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公开(公告)号：US09766054B2
公开(公告)日：2017-09-19
申请号：US14379106
申请日：2013-02-08
发明人： Jinchun Hu , Yu Zhu , Wensheng Yin , Longmin Chen , Kaiming Yang , Ming Zhang , Dengfeng Xu , Haihua Mu , Chuxiong Hu , Zhao Liu
CPC分类号： G01B7/30 , G01D5/2013 , G01M13/00 , G03F7/70758
摘要： A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch τ along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.
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2.发明申请公开(公告)号：US20150012242A1
公开(公告)日：2015-01-08
申请号：US14379106
申请日：2013-02-08
发明人： Jinchun Hu , Yu Zhu , Wensheng Yin , Longmin Chen , Kaiming Yang , Ming Zhang , Dengfeng Xu , Haihua Mu , Chuxiong Hu , Zhao Liu
CPC分类号： G01B7/30 , G01D5/2013 , G01M13/00 , G03F7/70758
摘要： A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch τ along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.
摘要翻译： 提供了一种平面电动机转子位移测量装置及其测量方法。 电动机是动圈式平面电动机。 该装置包括探针，两组正弦传感器，两组余弦传感器，信号引线和信号处理电路。 该方法是在位于正弦磁场区域的转子中沿着两个垂直移动方向在磁场间距τ内设置两组磁通密度传感器。 四组传感器的采样信号分别用倍频运算进行处理，得到4个细分信号，检测四个细分信号的过零点，然后产生两组正交脉冲信号。 对正交脉冲信号的脉冲数进行计数，分别检测两组正交脉冲信号的相位差。
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公开(公告)号：US20150268031A1
公开(公告)日：2015-09-24
申请号：US14441828
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
CPC分类号： G01B9/02007 , G01B9/02049 , G01B11/14 , G01D5/266 , G01D5/38
摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.
摘要翻译： 双频光栅干涉仪位移测量系统，包括双频激光器，干涉仪，测量光栅和电子信号处理部件。 测量系统基于光栅衍射，光学多普勒效应和光拍频理论实现位移测量。 双频激光从双频激光器发射并通过偏振光谱仪分为参考光和测量光。 测量光入射到测量光栅以产生正负一阶衍射。 衍射光和参考光在光检测单元处形成包含关于两个方向的位移信息的拍频信号，并且在信号处理之后实现线性位移输出。 测量系统可以实现亚纳米级，甚至更高的分辨率和精度，同时可以测量长的水平位移和垂直位移。
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公开(公告)号：US09879979B2
公开(公告)日：2018-01-30
申请号：US14441821
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Ming Zhang , Yu Zhu , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
CPC分类号： G01B11/14 , G01B9/02002 , G01B9/02007 , G01B9/02011 , G01B2290/70 , G01D5/266 , G01D5/38
摘要： A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with an orthogonal polarization direction and an orthogonal propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.
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公开(公告)号：US09885556B2
公开(公告)日：2018-02-06
申请号：US14441828
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
CPC分类号： G01B9/02007 , G01B9/02049 , G01B11/14 , G01D5/266 , G01D5/38
摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.
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