, and returning heat-transfer fluid to an inlet at a third pressure.
摘要:
A pipe joiner includes a power assembly and first and second attachment retainers, each retainer configured to accept a pipe claw. A frame supports the first and second attachment retainers. The power assembly is coupled to the frame in such a manner that operating the power assembly draws the retainers toward one another.
摘要:
A method includes receiving a plurality of objects included within a print job. A first object of the plurality of objects and a second object of the plurality of objects are processed to define a first overlapping region between the first and second objects. The first object is modified to remove the first overlapping region, thus generating a modified first object.