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94 条记录 (耗时 0.026 秒)

    Automated material handling system
    1.
    发明申请
    Automated material handling system 审中-公开
    自动物料搬运系统

    公开(公告)号：US20050095087A1

    公开(公告)日：2005-05-05

    申请号：US10697528

    申请日：2003-10-30

    申请人： Robert Sullivan ,  Clint Haris ,  Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister

    发明人： Robert Sullivan ,  Clint Haris ,  Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister

    IPC分类号： H01L21/677 ,  H01L21/687 ,  B65G1/00

    CPC分类号： H01L21/68707 ,  B65G13/00 ,  B65G37/02 ,  H01L21/6773 ,  H01L21/67736

    摘要： A semiconductor workpiece processing system comprising at least one processing tool, a container, a first transport section, and a second transport section. The processing tool is used for processing semiconductor workpieces. The container is used for holding at least one semiconductor workpiece therein for transporting two and from the processing tool. The first transport section is connected to the processing tool for transporting the container to and from the processing tool. The second transport section is connected to the first transport section for transporting the container to and from the processing tool. The first transport section is vehicle based having a transport vehicle capable of holding the container and moving along a first track of the first transport section. The second transport section is not vehicle based and has a second track with at least one support element thereon adapted to interface with the container for movably supporting the container from the second track and allowing the container to move relative to the first track. The first track and second track are disposed proximate to each other to allow the container to moved therebetween in one move.

    摘要翻译： 一种半导体工件处理系统，包括至少一个处理工具，容器，第一传送部分和第二传送部分。 该加工工具用于处理半导体工件。 容器用于将至少一个半导体工件保持在其中以便从处理工具传送两个。 第一运输部分连接到处理工具，用于将容器运送到加工工具和从加工工具运输。 第二输送部连接到第一输送部，用于将容器运送到加工工具和从处理工具输送。 第一运输部是基于车辆的，具有能够保持容器并沿着第一运送部的第一轨道移动的运送车辆。 第二传送部分不是基于车辆的，并且具有其上具有至少一个支撑元件的第二轨道，其适于与容器接合，用于从第二轨道可移动地支撑容器并允许容器相对于第一轨道移动。 第一轨道和第二轨道彼此靠近设置，以允许容器在其间移动。

    Elevator-based tool loading and buffering system
    2.
    发明申请
    Elevator-based tool loading and buffering system 有权
    电梯工具装载和缓冲系统

    公开(公告)号：US20060099054A1

    公开(公告)日：2006-05-11

    申请号：US11210918

    申请日：2005-08-23

    申请人： Gerald Friedman ,  Michael Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    发明人： Gerald Friedman ,  Michael Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    IPC分类号： H01L21/677

    CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

    摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.

    摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于在负载端口接口处保持至少一个基板传输载体。 载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。

    Transportation system
    4.
    发明申请
    Transportation system 审中-公开
    运输系统

    公开(公告)号：US20060104712A1

    公开(公告)日：2006-05-18

    申请号：US11211236

    申请日：2005-08-24

    申请人： Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    发明人： Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    IPC分类号： E01C1/00

    CPC分类号： H01L21/67715 ,  H01L21/67736 ,  H01L21/67775

    摘要： An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

    摘要翻译： 提供了一种示例性实施例的基板输送系统。 该系统具有导轨和至少一个运输车辆。 运输车辆适于保持至少一个基底并且能够被支撑并沿导轨移动。 导轨包括用于车辆的至少一个行驶车道和从行驶车道偏移的至少一个通道，允许车辆可选择地接近行驶车道和离开行车道。

    ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
    9.
    发明申请
    ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM 有权
    基于电梯的工具装载和缓冲系统

    公开(公告)号：US20140341679A1

    公开(公告)日：2014-11-20

    申请号：US14223553

    申请日：2014-03-24

    申请人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    发明人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    IPC分类号： H01L21/677

    CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

    摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

    摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

    SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
    10.
    发明申请
    SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS 有权
    带电动机的底座加工设备到室内壁挂

    公开(公告)号：US20120301261A1

    公开(公告)日：2012-11-29

    申请号：US13567812

    申请日：2012-08-06

    申请人： Alexander G. Krupyshev ,  Christopher Hofmeister

    发明人： Alexander G. Krupyshev ,  Christopher Hofmeister

    IPC分类号： B65G49/00

    CPC分类号： H02K41/03 ,  H01L21/67742 ,  H01L21/68707 ,  H02K2201/18

    摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

    摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。