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    Transmission electron microscope system and method of inspecting a specimen using the same
    1.
    发明授权
    Transmission electron microscope system and method of inspecting a specimen using the same 失效
    透射电子显微镜系统及使用其的检查方法

    公开(公告)号：US07034299B2

    公开(公告)日：2006-04-25

    申请号：US10918340

    申请日：2004-08-16

    申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

    发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

    IPC分类号： H01J37/26 ,  G01N23/04

    CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

    摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

    摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

    Transmission electron microscope system and method of inspecting a specimen using the same
    2.
    发明申请
    Transmission electron microscope system and method of inspecting a specimen using the same 失效
    透射电子显微镜系统及使用其的检查方法

    公开(公告)号：US20050051725A1

    公开(公告)日：2005-03-10

    申请号：US10918340

    申请日：2004-08-16

    申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

    发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

    IPC分类号： G01N23/04 ,  G01N33/48 ,  G01N23/00

    CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

    摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

    摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

    Inspecting method, inspecting system, and method for manufacturing electronic devices
    4.
    发明授权
    Inspecting method, inspecting system, and method for manufacturing electronic devices 有权
    检查方法，检查系统和电子设备制造方法

    公开(公告)号：US08428336B2

    公开(公告)日：2013-04-23

    申请号：US11431709

    申请日：2006-05-11

    申请人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

    发明人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

    IPC分类号： G06K9/00

    CPC分类号： G06F3/0486 ,  G06F2203/04803 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/30148

    摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

    摘要翻译： 一种用于对缺陷进行分类的方法，包括：通过对样品上的缺陷进行成像而获得的缺陷图像的特征量化计算; 通过使用关于计算的特征量的信息将缺陷图像分类成分类的类别; 在分类的类别的显示屏幕上的区域中显示分类的缺陷图像; 将分类类别的信息添加到所显示的缺陷图像; 将所述分类类别中的信息添加到所述其他类别中的所显示的缺陷图像，并且将所传送的缺陷图像显示在所述显示屏幕上定义为所述其他类别之一的区域中; 并更改关于该类别的信息。

    Image classification method, observation method, and apparatus thereof with different stage moving velocities
    6.
    发明授权
    Image classification method, observation method, and apparatus thereof with different stage moving velocities 失效
    具有不同阶段移动速度的图像分类方法，观察方法及装置

    公开(公告)号：US06657221B2

    公开(公告)日：2003-12-02

    申请号：US09988436

    申请日：2001-11-20

    申请人： Ryo Nakagaki ,  Yuji Takagi ,  Takashi Hiroi ,  Masahiro Watanabe ,  Minori Noguchi ,  Kazuo Aoki

    发明人： Ryo Nakagaki ,  Yuji Takagi ,  Takashi Hiroi ,  Masahiro Watanabe ,  Minori Noguchi ,  Kazuo Aoki

    IPC分类号： G01N2186

    CPC分类号： G01N21/9501

    摘要： There are provided an automatic image collection apparatus and method capable of acquiring and automatically classifying fast an image of a defect part caused in a semiconductor wafer production process detected by a defect inspection unit. The image collection apparatus for automatically imaging and collecting images of a plurality of observed parts on a semiconductor wafer is provided with a scheduling portion for deciding the imaging order of the defects and stage moving velocities based on the positional relation of the plurality of observed parts on the wafer and a control portion for feed backing the stage movement amount to the beam deflection amount, thereby imaging and collecting images via an optimal route while moving the stage.

    摘要翻译： 提供一种自动图像采集装置和方法，其能够快速地获取由缺陷检查单元检测的半导体晶片制造过程中引起的缺陷部分的图像的自动分类。 用于在半导体晶片上自动成像和收集多个观察部分的图像的图像采集装置设置有调度部分，用于基于多个观察部分的位置关系来确定缺陷和阶段移动速度的成像顺序 晶片和用于馈送背景的控制部分，舞台移动量达到光束偏转量，从而在移动舞台的同时通过最佳路线对图像进行成像和收集。

    DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM
    7.
    发明申请
    DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM 有权
    缺陷分类方法和缺陷分类系统

    公开(公告)号：US20140072204A1

    公开(公告)日：2014-03-13

    申请号：US14112105

    申请日：2012-04-16

    申请人： Yohei Minekawa ,  Yuji Takagi ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

    发明人： Yohei Minekawa ,  Yuji Takagi ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

    IPC分类号： G06T7/00 ,  G06K9/62

    CPC分类号： G06T7/001 ,  G01N21/9501 ,  G01N23/225 ,  G01N2223/421 ,  G01N2223/611 ,  G01N2223/646 ,  G06K9/6267 ,  G06T5/00 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In automatic defect classification, a classification recipe must be set for each defect observation device. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created. This defect classification system has a classification recipe storage unit; an information specification unit, the stage of a stored image, and device information. A corresponding defect specification unit specifies images of the same type of defect from images obtained from different image pickup devices at the same stage. An image conversion unit converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.

    摘要翻译： 在自动缺陷分类中，必须为每个缺陷观察装置设定分类处方。 如果多个设备在同一阶段进行操作，则分类配方中的分类等级必须相同。 当创建新的分类配方时，出现了在不同装置中的分类等级中发生差异的问题。 该缺陷分类系统具有分类配方存储单元; 信息指定单元，存储图像的级和设备信息。 相应的缺陷指定单元从在相同阶段从不同图像拾取装置获得的图像中指定相同类型的缺陷的图像。 图像转换单元将从相同阶段的不同图像拾取装置获得的图像转换成可比较的相似图像; 并且配方更新单元将分类类别记录在与相同类型的缺陷的指定图像相对应的分类配方中。

    Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
    8.
    发明授权
    Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus 有权
    基于该方法和装置的缺陷图像分类方法和装置以及半导体器件制造方法

    公开(公告)号：US07356177B2

    公开(公告)日：2008-04-08

    申请号：US11506310

    申请日：2006-08-17

    申请人： Kenji Obara ,  Yuji Takagi ,  Ryo Nakagaki ,  Yasuhiko Ozawa ,  Toshiei Kurosaki ,  Seiji Isogai

    发明人： Kenji Obara ,  Yuji Takagi ,  Ryo Nakagaki ,  Yasuhiko Ozawa ,  Toshiei Kurosaki ,  Seiji Isogai

    IPC分类号： G06K9/00

    CPC分类号： G06T7/001 ,  G06T2207/30148

    摘要： According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image classification method using inspected objects is provided. The method includes defect images obtained from at least one inspected object. Next a set of defect images is classified into a specified category, which has a feature. The defect images are arranged for display according to the feature and then displayed. The arranging of the defect images may also be based on an evaluation value for each defect image. Another embodiment provides a defect image classification method using inspected objects. Defect images are obtained from at least one inspected object. Next the defect images are classified into a plurality of categories and at least two information items for example, a defect distribution diagram showing locations of defects in the inspected object, information associated with a category of the plurality of categories, and a defect size distribution, are displayed.

    摘要翻译： 根据本发明，提供包括用于分类和显示图像的方法和装置的技术。 在本发明的一个实施例中，提供了使用检查对象的缺陷图像分类方法。 该方法包括从至少一个检查对象获得的缺陷图像。 接下来，一组缺陷图像被分类为具有特征的指定类别。 故障图像根据特征进行显示，然后显示。 缺陷图像的布置也可以基于每个缺陷图像的评估值。 另一实施例提供使用检查对象的缺陷图像分类方法。 从至少一个检查对象获得缺陷图像。 接下来，将缺陷图像分为多个类别和至少两个信息项，例如，示出被检查对象中的缺陷的位置的缺陷分布图，与多个类别的类别相关联的信息以及缺陷尺寸分布， 被显示。

    Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
    9.
    发明申请
    Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus 有权
    基于该方法和装置的缺陷图像分类方法和装置以及半导体器件制造方法

    公开(公告)号：US20060274933A1

    公开(公告)日：2006-12-07

    申请号：US11506310

    申请日：2006-08-17

    申请人： Kenji Obara ,  Yuji Takagi ,  Ryo Nakagaki ,  Yasuhiro Ozawa ,  Toshiei Kurosaki ,  Seiji Isogai

    发明人： Kenji Obara ,  Yuji Takagi ,  Ryo Nakagaki ,  Yasuhiro Ozawa ,  Toshiei Kurosaki ,  Seiji Isogai

    IPC分类号： G06K9/00 ,  G06K9/62

    CPC分类号： G06T7/001 ,  G06T2207/30148

    摘要： According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image classification method using inspected objects is provided. The method includes defect images obtained from at least one inspected object. Next a set of defect images is classified into a specified category, which has a feature. The defect images are arranged for display according to the feature and then displayed. The arranging of the defect images may also be based on an evaluation value for each defect image. Another embodiment provides a defect image classification method using inspected objects. Defect images are obtained from at least one inspected object. Next the defect images are classified into a plurality of categories and at least two information items for example, a defect distribution diagram showing locations of defects in the inspected object, information associated with a category of the plurality of categories, and a defect size distribution, are displayed.

    摘要翻译： 根据本发明，提供了包括用于分类和显示图像的方法和装置的技术。 在本发明的一个实施例中，提供了使用检查对象的缺陷图像分类方法。 该方法包括从至少一个检查对象获得的缺陷图像。 接下来，一组缺陷图像被分类为具有特征的指定类别。 故障图像根据特征进行显示，然后显示。 缺陷图像的布置也可以基于每个缺陷图像的评估值。 另一实施例提供使用检查对象的缺陷图像分类方法。 从至少一个检查对象获得缺陷图像。 接下来，将缺陷图像分为多个类别和至少两个信息项，例如，示出被检查对象中的缺陷的位置的缺陷分布图，与多个类别的类别相关联的信息以及缺陷尺寸分布， 被显示。