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公开(公告)号:US06259350B1
公开(公告)日:2001-07-10
申请号:US08784660
申请日:1997-01-21
申请人: Roland Mueller-Fiedler , Christoph Treutler , Michael Gundlach , Manfred Moellendorf , Steffen Schmidt , Franz Laermer , Christoph Kampshoff , Klaus Heyers , Joerg Buth
发明人: Roland Mueller-Fiedler , Christoph Treutler , Michael Gundlach , Manfred Moellendorf , Steffen Schmidt , Franz Laermer , Christoph Kampshoff , Klaus Heyers , Joerg Buth
IPC分类号: H01C304
CPC分类号: C04B41/009 , C04B41/52 , C04B41/89 , C04B2111/00844 , G01F1/6845 , G01K7/18 , C04B41/4558 , C04B41/5071 , C04B41/5122 , C04B35/00
摘要: With a sensor and method, it is possible for platinum resistor elements to be used advantageously as heating elements, temperature sensors, printed circuit traces, or as chemically resistant electron beam sensitive layers. To ensure a long-lasting adhesion of the platinum resistance layer to a dielectric substrate, even during exposure to temperatures which are elevated over ambient temperature and under dry and most atmospheric conditions, a thin adhesion layer of platinum silicide, for example, is deposited between the platinum resistance layer and the dielectric substrate. Resistor elements patterned from the platinum layer can advantageously be used in temperature sensors, mass flow sensors, chemical sensors, gas sensors, or humidity sensors.
摘要翻译: 利用传感器和方法,可以将铂电阻元件有利地用作加热元件,温度传感器,印刷电路迹线或化学抗性电子束敏感层。 为了确保铂电阻层与电介质基板的长时间粘附,即使在暴露于环境温度升高的环境温度和干燥和大气环境条件下的温度下,例如,将诸如硅化钛的薄粘附层沉积在 铂电阻层和电介质基板。 从铂层图案化的电阻元件可有利地用于温度传感器,质量流量传感器,化学传感器,气体传感器或湿度传感器。
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公开(公告)号:US6101872A
公开(公告)日:2000-08-15
申请号:US036732
申请日:1998-03-09
申请人: Martin Zechnall , Christoph Treutler , Manfred Lembke , Hans Hecht , Jiri Marek , Herbert Goebel , Martin Willmann , Hans-Ulrich Gruber , Andreas Lock , Klaus Heyers , Joerg Buth
发明人: Martin Zechnall , Christoph Treutler , Manfred Lembke , Hans Hecht , Jiri Marek , Herbert Goebel , Martin Willmann , Hans-Ulrich Gruber , Andreas Lock , Klaus Heyers , Joerg Buth
CPC分类号: G01F1/6845 , G01F1/692 , G01K7/183
摘要: A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.
摘要翻译: 传感器具有薄膜元件,薄膜元件具有温度依赖性电阻。 薄膜元件包括掺杂有锆石或氧化锆的铂层。 薄膜元件可以布置在膜上以产生质量气流传感器。
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