Method and apparatus of fabricating a semiconductor device by back grinding and dicing

    公开(公告)号:US20080086858A1

    公开(公告)日:2008-04-17

    申请号:US11987844

    申请日:2007-12-05

    IPC分类号: H01L21/67

    摘要: A method and apparatus of fabricating a semiconductor device by back grinding and dicing is disclosed. The method may include at least adhering a protection tape for back grinding on a front surface of a semiconductor wafer, back grinding a rear surface of the semiconductor wafer while the protection tape faces downward, loading the semiconductor wafer to dicing equipment when the front surface having the protection tape faces downward, detecting a dicing position formed on the front surface of the semiconductor wafer, and dicing the semiconductor wafer with the protection tape adhering thereon into individual semiconductor chips in accordance with the detected dicing position. The dicing equipment may have a transparent aligning part for aligning the semiconductor wafer and a chuck part for supporting the semiconductor wafer.

    Method and apparatus of fabricating a semiconductor device by back grinding and dicing
    2.
    发明申请
    Method and apparatus of fabricating a semiconductor device by back grinding and dicing 失效
    通过背面研磨和切割制造半导体器件的方法和装置

    公开(公告)号:US20050196939A1

    公开(公告)日:2005-09-08

    申请号:US10984843

    申请日:2004-11-10

    摘要: A method and apparatus of fabricating a semiconductor device by back grinding and dicing is disclosed. The method may include at least adhering a protection tape for back grinding on a front surface of a semiconductor wafer, back grinding a rear surface of the semiconductor wafer while the protection tape faces downward, loading the semiconductor wafer to dicing equipment when the front surface having the protection tape faces downward, detecting a dicing position formed on the front surface of the semiconductor wafer, and dicing the semiconductor wafer with the protection tape adhering thereon into individual semiconductor chips in accordance with the detected dicing position. The dicing equipment may have a transparent aligning part for aligning the semiconductor wafer and a chuck part for supporting the semiconductor wafer.

    摘要翻译: 公开了一种通过背面研磨和切割制造半导体器件的方法和装置。 该方法可以包括至少在半导体晶片的前表面上粘贴用于背面研磨的保护带,当保护带朝下时,背面研磨半导体晶片的后表面,当前表面具有 保护带面向下,检测形成在半导体晶片的前表面上的切割位置,并根据检测到的切割位置将其上粘附有保护带的半导体晶片切割成单独的半导体芯片。 切割设备可以具有用于对准半导体晶片的透明对准部分和用于支撑半导体晶片的卡盘部分。

    Method and apparatus of fabricating a semiconductor device by back grinding and dicing
    3.
    发明授权
    Method and apparatus of fabricating a semiconductor device by back grinding and dicing 失效
    通过背面研磨和切割制造半导体器件的方法和装置

    公开(公告)号:US07323397B2

    公开(公告)日:2008-01-29

    申请号:US10984843

    申请日:2004-11-10

    摘要: A method and apparatus of fabricating a semiconductor device by back grinding and dicing is disclosed. The method may include at least adhering a protection tape for back grinding on a front surface of a semiconductor wafer, back grinding a rear surface of the semiconductor wafer while the protection tape faces downward, loading the semiconductor wafer to dicing equipment when the front surface having the protection tape faces downward, detecting a dicing position formed on the front surface of the semiconductor wafer, and dicing the semiconductor wafer with the protection tape adhering thereon into individual semiconductor chips in accordance with the detected dicing position. The dicing equipment may have a transparent aligning part for aligning the semiconductor wafer and a chuck part for supporting the semiconductor wafer.

    摘要翻译: 公开了一种通过背面研磨和切割制造半导体器件的方法和装置。 该方法可以包括至少在半导体晶片的前表面上粘贴用于背面研磨的保护带,当保护带朝下时,背面研磨半导体晶片的后表面,当前表面具有 保护带面向下,检测形成在半导体晶片的前表面上的切割位置,并根据检测到的切割位置将其上粘附有保护带的半导体晶片切割成单独的半导体芯片。 切割设备可以具有用于对准半导体晶片的透明对准部分和用于支撑半导体晶片的卡盘部分。

    Method and apparatus of fabricating a semiconductor device by back grinding and dicing
    6.
    发明授权
    Method and apparatus of fabricating a semiconductor device by back grinding and dicing 失效
    通过背面研磨和切割制造半导体器件的方法和装置

    公开(公告)号:US07495315B2

    公开(公告)日:2009-02-24

    申请号:US11987844

    申请日:2007-12-05

    摘要: A method and apparatus of fabricating a semiconductor device by back grinding and dicing is disclosed. The method may include at least adhering a protection tape for back grinding on a front surface of a semiconductor wafer, back grinding a rear surface of the semiconductor wafer while the protection tape faces downward, loading the semiconductor wafer to dicing equipment when the front surface having the protection tape faces downward, detecting a dicing position formed on the front surface of the semiconductor wafer, and dicing the semiconductor wafer with the protection tape adhering thereon into individual semiconductor chips in accordance with the detected dicing position. The dicing equipment may have a transparent aligning part for aligning the semiconductor wafer and a chuck part for supporting the semiconductor wafer.

    摘要翻译: 公开了一种通过背面研磨和切割制造半导体器件的方法和装置。 该方法可以包括至少在半导体晶片的前表面上粘贴用于背面研磨的保护带,当保护带朝下时,背面研磨半导体晶片的后表面,当前表面具有 保护带面向下,检测形成在半导体晶片的前表面上的切割位置,并根据检测到的切割位置将其上粘附有保护带的半导体晶片切割成各个半导体芯片。 切割设备可以具有用于对准半导体晶片的透明对准部分和用于支撑半导体晶片的卡盘部分。