Methods of making and using integrated and testable sensor array
    1.
    发明授权
    Methods of making and using integrated and testable sensor array 有权
    制作和使用集成和可测量传感器阵列的方法

    公开(公告)号:US07781238B2

    公开(公告)日:2010-08-24

    申请号:US11951360

    申请日:2007-12-06

    IPC分类号: H01L21/66

    CPC分类号: H01L22/20 H01L22/14

    摘要: A method for making a testable sensor assembly is provided. The method includes forming a first sensor array on a first substrate having a first side and a second side, wherein the first sensor array is formed on the first side of the first substrate, coupling a first semiconductor wafer having a first side and a second side to the first sensor array, wherein the first side of the first semiconductor wafer is coupled to the first sensor array, thinning one of the second side of the first substrate or the second side of the first semiconductor wafer, and testing the first sensor array to identify operational and non-operational units in the testable sensor assembly before integration of the sensor assembly with interface electronics.

    摘要翻译: 提供了制造可测试的传感器组件的方法。 该方法包括在具有第一侧和第二侧的第一衬底上形成第一传感器阵列,其中第一传感器阵列形成在第一衬底的第一侧上,将具有第一侧和第二侧的第一半导体晶片 到第一传感器阵列,其中第一半导体晶片的第一侧耦合到第一传感器阵列,使第一衬底的第二侧或第一半导体晶片的第二面之一变薄,并将第一传感器阵列测试为 在将传感器组件与接口电子器件集成之前,确定可测试传感器组件中的操作和非操作单元。

    METHODS OF MAKING AND USING INTEGRATED AND TESTABLE SENSOR ARRAY
    2.
    发明申请
    METHODS OF MAKING AND USING INTEGRATED AND TESTABLE SENSOR ARRAY 有权
    制造和使用集成和可测传感器阵列的方法

    公开(公告)号:US20090148967A1

    公开(公告)日:2009-06-11

    申请号:US11951360

    申请日:2007-12-06

    IPC分类号: H01L21/66

    CPC分类号: H01L22/20 H01L22/14

    摘要: A method for making a testable sensor assembly is provided. The method includes forming a first sensor array on a first substrate having a first side and a second side, wherein the first sensor array is formed on the first side of the first substrate, coupling a first semiconductor wafer having a first side and a second side to the first sensor array, wherein the first side of the first semiconductor wafer is coupled to the first sensor array, thinning one of the second side of the first substrate or the second side of the first semiconductor wafer, and testing the first sensor array to identify operational and non-operational units in the testable sensor assembly before integration of the sensor assembly with interface electronics.

    摘要翻译: 提供了制造可测试的传感器组件的方法。 该方法包括在具有第一侧和第二侧的第一衬底上形成第一传感器阵列,其中第一传感器阵列形成在第一衬底的第一侧上,将具有第一侧和第二侧的第一半导体晶片 到第一传感器阵列,其中第一半导体晶片的第一侧耦合到第一传感器阵列,使第一衬底的第二侧或第一半导体晶片的第二面之一变薄,并将第一传感器阵列测试为 在将传感器组件与接口电子器件集成之前,确定可测试传感器组件中的操作和非操作单元。

    Isolation of short-circuited sensor cells for high-reliability operation of sensor array
    4.
    发明授权
    Isolation of short-circuited sensor cells for high-reliability operation of sensor array 有权
    隔离传感器阵列的高可靠性操作的短路传感器单元

    公开(公告)号:US07293462B2

    公开(公告)日:2007-11-13

    申请号:US11028789

    申请日:2005-01-04

    IPC分类号: G01H11/00

    CPC分类号: H04R23/00 B06B1/0292

    摘要: A device comprising an array of sensors and a multiplicity of bus lines, each sensor being electrically connected to a respective bus line and comprising a respective multiplicity of groups of micromachined sensor cells, the sensor cell groups of a particular sensor being electrically coupled to each other via the bus line to which that sensor is connected, each sensor cell group comprising a respective multiplicity of micromachined sensor cells that are electrically interconnected to each other and not switchably disconnectable from each other, the device further comprising means for isolating any one of the sensor cell groups from its associated bus line and in response to any one of the micromachined sensor cells of that sensor cell group being short-circuited to ground. In one implementation, the isolating means comprise a multiplicity of fuses. In another implementation, the isolating means comprise a multiplicity of short circuit protection modules, each module comprising a current sensor circuit and an electrical isolation switch.

    摘要翻译: 一种包括传感器阵列和多条总线线路的设备,每个传感器电连接到相应的总线,并且包括相应多个微机械传感器单元组,特定传感器的传感器单元组彼此电耦合 通过连接该传感器的总线,每个传感器单元组包括彼此电互连并且不可切换地彼此分离的相应多个微机械传感器单元,该装置还包括用于隔离传感器 来自其相关联的总线线路的单元组以及响应于该传感器单元组的微机械传感器单元中的任一个被短路到地。 在一个实施方案中,隔离装置包括多个保险丝。 在另一实施方案中,隔离装置包括多个短路保护模块,每个模块包括电流传感器电路和电隔离开关。

    LOW POWER PRECONCENTRATOR FOR MICRO GAS ANALYSIS
    7.
    发明申请
    LOW POWER PRECONCENTRATOR FOR MICRO GAS ANALYSIS 审中-公开
    用于微气体分析的低功率预处理器

    公开(公告)号:US20110094290A1

    公开(公告)日:2011-04-28

    申请号:US12605757

    申请日:2009-10-26

    IPC分类号: G01N1/40 G01N30/02 G01N1/44

    摘要: A low power preconcentrator for use in micro gas analysis, such as gas chromatography, and a system that employs the preconcentrator is disclosed. The preconcentrator includes a reservoir that comprises a heater membrane and elements coated at least partially with an adsorbent, and ports for receiving and discharging an analyte in communication with the reservoir. At least a portion of the reservoir (e.g., a cap) is made of a material having a thermal conductivity less than about 100 W/(m·K) and/or the heater membrane is made of a material that has a temperature difference less than about 75° C. when heated. The present invention has been described in terms of specific embodiment(s), and it is recognized that equivalents, alternatives, and modifications, aside from those expressly stated, are possible and within the scope of the appending claims.

    摘要翻译: 公开了一种用于微气体分析的低功率预浓缩器,例如气相色谱法,以及采用预浓缩器的系统。 预浓缩器包括储存器,其包括加热器膜和至少部分地涂覆有吸附剂的元件,以及用于接收和排出与储存器连通的分析物的端口。 储存器的至少一部分(例如,盖子)由热导率小于约100W /(m·K)的材料制成,和/或加热器膜由具有较低温度差的材料制成 加热时约为75℃。 已经根据具体实施例描述了本发明,并且认识到除了明确说明的那些之外的等同物,替代方案和修改是可能的并且在附加权利要求的范围内。

    MICROFLUIDIC DEVICE WITH VERTICAL INJECTION APERTURE
    8.
    发明申请
    MICROFLUIDIC DEVICE WITH VERTICAL INJECTION APERTURE 有权
    具有垂直注射孔的微流体装置

    公开(公告)号:US20090071832A1

    公开(公告)日:2009-03-19

    申请号:US11857570

    申请日:2007-09-19

    IPC分类号: G01N27/26

    CPC分类号: G01N27/447

    摘要: A microfluidic device with a vertical injection aperture is provided. The microfluidic device comprises a separation channel, an injection aperture disposed adjacent to and in fluid communication with the separation channel. The microfluidic device further comprises a semi-permeable filter disposed adjacent to the injection aperture, wherein the filter is configured to preconcentrate a sample in the injection aperture to form a preconcentrated sample plug during an injection operation, and wherein the sample plug flows downwardly from the injection aperture to the separation channel during an electrophoresis operation.

    摘要翻译: 提供具有垂直注射孔的微流体装置。 微流体装置包括分离通道,与分离通道相邻并且与分离通道流体连通地设置的注射孔。 微流体装置还包括邻近喷射孔布置的半渗透过滤器,其中过滤器构造成在注射操作期间预浓缩注入孔中的样品以形成预浓缩样品塞,并且其中样品塞从 在电泳操作期间到分离通道的注射孔径。

    Microfluidic device with vertical injection aperture
    9.
    发明授权
    Microfluidic device with vertical injection aperture 有权
    具有垂直注射孔径的微流体装置

    公开(公告)号:US08029743B2

    公开(公告)日:2011-10-04

    申请号:US11857570

    申请日:2007-09-19

    IPC分类号: B01L3/00 G01N27/453

    CPC分类号: G01N27/447

    摘要: A microfluidic device with a vertical injection aperture is provided. The microfluidic device comprises a separation channel, an injection aperture disposed adjacent to and in fluid communication with the separation channel. The microfluidic device further comprises a semi-permeable filter disposed adjacent to the injection aperture, wherein the filter is configured to preconcentrate a sample in the injection aperture to form a preconcentrated sample plug during an injection operation, and wherein the sample plug flows downwardly from the injection aperture to the separation channel during an electrophoresis operation.

    摘要翻译: 提供具有垂直注射孔的微流体装置。 微流体装置包括分离通道,与分离通道相邻并且与分离通道流体连通地设置的注射孔。 微流体装置还包括邻近喷射孔布置的半渗透过滤器,其中过滤器构造成在注射操作期间预浓缩注入孔中的样品以形成预浓缩样品塞,并且其中样品塞从 在电泳操作期间到分离通道的注射孔径。

    SMART NON-INVASIVE ARRAY-BASED HEMODYNAMIC MONITORING SYSTEM on CHIP AND METHOD THEREOF
    10.
    发明申请
    SMART NON-INVASIVE ARRAY-BASED HEMODYNAMIC MONITORING SYSTEM on CHIP AND METHOD THEREOF 审中-公开
    基于智能非基于阵列的HEMODYMM监测系统及其方法

    公开(公告)号:US20110208071A1

    公开(公告)日:2011-08-25

    申请号:US13034011

    申请日:2011-02-24

    IPC分类号: A61B5/02

    摘要: A non-invasive array-based hemodynamic monitoring system on chip is disclosed. The non-invasive array-based hemodynamic monitoring system on chip comprises a CMOS MEMS pressure sensor array, a readout circuit, and a signal control system. The CMOS MEMS pressure sensor array is configured to sense a pulse wave of a blood vessel. The readout circuit is coupled with each of the CMOS compatible MEMS pressure sensors and is configured to read the pulse wave and transformed the pulse wave into a voltage signal. The signal control system is coupled with each of the readout circuit, and is configured to estimate a wave velocity according to the voltage signal.

    摘要翻译: 公开了一种基于非侵入式阵列的血液动力学监测系统。 基于非侵入式阵列的血液动力学监测系统包括CMOS MEMS压力传感器阵列,读出电路和信号控制系统。 CMOS MEMS压力传感器阵列被配置为感测血管的脉搏波。 读出电路与每个CMOS兼容的MEMS压力传感器耦合,并且被配置为读取脉搏波并将脉冲波变换成电压信号。 信号控制系统与每个读出电路耦合,并且被配置为根据电压信号估计波速。