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公开(公告)号:US11087055B2
公开(公告)日:2021-08-10
申请号:US15985543
申请日:2018-05-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde , Harsono S. Simka , Chris Bowen
IPC: G06F30/30 , H01L23/532 , H01L23/528 , G06F30/367 , G06F111/10
Abstract: A method for characterizing a material for use in a semiconductor device and the semiconductor device using the material are described. The material has a unit cell and a crystal structure. The method includes determining a figure of merit (FOM) for the material using only forward conducting modes for the unit cell. The FOM is a resistivity multiplied by a mean free path. The FOM may be used to determine a suitability of the material for use in the semiconductor device.
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2.
公开(公告)号:US20200235055A1
公开(公告)日:2020-07-23
申请号:US16410787
申请日:2019-05-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde , Harsono S. Simka
IPC: H01L23/532 , H01L21/768
Abstract: A method of forming an interconnect for an integrated circuit includes: identifying an interconnect barrier material, identifying a plurality of potential dopant elements, creating an ensemble of potential barrier structures including the interconnect barrier material doped at a plurality of doping positions and a plurality of doping amounts for each of the plurality of potential dopant elements, calculating a density of states for each of the barrier structures of the ensemble, selecting a dopant element and a doping amount based on the density of states, and depositing a barrier layer including an alloy, the alloy including the interconnect barrier material and the selected dopant element at the selected doping amount.
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3.
公开(公告)号:US20190318998A1
公开(公告)日:2019-10-17
申请号:US16453475
申请日:2019-06-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Harsono S. Simka , Ganesh Hegde , Joon Goo Hong , Rwik Sengupta , Mark S. Rodder
IPC: H01L23/00 , H01L23/522 , H01L27/02
Abstract: A hardware-embedded security system is described. The system includes connective components, circuit elements and an insulator. The connective components include a variable conductivity layer that is conductive for a first stoichiometry and insulating for a second stoichiometry. A first portion of the circuit elements are connected to a first portion of the connective components and are active. A the second portion of the circuit elements are connected to a second portion of the connective components and are inactive. The insulator is adjacent to at least a portion of each of the connective components. The first stoichiometry is indistinguishable from the second stoichiometry via optical imaging and electron imaging of a portion of the insulator and the variable conductivity layer.
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公开(公告)号:US09831323B2
公开(公告)日:2017-11-28
申请号:US15267134
申请日:2016-09-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jorge A. Kittl , Ganesh Hegde , Robert Christopher Bowen , Borna J. Obradovic , Mark S. Rodder
IPC: H01L29/78 , H01L29/66 , H01L29/201 , H01L29/06 , H01L21/02 , H01L21/306 , H01L21/04 , H01L21/465
CPC classification number: H01L29/6681 , H01L21/02439 , H01L21/02447 , H01L21/0245 , H01L21/02485 , H01L21/02532 , H01L21/02603 , H01L21/0475 , H01L21/30604 , H01L21/465 , H01L29/0673 , H01L29/66439 , H01L29/6653 , H01L29/66553 , H01L29/7848 , H01L29/7853
Abstract: A stack for a semiconductor device and a method for making the stack are disclosed. The stack includes a plurality of sacrificial layers in which each sacrificial layer has a first lattice parameter; and at least one channel layer that has a second lattice parameter in which the first lattice parameter is less than or equal to the second lattice parameter, and each channel layer is disposed between and in contact with two sacrificial layers and includes a compressive strain or a neutral strain based on a difference between the first lattice parameter and the second lattice parameter.
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公开(公告)号:US11043454B2
公开(公告)日:2021-06-22
申请号:US16410787
申请日:2019-05-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde , Harsono S. Simka
IPC: H01L23/532 , H01L21/768
Abstract: A method of forming an interconnect for an integrated circuit includes: identifying an interconnect barrier material, identifying a plurality of potential dopant elements, creating an ensemble of potential barrier structures including the interconnect barrier material doped at a plurality of doping positions and a plurality of doping amounts for each of the plurality of potential dopant elements, calculating a density of states for each of the barrier structures of the ensemble, selecting a dopant element and a doping amount based on the density of states, and depositing a barrier layer including an alloy, the alloy including the interconnect barrier material and the selected dopant element at the selected doping amount.
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公开(公告)号:US20210103822A1
公开(公告)日:2021-04-08
申请号:US16799410
申请日:2020-02-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde , Harsono S. Simka
Abstract: A method and a system for material design utilizing machine learning are provided, where the underlying joint distribution p(S,P) of structure (S)-property (P) relationships is explicitly learned simultaneously and is utilized to directly generate samples (S,P) in a single step utilizing generative techniques, without any additional processing steps. The subspace of structures that meet or exceed the target for property P is then identified utilizing conditional generation of the distribution (e.g., p(P)), or through randomly generating a large number of samples (S,P) and filtering (e.g., selecting) those that meet target property criteria.
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公开(公告)号:US20210081834A1
公开(公告)日:2021-03-18
申请号:US16798245
申请日:2020-02-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde
Abstract: A method for obtaining learned self-consistent electron density and/or derived physical quantities includes: conducting non-self-consistent (NSC) calculation to generate a first NSC dataset X1 from a first plurality of configurations of atoms; conducting self-consistent (SC) calculation to generate a first SC dataset Y1 from the first plurality of configurations of atoms; mapping the first NSC dataset X1 to the first SC dataset Y1 utilizing machine learning algorithm to generate a mapping function F; and generating a learned self-consistent data Y2 from a new NSC data X2 utilizing the mapping function F.
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8.
公开(公告)号:US10916513B2
公开(公告)日:2021-02-09
申请号:US16453475
申请日:2019-06-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Harsono S. Simka , Ganesh Hegde , Joon Goo Hong , Rwik Sengupta , Mark S. Rodder
IPC: H01L23/00 , H01L23/522 , H01L27/02 , H04L9/32 , H01L23/532 , G09C1/00
Abstract: A hardware-embedded security system is described. The system includes connective components, circuit elements and an insulator. The connective components include a variable conductivity layer that is conductive for a first stoichiometry and insulating for a second stoichiometry. A first portion of the circuit elements are connected to a first portion of the connective components and are active. A the second portion of the circuit elements are connected to a second portion of the connective components and are inactive. The insulator is adjacent to at least a portion of each of the connective components. The first stoichiometry is indistinguishable from the second stoichiometry via optical imaging and electron imaging of a portion of the insulator and the variable conductivity layer.
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公开(公告)号:US10510665B2
公开(公告)日:2019-12-17
申请号:US14931845
申请日:2015-11-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde , Mark Rodder , Jorge Kittl , Chris Bowen
IPC: H01L23/528 , H01L23/532 , H01L21/225 , H01L21/768
Abstract: A diffusion barrier and a method to form the diffusion bather are disclosed. A trench structure is formed in an Inter Layer Dielectric (ILD). The ILD comprises a dielectric matrix having a first density. A dopant material layer is formed on the trench structure in which the dopant material layer comprises atoms of at least one of a rare-earth element. The ILD and the trench structure are annealed to form a dielectric matrix comprising a second density in one or more regions of the ILD on which the dopant material layer was formed that is greater than the first density. After annealing, the dielectric matrix comprising the second density includes increased bond lengths of oxygen-silicon bonds and/or oxygen-semiconductor bonds, increased bond angles of oxygen-silicon bonds and/or oxygen-semiconductor material bonds, and pores in the dielectric matrix are sealed compared to the dielectric matrix comprising the first density.
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公开(公告)号:US11586982B2
公开(公告)日:2023-02-21
申请号:US16798245
申请日:2020-02-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ganesh Hegde
Abstract: A method for obtaining learned self-consistent electron density and/or derived physical quantities includes: conducting non-self-consistent (NSC) calculation to generate a first NSC dataset X1 from a first plurality of configurations of atoms; conducting self-consistent (SC) calculation to generate a first SC dataset Y1 from the first plurality of configurations of atoms; mapping the first NSC dataset X1 to the first SC dataset Y1 utilizing machine learning algorithm to generate a mapping function F; and generating a learned self-consistent data Y2 from a new NSC data X2 utilizing the mapping function F.
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