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公开(公告)号：US09546417B2
公开(公告)日：2017-01-17
申请号：US14020218
申请日：2013-09-06
发明人： Young-Uk Lee , Jeong-Won Han
CPC分类号： C23C14/24 , F16K1/16 , F16K1/2007 , F16K31/53 , F16K51/02
摘要： A vacuum evaporating apparatus includes a driving unit, a linear-moving portion connected to the driving unit to move linearly, a rotational-moving portion connected to the linear-moving portion to move rotationally, and a shutter portion connected to the rotational-moving portion to pivot.
摘要翻译： 真空蒸发装置包括驱动单元，连接到驱动单元以线性移动的线性运动部分，连接到线性运动部分的旋转运动部分以旋转运动，以及连接到旋转运动部分的活门部分 枢轴。
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2.发明授权Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method 有权用于沉积的基板移动单元，包括该沉积设备的沉积设备，使用沉积设备制造有机发光显示设备的方法，以及使用该方法制造的有机发光显示设备公开(公告)号：US08936956B2
公开(公告)日：2015-01-20
申请号：US14099540
申请日：2013-12-06
发明人： Jeong-Won Han
CPC分类号： H01L51/56 , H01L21/6715 , H01L21/67709 , H01L21/6776
摘要： Provided are a substrate moving unit for use with a deposition apparatus that allows a deposition material to be precisely deposited on a target site of a substrate. The substrate moving unit includes an electrostatic chuck having a first surface on which a substrate is fixable and a magnetic force applying unit disposed on a second surface of the electrostatic chuck. A deposition apparatus including the substrate moving unit, a method of manufacturing an organic light-emitting display apparatus, and an organic light-emitting display apparatus manufactured by using the method are also presented.
摘要翻译： 提供了一种用于沉积设备的衬底移动单元，其允许沉积材料精确地沉积在衬底的目标位置上。 基板移动单元包括具有可固定基板的第一表面的静电卡盘和设置在静电卡盘的第二表面上的磁力施加单元。 还提供了包括基板移动单元的沉积设备，制造有机发光显示设备的方法和使用该方法制造的有机发光显示设备。
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公开(公告)号：US09657392B2
公开(公告)日：2017-05-23
申请号：US14096816
申请日：2013-12-04
发明人： Jeong-Won Han
CPC分类号： C23C16/042 , B05C21/005 , C23C14/042 , Y10T29/49826
摘要： A mask assembly includes a frame for forming an opening, and a mask fixed to the frame while a tensile force is applied thereto and forming a plurality of pattern openings. The frame includes a frame main body for forming an opening, and a plurality of moving members installed to be movable in at least one direction on the frame main body. The mask is fixed to the moving members while a tensile force is applied thereto.
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公开(公告)号：US09567663B2
公开(公告)日：2017-02-14
申请号：US14258092
申请日：2014-04-22
发明人： Jeong-Won Han
CPC分类号： C23C14/042 , B05C21/005 , Y10T29/49826 , Y10T29/53961
摘要： A manufacturing apparatus for a mask assembly includes a plurality of mask tensile units configured to apply a tensile force to a mask. A plurality of counterforce application units are configured to apply a counterforce in an opposite direction to the direction of the tensile force to a mask frame to which the mask is attached. The counterforce application units are configured to apply the counterforce to an upper portion of a side of the mask frame.
摘要翻译： 一种用于掩模组件的制造装置包括多个掩模拉伸单元，其被配置为向掩模施加张力。 多个反作用力施加单元构造成将反力与施加于所述掩模的荫罩框架的张力方向相反的方向施加。 反力施加单元被配置为将反作用力施加到掩模框架的一侧的上部。
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公开(公告)号：US20140260718A1
公开(公告)日：2014-09-18
申请号：US14010407
申请日：2013-08-26
发明人： Young-Uk Lee , Jeong-Won Han
IPC分类号： F16H19/04
CPC分类号： C23C14/00 , C23C14/24 , C23C14/243 , H01L51/001 , Y10T74/18056 , Y10T74/18096
摘要： A vacuum powered deposition apparatus including a driving unit, a linear motion unit coupled to the driving unit and configured to move linearly according to operation of the driving unit, and an angle restriction unit coupled to the linear motion unit and configured to move in a direction perpendicular to that of the linear motion unit according to movement of the linear motion unit.
摘要翻译： 一种真空动力沉积设备，包括驱动单元，连接到驱动单元并被配置为根据驱动单元的操作线性运动的线性运动单元，以及角度限制单元，其耦合到线性运动单元并且被配置成沿着方向 根据直线运动单元的移动垂直于线性运动单元。
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6.发明授权Position controller, method of controlling position, and apparatus including the position controller 有权位置控制器，位置控制方法以及包括位置控制器在内的设备公开(公告)号：US09589352B2
公开(公告)日：2017-03-07
申请号：US14161411
申请日：2014-01-22
发明人： Jeong-Won Han
IPC分类号： G06T7/00
CPC分类号： G06T7/74 , G06T2207/10016 , G06T2207/30164
摘要： A position controller, including a moving part configured to process or measure a workpiece, a laser unit disposed on one side of the moving part and configured to radiate a laser, a mask on which a laser image is formed corresponding to the irradiated laser, and a position control unit configured to position the moving part based on information of the laser image.
摘要翻译： 一种位置控制器，包括被配置为处理或测量工件的移动部件，设置在所述移动部件的一侧并被配置为辐射激光器的激光单元，对应于所述照射的激光器在其上形成激光图像的掩模;以及 位置控制单元，被配置为基于激光图像的信息来定位运动部分。
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公开(公告)号：US09394600B2
公开(公告)日：2016-07-19
申请号：US14227435
申请日：2014-03-27
发明人： Jeong-Won Han
CPC分类号： C23C14/042 , B05C21/005 , C23C16/042
摘要： A deposition mask assembly includes: a mask in which a deposition pattern is formed and a mask frame fixed to an edge of the mask, an opening being formed at a center of the mask frame. A first surface of the edge of the mask and a first surface of the mask frame adjacent to the opening which face each other are welded to each other.
摘要翻译： 沉积掩模组件包括：其中形成沉积图案的掩模和固定到掩模的边缘的掩模框架，在掩模框架的中心处形成开口。 掩模的边缘的第一表面和与彼此面对的开口相邻的掩模框架的第一表面彼此焊接。
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8.发明授权Sealing apparatus, substrate-sealing apparatus including the same and substrate-sealing method 有权密封装置，包括该密封装置的基板密封装置和基板密封方法公开(公告)号：US09393642B2
公开(公告)日：2016-07-19
申请号：US14218658
申请日：2014-03-18
发明人： Jeong-Won Han
CPC分类号： B23K26/57 , B23K26/046 , B23K26/073 , B23K26/206 , H01L25/043 , H01L51/5246 , H01L51/56 , H01L2924/0002 , H01L2924/00
摘要： The sealing apparatus includes a measuring unit moving above a sealing unit to measure a pattern of the sealing unit, a laser beam irradiation device moving along the measuring unit to irradiate a laser beam onto the sealing unit, and a control unit controlling a moving path and a size of a focusing area of the laser beam irradiation device according to the pattern of the sealing unit that is measured in the measuring unit.
摘要翻译： 密封装置包括测量单元，该测量单元在密封单元上移动以测量密封单元的图案;激光束照射装置，沿着测量单元移动以将激光束照射到密封单元上;以及控制单元，控制移动路径和 根据在测量单元中测量的密封单元的图案，激光束照射装置的聚焦区域的尺寸。
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公开(公告)号：US09643393B2
公开(公告)日：2017-05-09
申请号：US14049546
申请日：2013-10-09
发明人： Jeong-Won Han
CPC分类号： B32B38/0008 , B32B2250/00 , H01L27/3244 , H01L51/5246 , H01L51/56
摘要： A sealing apparatus for sealing a first substrate and a second substrate by a sealant includes: a stage which supports the first and second substrates, where the sealant is interposed between the first and second substrates along edges of the first and second substrates, and the stage includes a concave portion defined to correspond to the sealant; and an optical head configured to irradiate light onto the sealant, where the first substrate and the second substrate are fixed together by the light irradiated onto the sealant such that a space surrounded by the sealant between the first substrate and the second substrate is sealed.
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公开(公告)号：US09435019B2
公开(公告)日：2016-09-06
申请号：US14017057
申请日：2013-09-03
发明人： Jeong-Won Han
CPC分类号： C23C14/042 , B05C17/06 , B05C21/005 , B05D1/32 , H01L51/0011 , H05K3/3452
摘要： A mask includes a plate-shaped body including openings, and a modified portion including at least one first curved portion protruding from the plate-shaped body in a first direction and longitudinally extending in a second direction.
摘要翻译： 掩模包括包括开口的板状体，以及包括至少一个第一弯曲部分的修改部分，所述至少一个第一弯曲部分沿着第一方向从所述板状体突出并沿第二方向纵向延伸。
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