公开(公告)号：US5971454A

公开(公告)日：1999-10-26

申请号：US5136

申请日：1998-01-09

申请人： Robert L. Baan ,  Joseph P. DeGeorge ,  John R. Lankard, Jr. ,  Raymond H. Turcotte

发明人： Robert L. Baan ,  Joseph P. DeGeorge ,  John R. Lankard, Jr. ,  Raymond H. Turcotte

IPC分类号： B25B11/00 ,  B25J15/06

CPC分类号： B25B11/005 ,  B25B11/007

摘要： An article handler having a plurality of compartments in a frame with each compartment having a plurality of ribs extending across the compartments. The ribs in adjacent compartments extend perpendicularly to each other to provide resistance against warping of the frame in both directions, thereby maintaining the frame flat. The compartments are covered by filters. Suction is distributed throughout each compartment. When the filters are positioned in proximity to articles, the suction in the compartments is effective to lift the articles.

摘要翻译： 一种物品处理器，其具有在框架中的多个隔室，每个隔室具有跨越隔间延伸的多个肋。 相邻隔室中的肋条彼此垂直延伸，以提供抵抗框架在两个方向上翘曲的阻力，从而保持框架平坦。 隔间被过滤器覆盖。 抽吸遍布每个隔间。 当过滤器位于物品附近时，隔室中的吸力对提起物品是有效的。

公开(公告)号：US06341808B1

公开(公告)日：2002-01-29

申请号：US09607137

申请日：2000-06-29

申请人： Robert L. Baan ,  Richard J. Cassidy ,  John R. Lankard, Jr. ,  Gerald Henry Leino ,  Raymond H. Turcotte ,  James Utter

发明人： Robert L. Baan ,  Richard J. Cassidy ,  John R. Lankard, Jr. ,  Gerald Henry Leino ,  Raymond H. Turcotte ,  James Utter

IPC分类号： B25J1506

CPC分类号： B65G47/91 ,  B25B11/005 ,  B25B11/007 ,  B25J15/0616

摘要： Disclosed is a flexible sheet handling apparatus including a frame having a vacuum passage located around the periphery of the frame. There is also a porous, polymeric plug which covers the vacuum passage. When a vacuum is applied to the vacuum passage and the porous, polymeric plug, a flexible sheet in contact with the porous, polymeric plug is uniformly held only around the periphery of the flexible sheet by the applied vacuum.

摘要翻译： 公开了一种柔性片材处理装置，其包括具有位于框架的周边周围的真空通道的框架。 还有一个覆盖真空通道的多孔聚合物塞子。 当对真空通道和多孔聚合物塞施加真空时，通过施加的真空将与多孔聚合物塞接触的柔性片均匀地保持在柔性片的周边周围。

公开(公告)号：US06310685B1

公开(公告)日：2001-10-30

申请号：US09357506

申请日：1999-07-20

申请人： Robert L. Baan ,  James O. Goring ,  David Scott Graboski ,  John R. Lankard, Jr. ,  Kurt R. Muller ,  Raymond H. Turcotte

发明人： Robert L. Baan ,  James O. Goring ,  David Scott Graboski ,  John R. Lankard, Jr. ,  Kurt R. Muller ,  Raymond H. Turcotte

IPC分类号： G01N2101

CPC分类号： H01L21/67028

摘要： A green sheet holding apparatus includes a first member secured to a first edge of the green sheet and a second member moveable relative to the first member, the second member being secured to a second edge of the green sheet. A forcing mechanism, connected to the second member and to the first member, forces the second member away from the first member such that the first edge and the second edge of the green sheet are forced away from each other and the green sheet is flattened. The holding apparatus may be included in a green sheet inspection system, wherein the inspection system further includes a light source directing a light onto the green sheet and a camera detecting light from the green sheet. The invention also includes a method of holding a green sheet, which includes securing the first edge of the green sheet to a first member, securing the second edge of the green sheet to a second member, and forcing the second member away from the first member. This method pulls the first edge and the second edge of the green sheet outwardly, thereby flattening the green sheet. The method may be part of a method of inspecting a screened pattern on a green sheet, which further includes directing a light onto a the green sheet and detecting the light as it emerges from the green sheet.

摘要翻译： 生片保持装置包括固定到生片的第一边缘的第一构件和可相对于第一构件移动的第二构件，第二构件固定到生片的第二边缘。 连接到第二构件和第一构件的强制机构迫使第二构件远离第一构件，使得生片的第一边缘和第二边缘彼此远离并且生片被压平。 保持装置可以包括在生片检查系统中，其中检查系统还包括将光引导到生片上的光源和检测来自生片的光的照相机。 本发明还包括一种保持生片的方法，包括将生片的第一边缘固定到第一构件上，将生片的第二边缘固定到第二构件，并迫使第二构件远离第一构件 。 该方法向外拉动生片的第一边缘和第二边缘，从而使生片平坦化。 该方法可以是检查生片上的筛选图案的方法的一部分，其还包括将光引导到生片上并在从生片出来时检测光。

公开(公告)号：US07278459B2

公开(公告)日：2007-10-09

申请号：US10875699

申请日：2004-06-24

申请人： Robert L. Baan ,  Harry D. Cox ,  John P. Gauci ,  John R. Lankard, Jr. ,  David C. Long ,  Thong N. Nguyen

发明人： Robert L. Baan ,  Harry D. Cox ,  John P. Gauci ,  John R. Lankard, Jr. ,  David C. Long ,  Thong N. Nguyen

IPC分类号： B32B37/00

CPC分类号： B41F15/36 ,  H05K1/0306 ,  H05K3/1225 ,  H05K2203/0169 ,  H05K2203/0278 ,  Y10T29/41

摘要： A method for mounting a film, used to fabricate a mask for use in screening an electronic device, to a common carrier frame. The common carrier frame has an outer edge along an outer periphery and an opening in a central portion of the frame. The method includes applying external pressure to the frame outer edge to compress the frame inward and reduce the opening, securing a film to the frame, the film covering the frame opening, and releasing the pressure on the frame to expand the opening and place the film in tension.

摘要翻译： 用于将用于制造用于屏蔽电子设备的掩模的膜安装到公共载体框架的方法。 公共载架框架具有沿着外周的外边缘和在框架的中心部分中的开口。 该方法包括对框架外边缘施加外部压力以将框架向内压缩并减小开口，将薄膜固定在框架上，将薄膜覆盖框架开口，并释放框架上的压力以使开口膨胀并放置薄膜 在紧张。

公开(公告)号：US07823452B2

公开(公告)日：2010-11-02

申请号：US11862540

申请日：2007-09-27

申请人： Robert L. Baan ,  Carla A. Bailey ,  Vladimir Jambrih ,  Robert P. Katz

发明人： Robert L. Baan ,  Carla A. Bailey ,  Vladimir Jambrih ,  Robert P. Katz

IPC分类号： G01N29/04

CPC分类号： G01N29/28 ,  G01N29/069 ,  G01N2291/2697

摘要： Apparatus for Scanning Acoustic Microscopy (SAM) of a semiconductor device including a substrate with an acoustic probe, The substrate has upper and lower surfaces. A sealed lower space provides an environment surrounding the lower surface. An upper ring structure formed above the upper surface includes an upper sealing ring in contact with the upper surface, with the upper sealing structure and the seal forming a dam for retaining the acoustic transmission fluid above the upper surface. A fixture base retains a lower sealing ring in contact with the lower surface surrounding the lower surface. An acoustic scanning probe positioned confronting the upper surface of the semiconductor device extending into the acoustic transmission fluid retained in contact with the upper surface.

摘要翻译： 用于扫描包括具有声探针的基底的半导体器件的声学显微镜（SAM）的装置。该衬底具有上表面和下表面。 密封的较低空间提供围绕下表面的环境。 形成在上表面上方的上环结构包括与上表面接触的上密封环，上密封结构和密封件形成用于将声传播流体保持在上表面上方的坝。 固定基座保持与围绕下表面的下表面接触的下密封环。 声学扫描探针定位成面对半导体器件的上表面延伸到保持与上表面接触的声传播流体中。

公开(公告)号：US20090084183A1

公开(公告)日：2009-04-02

申请号：US11862540

申请日：2007-09-27

申请人： Robert L. Baan ,  Carla A. Bailey ,  Vladimir Jambrih ,  Robert P. Katz

发明人： Robert L. Baan ,  Carla A. Bailey ,  Vladimir Jambrih ,  Robert P. Katz

IPC分类号： G01N29/28 ,  G01N29/04

CPC分类号： G01N29/28 ,  G01N29/069 ,  G01N2291/2697

摘要： Apparatus for Scanning Acoustic Microscopy (SAM) of a semiconductor device including a substrate with an acoustic probe, The substrate has upper and lower surfaces. A sealed lower space provides an environment surrounding the lower surface. An upper ring structure formed above the upper surface includes an upper sealing ring in contact with the upper surface, with the upper sealing structure and the seal forming a dam for retaining the acoustic transmission fluid above the upper surface. A fixture base retains a lower sealing ring in contact with the lower surface surrounding the lower surface. An acoustic scanning probe positioned confronting the upper surface of the semiconductor device extending into the acoustic transmission fluid retained in contact with the upper surface.

摘要翻译： 用于扫描包括具有声探针的基底的半导体器件的声学显微镜（SAM）的装置。该衬底具有上表面和下表面。 密封的较低空间提供围绕下表面的环境。 形成在上表面上方的上环结构包括与上表面接触的上密封环，上密封结构和密封件形成用于将声传播流体保持在上表面上方的坝。 固定基座保持与围绕下表面的下表面接触的下密封环。 声学扫描探针定位成面对半导体器件的上表面延伸到保持与上表面接触的声传播流体中。

公开(公告)号：US5627647A

公开(公告)日：1997-05-06

申请号：US668292

申请日：1996-06-21

申请人： Robert L. Baan ,  Paul J. Damore

发明人： Robert L. Baan ,  Paul J. Damore

IPC分类号： G01B11/04 ,  G01B11/06

CPC分类号： G01B11/0691 ,  G01B11/04

摘要： A method and apparatus for measuring the x-y-z dimensions of an article such as a ceramic chip carrier are provided. The measuring apparatus and method utilize scanning laser beams to measure the dimensions of the article without physically contacting the article as the article is moved through the measuring device at a controlled speed preferably on a cushion of air. A separate laser beam scanning device is used to measure each dimension of the article and the laser beams are positioned to scan back and forth along the dimension to be measured. As the article moves through the preferred L-shaped apparatus, the direction of the article automatically changes in a transverse direction so that all three dimensions are conveniently and accurately measured.

摘要翻译： 提供了用于测量诸如陶瓷芯片载体的物品的x-y-z尺寸的方法和装置。 测量装置和方法利用扫描激光束来测量物品的尺寸，而不会物理接触物品，因为物品以优选地在空气衬垫上的控制速度移动通过测量装置。 使用单独的激光束扫描装置来测量物品的每个尺寸，并且激光束被定位成沿着待测量的尺寸来回扫描。 当制品移动通过优选的L形装置时，制品的方向在横向方向上自动变化，使得所有三维方便且准确地测量。