METHOD OF USING A PLURALITY OF SMALLER MEMS DEVICES TO REPLACE A LARGER MEMS DEVICE
    4.
    发明申请
    METHOD OF USING A PLURALITY OF SMALLER MEMS DEVICES TO REPLACE A LARGER MEMS DEVICE 有权
    使用多个小型MEMS器件来替代大型MEMS器件的方法

    公开(公告)号:US20100116632A1

    公开(公告)日:2010-05-13

    申请号:US12614929

    申请日:2009-11-09

    IPC分类号: H01H57/00 H05K1/16 H01H47/02

    摘要: Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.

    摘要翻译: 本文公开的实施例通常包括使用大量的小MEMS器件来代替单个更大的MEMS器件或数字可变电容器的功能。 大量较小的MEMS器件具有与较大器件相同的功能,但是由于尺寸较小,因此可以使用互补金属氧化物半导体(CMOS)兼容工艺封装在腔中。 通过大量较小器件的信号平均,允许较小器件阵列的精度等同于较大的器件。 通过考虑使用具有惯性响应的集成模数转换的基于MEMS的加速度计开关阵列来举例说明该过程。 还通过考虑使用MEMS器件结构(其中MEMS器件并行地作为数字可变电容器)来使用该过程。

    MEMS DEVICE ANCHORING
    6.
    发明申请
    MEMS DEVICE ANCHORING 有权
    MEMS器件安装

    公开(公告)号:US20140300249A1

    公开(公告)日:2014-10-09

    申请号:US14342387

    申请日:2012-08-31

    IPC分类号: B81B7/00

    摘要: Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.

    摘要翻译: 本发明的实施例通常涉及使用沉积以形成空腔密封层和/或沉积以形成拉出电极的层来锚定的MEMS器件。 MEMS器件的开关元件将具有柔性或可移动部分,并且还将具有电耦合到地的固定或锚定部分。 用于密封其中设置有开关元件的空腔的层也可以联接到开关元件的固定部分或锚固部分,以将固定部分或锚固部分锚固在腔体内。 另外,用于形成电极之一的层可以用于提供用于将固定或锚定部分锚定在腔内的额外的杠杆作用。 在这两种情况下,柔性或可移动部分的运动不受阻碍。

    Nanosensor array for electronic olfaction
    9.
    发明申请
    Nanosensor array for electronic olfaction 审中-公开
    用于电子嗅觉的纳米传感器阵列

    公开(公告)号:US20100323925A1

    公开(公告)日:2010-12-23

    申请号:US11541794

    申请日:2006-10-02

    IPC分类号: C40B60/12

    摘要: A detector system is described including arrays having a plurality of nanoelectronic sensors comprising a channel including a nanostructured element disposed on a substrate, the nanostructured element functionalized by one or more materials disposed on or adjacent to the nanostructured element so as to operatively influence one or more sensor electrical properties. In certain embodiments, the nanostructured element comprise one or more nanotubes, and the functionalization material may include nanoparticles composed of one or more metals, metal oxides, salts, or other inorganic or organic materials or composites of these.In one exemplary embodiment, an array includes plurality of sensors which are configured as field effect transistors, the nanostructured element comprising a randomly dispersed interconnecting network of single-walled carbon nanotubes (SWNTs) having semiconducting properties, and functionalized by deposition of metallic nanoparticles comprising one or more metallic elements. The deposition of nanoparticles may be controlled to preserve semiconductive properties of the nanotubes. Novel methods of electrodeposition of such nanoparticles are described.The detector system may be configured to distinguish and detect a range of different analyte species by measurement of the responses of a plurality of sensors of the array, and analyzing the measurements using principal component analysis, pattern-recognition analysis tools, and the like. Example analytes may comprise a plurality of organic and inorganic gases, such as are relevant to medical, industrial, environmental and security detection.

    摘要翻译: 描述了一种检测器系统,其包括具有多个纳米电子传感器的阵列,该多个纳米电子传感器包括通道,该通道包括设置在基底上的纳米结构元件,该纳米结构元件由设置在纳米结构元件上或其上的一种或多种材料功能化,以便可操作地影响一个或多个 传感器电气特性。 在某些实施方案中,纳米结构元件包含一个或多个纳米管,并且官能化材料可以包括由一种或多种金属,金属氧化物,盐或其它无机或有机材料或这些的复合材料组成的纳米颗粒。 在一个示例性实施例中,阵列包括配置为场效应晶体管的多个传感器,纳米结构元件包括具有半导体性质的单壁碳纳米管(SWNT)的随机分散的互连网络,并且通过沉积包含一个 或更多的金属元素。 可以控制纳米颗粒的沉积以保持纳米管的半导体性质。 描述了这种纳米颗粒的电沉积的新方法。 检测器系统可以被配置为通过测量阵列的多个传感器的响应并且使用主成分分析,模式识别分析工具等分析测量来区分和检测不同分析物种的范围。 示例性分析物可以包括多种有机和无机气体,例如与医疗,工业,环境和安全性检测相关的。

    ANESTHESIA MONITOR, CAPACITANCE NANOSENSORS AND DYNAMIC SENSOR SAMPLING METHOD
    10.
    发明申请
    ANESTHESIA MONITOR, CAPACITANCE NANOSENSORS AND DYNAMIC SENSOR SAMPLING METHOD 审中-公开
    麻醉监护仪,电容式纳米传感器和动态传感器采样方法

    公开(公告)号:US20100085067A1

    公开(公告)日:2010-04-08

    申请号:US12560316

    申请日:2009-09-15

    摘要: Embodiments of nanoelectronic sensors are described, including sensors for detecting analytes such as anesthesia gases, CO2 and the like in human breath. An integrated monitor system and disposable sensor unit is described which permits a number of different anesthetic agents to be identified and monitored, as well as concurrent monitoring of other breath species, such as CO2. The sensor unit may be configured to be compact, light weight, and inexpensive. Wireless embodiments provide such enhancements as remote monitoring. A simulator system for modeling the contents and conditions of human inhalation and exhalation with a selected mixture of a treatment agent is also described, particularly suited to the testing of sensors to be used in airway sampling.

    摘要翻译: 描述了纳米电子传感器的实施例,包括用于在人呼吸中检测分析物例如麻醉气体,CO 2等的传感器。 描述了一种集成监视器系统和一次性传感器单元,其允许识别和监视多个不同的麻醉剂,以及对其它呼吸物质(例如CO 2)的并发监测。 传感器单元可以被配置为紧凑,重量轻并且便宜。 无线实施例提供诸如远程监视的增强。 还描述了一种用于用选定的处理剂混合物对人吸入和呼出的内容物和条件进行建模的模拟器系统,特别适合于用于气道取样的传感器的测试。