摘要:
In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.
摘要:
In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.
摘要:
Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.
摘要:
Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.
摘要:
Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.
摘要:
Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.
摘要:
A multi-level cache comprises a plurality of cache levels, each configured to cache I/O request data pertaining to I/O requests of a different respective type and/or granularity. The multi-level cache may comprise a file-level cache that is configured to cache I/O request data at a file-level of granularity. A file-level cache policy may comprise file selection criteria to distinguish cacheable files from non-cacheable files. The file-level cache may monitor I/O requests within a storage stage, and may service I/O requests from a cache device.
摘要:
Systems and methods for managing data input/output operations are described. In one aspect, a device driver identifies a data read operation generated by a virtual machine in a virtual environment. The device driver is located in the virtual machine and the data read operation identifies a physical cache address associated with the data requested in the data read operation. A determination is made regarding whether data associated with the data read operation is available in a cache associated with the virtual machine.
摘要:
A detector system is described including arrays having a plurality of nanoelectronic sensors comprising a channel including a nanostructured element disposed on a substrate, the nanostructured element functionalized by one or more materials disposed on or adjacent to the nanostructured element so as to operatively influence one or more sensor electrical properties. In certain embodiments, the nanostructured element comprise one or more nanotubes, and the functionalization material may include nanoparticles composed of one or more metals, metal oxides, salts, or other inorganic or organic materials or composites of these.In one exemplary embodiment, an array includes plurality of sensors which are configured as field effect transistors, the nanostructured element comprising a randomly dispersed interconnecting network of single-walled carbon nanotubes (SWNTs) having semiconducting properties, and functionalized by deposition of metallic nanoparticles comprising one or more metallic elements. The deposition of nanoparticles may be controlled to preserve semiconductive properties of the nanotubes. Novel methods of electrodeposition of such nanoparticles are described.The detector system may be configured to distinguish and detect a range of different analyte species by measurement of the responses of a plurality of sensors of the array, and analyzing the measurements using principal component analysis, pattern-recognition analysis tools, and the like. Example analytes may comprise a plurality of organic and inorganic gases, such as are relevant to medical, industrial, environmental and security detection.
摘要:
Embodiments of nanoelectronic sensors are described, including sensors for detecting analytes such as anesthesia gases, CO2 and the like in human breath. An integrated monitor system and disposable sensor unit is described which permits a number of different anesthetic agents to be identified and monitored, as well as concurrent monitoring of other breath species, such as CO2. The sensor unit may be configured to be compact, light weight, and inexpensive. Wireless embodiments provide such enhancements as remote monitoring. A simulator system for modeling the contents and conditions of human inhalation and exhalation with a selected mixture of a treatment agent is also described, particularly suited to the testing of sensors to be used in airway sampling.