公开(公告)号：US20120212545A1

公开(公告)日：2012-08-23

申请号：US13396830

申请日：2012-02-15

申请人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  B41J2202/08

摘要： An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.

摘要翻译： 喷墨头包括具有喷嘴的喷嘴板，喷嘴板上的振动板，由分隔壁隔开的空间形成的液体室，具有公共电极的压电元件，压电体和单独的电极，按此顺序分层 所述振动板的表面，具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜，经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线， 第三绝缘膜，在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线，其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中，并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。

公开(公告)号：US08454133B2

公开(公告)日：2013-06-04

申请号：US13422136

申请日：2012-03-16

申请人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

发明人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

IPC分类号： B41J2/045

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14491

摘要： An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.

摘要翻译： 公开了一种喷墨头。 在喷墨头中，在多个专用液体室对准的液体室基板上形成振动板; 在专用电极布线和下电极重叠的区域中，在专用电极布线和下电极之间形成第一绝缘膜和第二绝缘膜; 在包括专用电极布线的形成区域的区域中堆叠第三绝缘膜和第四绝缘膜; 在专用液体室的形成区域的至少一部分中，设置有非成膜区域; 并且在包括压电元件形成部的区域中，在非成膜区域中形成第一绝缘膜和第四绝缘膜，或者在非成膜区域中形成第四绝缘膜。

公开(公告)号：US08919926B2

公开(公告)日：2014-12-30

申请号：US13408073

申请日：2012-02-29

申请人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/16 ,  B41J2/14

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491

摘要： A disclosed inkjet head includes a liquid chamber formed by a space between a vibrating plate and a nozzle substrate and separated by partitions; a piezoelectric element formed by sequentially laminating a common electrode, a piezoelectric substance and an individual electrode over the space; first to fourth insulating films respectively having first to fourth openings; and a first wiring connected to the individual electrode and pulled through the first and second openings over the common electrode, wherein the first wiring passes through the third opening over the third insulating film, the first wiring is exposed from the fourth opening so as to be externally connected, and the third insulating film and the fourth insulating film are not partly formed above the liquid chamber and formed above the first wiring.

摘要翻译： 所公开的喷墨头包括由振动板和喷嘴基板之间的空间形成并由分隔件分隔的液体室; 通过在该空间上依次层叠公共电极，压电体和单个电极而形成的压电元件; 分别具有第一至第四开口的第一至第四绝缘膜; 以及第一布线，其连接到所述单独电极并且在所述公共电极上被拉动通过所述第一和第二开口，其中所述第一布线穿过所述第三绝缘膜上的所述第三开口，所述第一布线从所述第四开口露出， 外部连接，并且第三绝缘膜和第四绝缘膜不部分地形成在液体室的上方并形成在第一布线的上方。

公开(公告)号：US08602530B2

公开(公告)日：2013-12-10

申请号：US13396830

申请日：2012-02-15

申请人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  B41J2202/08

摘要： An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.

摘要翻译： 喷墨头包括具有喷嘴的喷嘴板，喷嘴板上的振动板，由分隔壁隔开的空间形成的液体室，具有公共电极的压电元件，压电体和单独的电极，按此顺序分层 所述振动板的表面，具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜，经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线， 第三绝缘膜，在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线，其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中，并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。

公开(公告)号：US20120236083A1

公开(公告)日：2012-09-20

申请号：US13422136

申请日：2012-03-16

申请人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

发明人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

IPC分类号： B41J2/045

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14491

摘要： An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.

摘要翻译： 公开了一种喷墨头。 在喷墨头中，在多个专用液体室对准的液体室基板上形成振动板; 在专用电极布线和下电极重叠的区域中，在专用电极布线和下电极之间形成第一绝缘膜和第二绝缘膜; 在包括专用电极布线的形成区域的区域中堆叠第三绝缘膜和第四绝缘膜; 在专用液体室的形成区域的至少一部分中，设置有非成膜区域; 并且在包括压电元件形成部的区域中，在非成膜区域中形成第一绝缘膜和第四绝缘膜，或者在非成膜区域中形成第四绝缘膜。

公开(公告)号：US20120229573A1

公开(公告)日：2012-09-13

申请号：US13408073

申请日：2012-02-29

申请人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/14

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491

摘要： A disclosed inkjet head includes a liquid chamber formed by a space between a vibrating plate and a nozzle substrate and separated by partitions; a piezoelectric element formed by sequentially laminating a common electrode, a piezoelectric substance and an individual electrode over the space; first to fourth insulating films respectively having first to fourth openings; and a first wiring connected to the individual electrode and pulled through the first and second openings over the common electrode, wherein the first wiring passes through the third opening over the third insulating film, the first wiring is exposed from the fourth opening so as to be externally connected, and the third insulating film and the fourth insulating film are not partly formed above the liquid chamber and formed above the first wiring.

摘要翻译： 所公开的喷墨头包括由振动板和喷嘴基板之间的空间形成并由分隔件分隔的液体室; 通过在该空间上依次层叠公共电极，压电体和单个电极而形成的压电元件; 分别具有第一至第四开口的第一至第四绝缘膜; 以及第一布线，其连接到所述单独电极并且在所述公共电极上被拉动通过所述第一和第二开口，其中所述第一布线穿过所述第三绝缘膜上的所述第三开口，所述第一布线从所述第四开口露出， 外部连接，并且第三绝缘膜和第四绝缘膜不部分地形成在液体室的上方并形成在第一布线的上方。

公开(公告)号：US08727505B2

公开(公告)日：2014-05-20

申请号：US13529304

申请日：2012-06-21

申请人： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Keiji Ueda ,  Kanshi Abe ,  Takakazu Kihira ,  Naoya Kondo

发明人： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Keiji Ueda ,  Kanshi Abe ,  Takakazu Kihira ,  Naoya Kondo

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14258 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318

摘要： Disclosed is an electromechanical transducer element that includes an electromechanical transducer film formed of a complex oxide (PZT) including lead (Pb), zirconium (Zr), and titanium (Ti). The electromechanical transducer film is formed by laminating plural PZT thin films until a thickness of the formed electromechanical transducer film becomes a predetermined thickness. When an atomic weight ratio (Pb/(Zr+Ti)) of average Pb included in the formed electromechanical transducer film is denoted by Pb(avg) and an atomic weight ratio (Pb/(Zr+Ti)) of Pb in any one of laminate interfaces of the plural PZT thin films is denoted by Pb(interface), the Pb(avg) is greater than or equal to 100 atomic percentage (at %) and less than or equal to 110 atomic percentage (at %), and a fluctuation ratio ΔPb=Pb(avg)−Pb(interface) of Pb in the laminate interface is less than or equal to 20 percent.

摘要翻译： 公开了一种机电换能器元件，其包括由包括铅（Pb），锆（Zr）和钛（Ti）的复合氧化物（PZT）形成的机电换能器膜。 机电换能器膜通过层压多个PZT薄膜而形成，直到所形成的机电换能器膜的厚度成为预定厚度。 当在所形成的机电换能器膜中包含的平均Pb的原子重量比（Pb /（Zr + Ti））由Pb（avg）和Pb中的任何一种的原子量（Pb /（Zr + Ti）） 多个PZT薄膜的层叠界面由Pb（界面）表示，Pb（avg）大于或等于100原子百分比（at％）和小于或等于110原子百分比（at％），以及 层压界面中Pb的波动比＆Dgr; Pb = Pb（avg）-Pb（界面）小于或等于20％。

公开(公告)号：US08733906B2

公开(公告)日：2014-05-27

申请号：US13615399

申请日：2012-09-13

申请人： Satoshi Mizukami ,  Masaru Shinkai ,  Masahiro Ishimori ,  Yoshikazu Akiyama

发明人： Satoshi Mizukami ,  Masaru Shinkai ,  Masahiro Ishimori ,  Yoshikazu Akiyama

IPC分类号： B41J2/015

CPC分类号： H01L41/0478 ,  B41J2/14233 ,  B41J2002/14491 ,  H01L41/081 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

摘要： Disclosed is an electromechanical conversion element, including an electromechanical conversion film including a PZT, an upper electrode formed on a top of the electromechanical conversion film and including a first strontium ruthenium oxide, and a lower electrode formed on a bottom of the electromechanical conversion film and including a second strontium ruthenium oxide, wherein Sr-pzt/Sr-sr≦0.01, wherein Sr-pzt is a SIMS intensity for a secondary ion of strontium of the PZT at a position of ½ of a thickness of the electromechanical conversion film and Sr-sr is a SIMS intensity for a secondary ion of strontium of the second strontium ruthenium oxide at a position of ½ of a thickness of the lower electrode.

摘要翻译： 公开了一种机电转换元件，包括机电转换膜，其包括PZT，形成在机电转换膜的顶部上并包括第一锶氧化钌的上电极和形成在机电转换膜的底部的下电极， 包括第二锶氧化钌，其中Sr-pzt / Sr-Sr＆nlE; 0.01，其中Sr-pzt是在机电转换膜的厚度的1/2的位置处的PZT的锶的二次离子的SIMS强度，Sr -Sr是在下电极的厚度的1/2的位置处的第二锶氧化钌的锶的二次离子的SIMS强度。

公开(公告)号：US20130070029A1

公开(公告)日：2013-03-21

申请号：US13615399

申请日：2012-09-13

申请人： Satoshi Mizukami ,  Masaru Shinkai ,  Masahiro Ishimori ,  Yoshikazu Akiyama

发明人： Satoshi Mizukami ,  Masaru Shinkai ,  Masahiro Ishimori ,  Yoshikazu Akiyama

IPC分类号： H01L41/047 ,  B41J2/045 ,  H01L41/04

CPC分类号： H01L41/0478 ,  B41J2/14233 ,  B41J2002/14491 ,  H01L41/081 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

摘要： Disclosed is an electromechanical conversion element, including an electromechanical conversion film including a PIT, an upper electrode formed on a top of the electromechanical conversion film and including a first strontium ruthenium oxide, and a lower electrode formed on a bottom of the electromechanical conversion film and including a second strontium ruthenium oxide, wherein Sr-pzt/Sr-sr≦0.01, wherein Sr-pzt is a SIMS intensity for a secondary ion of strontium of the PZT at a position of ½ of a thickness of the electromechanical conversion film and Sr-sr is a SIMS intensity for a secondary ion of strontium of the second strontium ruthenium oxide at a position of ½ of a thickness of the lower electrode.

摘要翻译： 公开了一种机电转换元件，其包括包括PIT的机电转换膜，形成在机电转换膜的顶部上并包括第一锶氧化钌的上电极和形成在机电转换膜的底部上的下电极， 包括第二锶氧化钌，其中Sr-pzt / Sr-Sr＆nlE; 0.01，其中Sr-pzt是在机电转换膜的厚度的1/2的位置处的PZT的锶的二次离子的SIMS强度，Sr -Sr是在下电极的厚度的1/2的位置处的第二锶氧化钌的锶的二次离子的SIMS强度。

公开(公告)号：US09950524B2

公开(公告)日：2018-04-24

申请号：US15389731

申请日：2016-12-23

申请人： Masaru Shinkai ,  Yoshikazu Akiyama ,  Satoshi Mizukami

发明人： Masaru Shinkai ,  Yoshikazu Akiyama ,  Satoshi Mizukami

IPC分类号： B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2202/03

摘要： A PZT-film laminated structure includes a substrate, a lower electrode on the substrate, an orientation control layer on the lower electrode, a PZT layer on the orientation control layer, and an upper electrode on the PZT layer. The PZT layer has a (100) or (001) main orientation in which a peak intensity of PZT (100) or (001) is 90% or greater relative to a peak intensity of all PZT peaks in an X-ray diffraction measurement. A ratio of a total value of a secondary ion intensity of Cl relative to a total value of a secondary ion intensity of Ti in the PZT layer is equal to or smaller than 0.03 when the secondary ion intensity of Cl and the secondary ion intensity of Ti in the PZT layer are measured in a direction of thickness of the PZT layer with a magnetic-field secondary ion mass spectrometry.