-
公开(公告)号:US20180025926A1
公开(公告)日:2018-01-25
申请号:US15650187
申请日:2017-07-14
发明人: HyoJoong Kim , Kyungsun Seo , Jongho Choi
IPC分类号: H01L21/67 , H01L21/768 , H01L21/263 , H01L21/677
CPC分类号: H01L21/67173 , C23C16/24 , C23C16/4412 , C23C16/45578 , H01L21/2636 , H01L21/67063 , H01L21/67109 , H01L21/67178 , H01L21/67207 , H01L21/67739 , H01L21/76831
摘要: A substrate processing apparatus includes an outer tube including an open bottom portion and a closed top portion, and an inner tube disposed in the outer tube and spaced apart from the outer tube. The inner tube includes a first opening at a top portion of the inner tube, a second opening at a bottom portion of the inner tube, and an inner sidewall including a plurality of exhaust holes on one side of the inner sidewall, the inner sidewall defining the first and second openings.
-
公开(公告)号:US11120630B2
公开(公告)日:2021-09-14
申请号:US16536195
申请日:2019-08-08
发明人: Woosung Choi , Hyuk Kang , Minji Kim , Dongil Son , Buseop Jung , Jongho Choi , Jooman Han
摘要: An electronic device providing information through a virtual environment is disclosed. The device includes: a display; and an information providing module functionally connected with the display, wherein the information providing module displays an object corresponding to an external electronic device for the electronic device through the display, obtains information to be output through the external electronic device, and provides contents corresponding to the information in relation to a region, on which the object is displayed.
-
公开(公告)号:USD820599S1
公开(公告)日:2018-06-19
申请号:US29598370
申请日:2017-03-24
设计人: Sungjin Park , Yeonjoo Lee , Dong-ju Roh , Dongjun Lee , Jeeyun Lee , Jongho Choi
-
-