-
公开(公告)号:US20110042349A1
公开(公告)日:2011-02-24
申请号:US12544998
申请日:2009-08-20
申请人: Ronghui ZHOU , Ming JIANG , Xiaohai XIANG , Jinwen WANG , Guanghong LUO , Yun-Fei LI
发明人: Ronghui ZHOU , Ming JIANG , Xiaohai XIANG , Jinwen WANG , Guanghong LUO , Yun-Fei LI
CPC分类号: G11B5/855 , Y10T29/49048
摘要: A method for forming a write pole comprises forming a stop layer over a substrate layer of a wafer, the stop layer having an opening above a damascene trench in the substrate layer, and forming a buffer layer over the stop layer, the buffer layer having an opening above the opening of the stop layer. The method further comprises plating a layer of magnetic material over the wafer, disposing a first sacrificial material over a region of the magnetic material above the damascene trench, performing a milling or etching operation over the wafer to remove the magnetic material not covered by the first sacrificial material and to remove the first sacrificial material, disposing a second sacrificial material over the wafer, and performing a polishing operation over the wafer to remove the region of the magnetic material above the damascene trench, the second sacrificial material, and the buffer layer.
摘要翻译: 用于形成写极的方法包括在晶片的衬底层上形成阻挡层,所述阻挡层在衬底层中具有在镶嵌沟槽上方的开口,以及在停止层上形成缓冲层,所述缓冲层具有 在停止层的开口上方开口。 该方法还包括在晶片上镀覆一层磁性材料,在金刚石沟槽上方的磁性材料的区域上设置第一牺牲材料,在晶片上进行研磨或蚀刻操作,以去除第一 牺牲材料并且去除第一牺牲材料,在晶片上设置第二牺牲材料,以及在晶片上执行抛光操作以去除镶嵌沟槽,第二牺牲材料和缓冲层之上的磁性材料的区域。