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公开(公告)号：US5108792A
公开(公告)日：1992-04-28
申请号：US491416
申请日：1990-03-09
申请人： Roger N. Anderson , John G. Martin , Douglas Meyer , Daniel West , Russell Bowman , David V. Adams
发明人： Roger N. Anderson , John G. Martin , Douglas Meyer , Daniel West , Russell Bowman , David V. Adams
IPC分类号： H01L21/203 , C23C16/44 , C23C16/48 , C30B25/08 , C30B25/10 , C30B25/14 , H01L21/00 , H01L21/205 , H01L21/26 , H01L21/324
CPC分类号： H01L21/67115 , C23C16/44 , C23C16/481 , C30B25/08 , C30B25/10 , C30B25/14
摘要： A thermal reactor for epitaxial deposition on a wafer comprises a double-dome vessel and dual heat sources. Each heat source comprises inner and outer circular arrays of infrared lamps. Circumferential heating uniformity is assured by the cylindrical symmetry of the vessel and the heating sources. Radial heating uniformity is provided by independent control of inner and outer heating arrays for both the top and bottom heat sources. The relative temperatures of wafer and susceptor are controlled by adjusting relative energies provided by the upper and lower heat sources so that backside migration. Reduced pressure operation is provided for by the convex top and bottom domes. Due to the provided control over transmitted energy distribution, a susceptor can have low thermal mass so that elevated temperature can be achieved more quickly and cooling can be facilitated as well. This improves throughput and reduces manufacturing costs per wafer. Reagent gas introduction can be axial or radial as desired.
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公开(公告)号：US5194401A
公开(公告)日：1993-03-16
申请号：US873483
申请日：1992-04-22
CPC分类号： C23C16/481 , C23C16/44
摘要： A thermal reactor system for semiconductor processing incorporates a reaction vessel with a rectangular quartz tube with reinforcing parallel quartz gussets. The gussets enable sub-ambient pressure processing, while the rectangular tube maximizes reactant gas flow uniformity over a wafer being processed. The gussets facilitate effective cooling, while minimally impairing heating of the wafer by allowing minimal wall thickness. The thermal reactor system further includes a gas source for supplying reactant gas and an exhaust handling system for removing spent gases from and establishing a reduced pressure within the reaction vessel. An array of infrared lamps is used to radiate energy through the quartz tube; the lamps are arranged in a staggered relation relative to the quartz gussets to minimize shadowing. In addition, other non-cylindrical gusseted vessel geometries are disclosed which provide for improved sub-ambient pressure thermal processing of semiconductor wafers.
摘要翻译： 用于半导体处理的热反应器系统包括具有加强平行石英角撑板的矩形石英管的反应容器。 角撑板能够进行低于环境压力的处理，而矩形管可以使正在处理的晶片上的反应气流均匀性最大化。 角撑板有助于有效的冷却，同时通过允许最小壁厚来最小限度地削弱晶片的加热。 热反应器系统还包括用于供应反应气体的气体源和用于从反应容器内除去废气并在反应容器内建立减压的废气处理系统。 使用红外灯阵列通过石英管辐射能量; 灯相对于石英角撑板以交错的关系布置，以最小化遮蔽。 此外，公开了提供半导体晶片的改进的次环境压力热处理的其它非圆柱形角撑板的几何形状。
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公开(公告)号：US5085887A
公开(公告)日：1992-02-04
申请号：US579741
申请日：1990-09-07
申请人： David V. Adams , Roger N. Anderson
发明人： David V. Adams , Roger N. Anderson
IPC分类号： C23C14/52 , C23C16/48 , C30B25/10 , H01L21/205 , H01L21/31
CPC分类号： C23C16/481
摘要： A quartz window for a wafer reactor vessel has a flat bow for withstanding the pressure differential between the ambient outside pressure and the reduced pressure in the wafer chamber. The bow is enhanced at elevated operating temperatures to compensate for the flattening effect of higher pressure differentials. The enhanced bowing is provided by a rigid peripheral flange which radially confines the window. The thermal expansion within the window is not expressed radially, but is directed outward to increase the bow.
摘要翻译： 用于晶片反应器容器的石英窗具有平坦的弓形，用于承受环境外部压力和晶片室中减压之间的压力差。 在升高的工作温度下，弓被增强，以补偿较高压力差的压平效应。 增强的弯曲由径向限制窗口的刚性周边凸缘提供。 窗内的热膨胀不是径向表示的，而是向外指向以增加弓。
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公开(公告)号：US4920918A
公开(公告)日：1990-05-01
申请号：US339784
申请日：1989-04-18
IPC分类号： F27B17/00 , C23C16/44 , C23C16/48 , H01L21/205 , H01L21/22 , H01L21/31 , H01L21/324
CPC分类号： C23C16/481 , C23C16/44
摘要： A thermal reactor system for semiconductor processing incorporates a reaction vessel with a rectangular quartz tube with reinforcing parallel quartz gussets. The gussets enable sub-ambient pressure processing, while the rectangular tube maximizes reactant gas flow uniformity over a wafer being processed. The gussets facilitate effective cooling, while minimally impairing heating of the wafer by allowing minimal wall thickness. The thermal reactor system further includes a gas source for supplying reactant gas and an exhaust handling system for removing spent gases from and establishing a reduced pressure within the reaction vessel. An array of infrared lamps is used to radiate energy through the quartz tube; the lamps are arranged in a staggered relation relative to the quartz gussets to minimize shadowing. In addition, other non-cylindrical gusseted vessel geometries are disclosed which provide for improved sub-ambient pressure thermal processing of semiconductor wafers.
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公开(公告)号：US06468021B1
公开(公告)日：2002-10-22
申请号：US09461498
申请日：1999-12-14
IPC分类号： B65G1558
CPC分类号： H01L21/67775 , H01L21/67706 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67763 , H01L21/67766 , H01L21/67769
摘要： An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly which includes a lift mechanism and a displacement mechanism. The transfer assembly transfers the article between the conveyor system and a buffer or storage station for storage of the article. A delivery robot transfers the article between the buffer or storage station and a work station for delivery to the station. The robot includes a vertical movement mechanism and a horizontal movement mechanism. The robot also includes an arm that is adapted to grip the article, particularly an article of a standard configuration having a mushroom-shaped handle on top. The arm engages the handle and lifts the article or transport pod from the storage station to a load port of the work station. In one embodiment, the arm includes a C-shaped adaptation that passively engages the handle from a side thereof. In other embodiments, the arm includes an actuator coupled to an assembly that actively grips the handle from above. Advantages of the invention include the ability to safely move the transport pod from a elevated storage station to the lower placed storage stations or load ports of a work station.
摘要翻译： 提供了一种集成的舱内转移，储存和输送系统，用于在输送机和诸如工作站的工位之间移动物品。 该系统包括一个转移组件，它包括一个升降机构和一个排量机构。 传送组件将物品在输送系统和缓冲器或储存站之间传送以存储物品。 递送机器人将物品在缓冲器或存储站和工作站之间传送以传送到站。 机器人包括垂直移动机构和水平移动机构。 机器人还包括适于夹紧物品的臂，特别是具有在顶部上具有蘑菇形手柄的标准配置的物品。 手臂接合手柄，将物品或运输吊舱从储存站提升到工作站的装载端口。 在一个实施例中，臂包括从其侧面被动地接合手柄的C形适配件。 在其他实施例中，臂包括联接到组件的致动器，该组件从上方主动地握住手柄。 本发明的优点包括将运输舱从高架存储站安全地移动到工作站的下部放置的储存站或负载端口的能力。
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公开(公告)号：US6031439A
公开(公告)日：2000-02-29
申请号：US969931
申请日：1997-11-28
CPC分类号： A61B8/12 , A61B8/4245 , A61B8/4461 , A61B1/0052
摘要： A control device for converting a manual input into an electrical signal is provided. The control device includes a control button, a first magnet having a first predetermined polarity, a second magnet having a second predetermined polarity, and a hall-effect sensor located adjacent to the control button. The control button is mounted for pivotal displacement about a neutral position in accordance with the manual input. The first magnet and the second magnet are mounted to the control button. The polarity of the second magnet is opposite the polarity of the first magnet. The hall-effect sensor has an electrical input and an electrical output. The electrical signal produced by the control device may, for example, be used to control the velocity of a motor, which rotates an ultrasound transducer.
摘要翻译： 提供了一种用于将手动输入转换为电信号的控制装置。 控制装置包括控制按钮，具有第一预定极性的第一磁体，具有第二预定极性的第二磁体和位于控制按钮附近的霍尔效应传感器。 控制按钮被安装成根据手动输入绕中立位置进行枢转位移。 第一磁体和第二磁体安装在控制按钮上。 第二磁体的极性与第一磁体的极性相反。 霍尔效应传感器具有电气输入和电气输出。 由控制装置产生的电信号可以例如用于控制旋转超声换能器的马达的速度。
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公开(公告)号：US5479929A
公开(公告)日：1996-01-02
申请号：US267594
申请日：1994-06-27
申请人： Thomas G. Cooper , David V. Adams , John W. Eaton
发明人： Thomas G. Cooper , David V. Adams , John W. Eaton
CPC分类号： A61B8/12 , A61B8/445 , A61B8/4461
摘要： A drive system with a rotary stop for driving a rotatable load is provided having a motor, a rotary stop and a spring stop assembly for coupling the motor to the rotary stop. The spring stop assembly has a motor-driven gear coupled to a hub by a torsional spring. A position encoder may be attached to the motor. In addition, a drive shaft may be coupled to the motor and the multiturn rotary stop through the spring stop assembly.
摘要翻译： 提供具有用于驱动可旋转负载的旋转止动件的驱动系统，其具有电动机，旋转止动器和用于将电动机联接到旋转止动件的弹簧止动组件。 弹簧止动组件具有通过扭转弹簧联接到轮毂的电机驱动齿轮。 位置编码器可以附接到电动机。 此外，驱动轴可以通过弹簧止动组件联接到马达和多圈旋转止动件。
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