公开(公告)号：US10479674B2

公开(公告)日：2019-11-19

申请号：US15639203

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01H9/00 ,  B81C1/00 ,  G01H3/06

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

公开(公告)号：US09725308B2

公开(公告)日：2017-08-08

申请号：US14303522

申请日：2014-06-12

Applicant: STMicroelectronics S.r.l.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01H9/00 ,  B81C1/00 ,  G01H3/06

CPC classification number: B81C1/0015 ,  B81C2203/075 ,  G01H3/06 ,  G01H9/00

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

公开(公告)号：US20150000402A1

公开(公告)日：2015-01-01

申请号：US14303522

申请日：2014-06-12

Applicant: STMicroelectronics S.r.l.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01C19/5712 ,  B81C1/00

CPC classification number: B81C1/0015 ,  B81C2203/075 ,  G01H3/06 ,  G01H9/00

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

Abstract translation: MEMS传感器至少具有设计成以振荡频率振荡的可移动元件，以及耦合到可移动元件的集成测量系统，以提供振荡频率的测量。 测量系统具有向可动元件发射光束的光源和用于接收从包括半导体光电二极管阵列的可移动元件反射回的光束的光检测器。 特别地，光检测器是具有单光子雪崩二极管阵列的集成光电倍增管。