Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
    1.
    发明授权
    Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus 有权
    沉积装置,制造有机发光显示装置的方法和有机发光显示装置

    公开(公告)号:US08993360B2

    公开(公告)日:2015-03-31

    申请号:US13951374

    申请日:2013-07-25

    CPC classification number: H01L51/0011 C23C14/042 C23C14/243 H01L27/3211

    Abstract: A deposition apparatus for depositing a deposition material on a substrate in order to improve characteristics of a deposition layer includes: a deposition source facing the substrate and ejecting the deposition material; a patterning slit sheet including patterning slits for depositing the deposition material in a desired pattern and disposed to face the substrate; a frame coupled to the patterning slit sheet; and a stage bonded to the frame to support the frame, wherein a separation area is formed between the frame and the stage.

    Abstract translation: 用于在基板上沉积沉积材料以便改善沉积层的特性的沉积装置包括:沉积源,其面向基板并喷射沉积材料; 图案化缝隙片,包括用于将所述沉积材料沉积成所需图案并且设置为面对所述衬底的图案化缝隙; 耦合到所述图案化缝隙片的框架; 以及阶段,其结合到框架以支撑框架,其中在框架和台架之间形成分离区域。

    DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS
    3.
    发明申请
    DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS 审中-公开
    沉积装置,制造有机发光显示装置的方法和有机发光显示装置

    公开(公告)号:US20150207108A1

    公开(公告)日:2015-07-23

    申请号:US14671718

    申请日:2015-03-27

    CPC classification number: C23C14/042 C23C14/243 H01L27/3211 H01L51/0011

    Abstract: A deposition apparatus for depositing a deposition material on a substrate in order to improve characteristics of a deposition layer includes: a deposition source facing the substrate and ejecting the deposition material; a patterning slit sheet including patterning slits for depositing the deposition material in a desired pattern and disposed to face the substrate; a frame coupled to the patterning slit sheet; and a stage bonded to the frame to support the frame, wherein a separation area is formed between the frame and the stage.

    Abstract translation: 用于在基板上沉积沉积材料以便改善沉积层的特性的沉积装置包括:沉积源,其面向基板并喷射沉积材料; 图案化缝隙片,包括用于将所述沉积材料沉积成所需图案并且设置为面对所述衬底的图案化缝隙; 耦合到所述图案化缝隙片的框架; 以及阶段,其结合到框架以支撑框架,其中在框架和台架之间形成分离区域。

    DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS
    4.
    发明申请
    DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS 有权
    沉积装置,制造有机发光显示装置的方法和有机发光显示装置

    公开(公告)号:US20140291620A1

    公开(公告)日:2014-10-02

    申请号:US13951374

    申请日:2013-07-25

    CPC classification number: H01L51/0011 C23C14/042 C23C14/243 H01L27/3211

    Abstract: A deposition apparatus for depositing a deposition material on a substrate in order to improve characteristics of a deposition layer includes: a deposition source facing the substrate and ejecting the deposition material; a patterning slit sheet including patterning slits for depositing the deposition material in a desired pattern and disposed to face the substrate; a frame coupled to the patterning slit sheet; and a stage bonded to the frame to support the frame, wherein a separation area is formed between the frame and the stage.

    Abstract translation: 用于在基板上沉积沉积材料以便改善沉积层的特性的沉积装置包括:沉积源,其面向基板并喷射沉积材料; 图案化缝隙片,包括用于将所述沉积材料沉积成所需图案并且设置为面对所述衬底的图案化缝隙; 耦合到所述图案化缝隙片的框架; 以及阶段,其结合到框架以支撑框架,其中在框架和台架之间形成分离区域。

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