公开(公告)号：US07741007B2

公开(公告)日：2010-06-22

申请号：US11987672

申请日：2007-12-03

申请人： Satoshi Yamaguchi ,  Satoshi Yamamoto ,  Nobuo Ando

发明人： Satoshi Yamaguchi ,  Satoshi Yamamoto ,  Nobuo Ando

IPC分类号： G03F7/004

CPC分类号： G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/111 ,  Y10S430/122 ,  Y10S430/123

摘要： The present invention provides a chemically amplified resist composition comprising: (A) a salt represented by the formula (1) wherein R21, Q1, Q2, and A+ defined in the specification; (B) a salt represented by the formula (II): wherein R22, Q3, Q4, and A′+ are defined in the specification; and (C) a resin which contains a structural unit having a structural unit having an acid-labile group and which itself is insoluble or poorly soluble in an aqueous alkali solution but becomes soluble in an aqueous alkali solution by the action of an acid.

摘要翻译： 本发明提供一种化学放大抗蚀剂组合物，其包含：（A）由式（1）表示的盐，其中在说明书中定义的R 21，Q 1，Q 2和A + （B）由式（II）表示的盐：其中R 22，Q 3，Q 4和A'+在本说明书中定义; 和（C）含有具有酸不稳定基团的结构单元的结构单元的树脂，其本身在碱性水溶液中不溶或难溶，但通过酸作用而溶于碱水溶液中。

公开(公告)号：US20080213695A1

公开(公告)日：2008-09-04

申请号：US11987672

申请日：2007-12-03

申请人： Satoshi Yamaguchi ,  Satoshi Yamamoto ,  Nobuo Ando

发明人： Satoshi Yamaguchi ,  Satoshi Yamamoto ,  Nobuo Ando

IPC分类号： G03F7/004

CPC分类号： G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/111 ,  Y10S430/122 ,  Y10S430/123

摘要： The present invention provides a chemically amplified resist composition comprising: (A) a salt represented by (I): wherein R21 represents a C1-C30 hydrocarbon group, Q1 and Q2 each represent a fluorine atom, and A+ represents at least one organic cation represented by (Ia): wherein P1-P3 each represent C1-C30 alkyl group, a cation represented by (Ib): wherein P4 and P5 each represent a hydrogen atom, and a cation represented by (Ic): wherein P10-P21 each represent hydrogen atom, B represents sulfur or oxygen atom and m represents 0 or 1; (B) a salt (II): wherein R22 represents C1-C30 hydrocarbon group, Q3 and Q4 each represent fluorine atom, and A′+ represents an organic cation (IIa): wherein P6 and P7 are each a C1-C12 alkyl group, P8 represents hydrogen atom, P9 represents C1-C12 alkyl group; and (C) a resin which contains a structural unit having an acid-labile group.

摘要翻译： 本发明提供一种化学放大抗蚀剂组合物，其包含：（A）由（I）表示的盐：其中R 21表示C 1 -C 30烃基，Q 1和 Q 2各自表示氟原子，A 0 +表示由（Ia）表示的至少一种有机阳离子：其中P 1〜 SUP> 3各自表示C1-C30烷基，由（Ib）表示的阳离子：其中P 4和P 5各自表示氢原子，和 由（Ic）表示的阳离子：其中P为10〜21个，各自表示氢原子，B表示硫或氧原子，m表示0或1; （B）盐（II）：其中R 22表示C 1 -C 30烃基，Q 3和Q 4各自表示氟原子， 并且A' +表示有机阳离子（IIa）：其中P 6和P 7各自为C 1 -C 12烷基， SUP> 8表示氢原子，P 9表示C1-C12烷基; 和（C）含有具有酸不稳定基团的结构单元的树脂。

公开(公告)号：US20070027336A1

公开(公告)日：2007-02-01

申请号：US11390319

申请日：2006-03-28

申请人： Isao Yoshida ,  Yukako Harada ,  Satoshi Yamaguchi ,  Nobuo Ando

发明人： Isao Yoshida ,  Yukako Harada ,  Satoshi Yamaguchi ,  Nobuo Ando

IPC分类号： C07C309/51

CPC分类号： C07C309/17 ,  C07C2603/74

摘要： The present invention provides a salt of the formula (L) A salt of the formula (L): wherein Q represents —CO— group or —C(OH)— group; ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms in which a hydrogen atom is substituted with a hydroxyl group at Q position when Q is —C(OH)— group or in which two hydrogen atoms are substituted with ≡O group at Q position when Q is —CO— group, and at least one hydrogen atom in the monocylic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; R10 and R20 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A+ represents organic counter ion. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (L).

摘要翻译： 本发明提供式（L）的盐式（L）的盐：其中Q表示-CO-基或-C（OH） - 基; 环X表示当Q为-C（OH） - 基团或其中两个氢原子被≡O基团取代时，其中氢原子被Q位羟基取代的具有3-30个碳原子的单环或多环烃基 在Q为-CO-基的Q位置，单环或多环烃基中的至少一个氢原子可以任选被具有1至6个碳原子的烷基，具有1至6个碳原子的烷氧基，具有1至6个碳原子的烷氧基， 1至4个碳原子，具有1至6个碳原子的羟基烷基，羟基或氰基; R 10和R 20各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; 而A +表示有机抗衡离子。 本发明还提供了包含式（L）的盐的化学放大抗蚀剂组合物。

公开(公告)号：US08124803B2

公开(公告)日：2012-02-28

申请号：US11390319

申请日：2006-03-28

申请人： Isao Yoshida ,  Yukako Harada ,  Satoshi Yamaguchi ,  Nobuo Ando

发明人： Isao Yoshida ,  Yukako Harada ,  Satoshi Yamaguchi ,  Nobuo Ando

IPC分类号： C07C309/19

CPC分类号： C07C309/17 ,  C07C2603/74

摘要： The present invention provides a salt of the formula (L)A salt of the formula (L): wherein Q represents —CO— group or —C(OH)— group; ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms in which a hydrogen atom is substituted with a hydroxyl group at Q position when Q is —C(OH)— group or in which two hydrogen atoms are substituted with ═O group at Q position when Q is —CO— group, and at least one hydrogen atom in the monocylic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; R10 and R20 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A+ represents organic counter ion. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (L).

摘要翻译： 本发明提供式（L）的盐式（L）的盐：其中Q表示-CO-基或-C（OH） - 基; 环X表示具有3〜30个碳原子的单环或多环烃基，其中当Q为-C（OH） - 基时，其中氢原子被Q位上的羟基取代，或其中两个氢原子被取代为= 在Q为-CO-基的Q位置，单环或多环烃基中的至少一个氢原子可以任选被具有1至6个碳原子的烷基，具有1至6个碳原子的烷氧基，具有1至6个碳原子的烷氧基， 1至4个碳原子，具有1至6个碳原子的羟基烷基，羟基或氰基; R 10和R 20各自独立地表示氟原子或具有1〜6个碳原子的全氟烷基; 而A +代表有机抗衡离子。 本发明还提供了包含式（L）的盐的化学放大抗蚀剂组合物。

公开(公告)号：US5113277A

公开(公告)日：1992-05-12

申请号：US542610

申请日：1990-06-22

申请人： Yasuo Ozawa ,  Nobuo Ando ,  Satoshi Yamamoto ,  Toshio Fukahori ,  Hiroyuki Kunugiyama ,  Kouichi Sugiyama ,  Teruaki Tsutsui ,  Keiichi Hashiba ,  Shigehiro Endoh ,  Hiroshi Kawakami ,  Akira Tokushima ,  Kaoru Yamazaki

发明人： Yasuo Ozawa ,  Nobuo Ando ,  Satoshi Yamamoto ,  Toshio Fukahori ,  Hiroyuki Kunugiyama ,  Kouichi Sugiyama ,  Teruaki Tsutsui ,  Keiichi Hashiba ,  Shigehiro Endoh ,  Hiroshi Kawakami ,  Akira Tokushima ,  Kaoru Yamazaki

IPC分类号： G01K11/32 ,  G02B6/24 ,  G02B6/34

CPC分类号： G02B6/2938 ,  G01K11/32 ,  G02B6/243 ,  G02B6/29362

摘要： A fiber optic distributed temperature sensor system outputs a temperature distribution along the longitudinal direction of a sensor optical fiber by measuring the temperature dependency of Raman scattered light intensity produced in an optical fiber by use of the OTDR technique. The system is characterized in that a light output from a light source is input to the sensor (optical fiber) via an optical wavelength division demultiplexer, that among the reflected light of back scattered light returning from the sensor optical fiber, light of a particular wavelength range is reflected or transmitted by at least one optical filter of the optical wavelength division demultiplexer to separate the light of the particular wavelength range and that signal of the light of the particular wavelength range is guided to a detector of an optical measuring system.

摘要翻译： 光纤分布式温度传感器系统通过使用OTDR技术测量在光纤中产生的拉曼散射光强度的温度依赖性，输出沿传感器光纤纵向的温度分布。 该系统的特征在于，从光源输出的光经由光波分复用器输入到传感器（光纤），在从传感器光纤返回的反射散射光的反射光中，特定波长的光 范围由光波分复用器的至少一个滤光器反射或透射以分离特定波长范围的光，并且将特定波长范围的光的信号引导到光学测量系统的检测器。

公开(公告)号：US20110189618A1

公开(公告)日：2011-08-04

申请号：US13062180

申请日：2009-09-01

申请人： Mitsuhiro Hata ,  Nobuo Ando ,  Satoshi Yamamoto ,  Junji Shigematsu ,  Akira Kamabuchi

发明人： Mitsuhiro Hata ,  Nobuo Ando ,  Satoshi Yamamoto ,  Junji Shigematsu ,  Akira Kamabuchi

IPC分类号： G03F7/20

CPC分类号： G03F7/0035 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/40

摘要： A resist processing method comprises the steps of: (1) forming a first resist film by applying a first resist composition comprising: a resin (A) having an acid-labile group, being insoluble or poorly soluble in alkali aqueous solution, and being rendered soluble in alkali aqueous solution through the action of an acid, a photo acid generator (B), a cross-linking agent (C) and an acid amplifier (D) onto a substrate and drying; (2) prebaking the first resist film; (3) exposing to the first resist film; (4) post-exposure baking of the first resist film; (5) developing with a first alkali developer to obtain a first resist pattern; (6) hard-baking the first resist pattern, (7) obtaining a second resist film by applying a second resist composition onto the first resist pattern, and drying; (8) pre-baking the second resist film; (9) exposing the second resist film; (10) post-exposure baking the second resist film; and (11) developing with a second alkali developer to obtain a second resist pattern.

摘要翻译： 抗蚀剂处理方法包括以下步骤：（1）通过施加第一抗蚀剂组合物形成第一抗蚀剂膜，所述第一抗蚀剂组合物包含：具有酸不稳定基团的树脂（A），其在碱性水溶液中不溶或难溶，并且呈现 通过酸，光酸产生剂（B），交联剂（C）和酸放大器（D）的作用将其溶于碱水溶液中并干燥; （2）预烘第一抗蚀膜; （3）暴露于第一抗蚀膜; （4）第一抗蚀剂膜的曝光后烘烤; （5）用第一碱性显影剂显影以获得第一抗蚀剂图案; （6）硬烘烤第一抗蚀剂图案，（7）通过将第二抗蚀剂组合物施加到第一抗蚀剂图案上并干燥获得第二抗蚀剂膜; （8）预烘烤第二抗蚀剂膜; （9）使第二抗蚀剂膜曝光; （10）曝光后烘烤第二抗蚀膜; 和（11）用第二碱性显影剂显影以获得第二抗蚀剂图案。

公开(公告)号：US09496541B2

公开(公告)日：2016-11-15

申请号：US13637385

申请日：2011-02-24

申请人： Makoto Taguchi ,  Yuu Watanabe ,  Nobuo Ando ,  Hidenori Takagi

发明人： Makoto Taguchi ,  Yuu Watanabe ,  Nobuo Ando ,  Hidenori Takagi

IPC分类号： H01M2/06 ,  H01G9/025 ,  H01G9/155 ,  H01M2/30 ,  H01G11/06 ,  H01G11/12 ,  H01G11/74 ,  H01M2/02 ,  H01M4/66 ,  H01M2/08 ,  H01M2/26 ,  H01M10/0585 ,  H01M10/04

CPC分类号： H01M2/30 ,  H01G11/06 ,  H01G11/12 ,  H01G11/74 ,  H01M2/021 ,  H01M2/0212 ,  H01M2/06 ,  H01M2/08 ,  H01M2/26 ,  H01M4/661 ,  H01M4/667 ,  H01M10/0413 ,  H01M10/0585 ,  Y02E60/13

摘要： An accumulator device includes: an outer container with mutually overlapped outer films bonded air-tightly to each other at a bonding portion formed along respective outer peripheral edge portions; an electrode unit accommodated inside the outer container and including positive and negative electrode sheets stacked one on another with a separator disposed therebetween, the positive and negative electrode sheets each including a current collector on which an electrode layer is formed; positive and negative electrode terminals provided to protrude from inside the outer container to outside through the bonding portion; and an electrolytic solution injected in the outer container. The positive electrode terminal includes an aluminum terminal substrate and a nickel-plating coating formed on a surface of an outer end portion of the terminal substrate located outside the outer container; an inner edge of the nickel-plating coating is located within the bonding portion.

摘要翻译： 一种蓄电装置，包括：外部容器，其具有相互重叠的外部膜，其沿相应的外周边缘部形成的接合部气密地彼此粘合; 容纳在外容器内部的电极单元，并且包括彼此层叠的正电极片和负电极片，隔着配置有隔膜的正极片和负极片，每个包括形成有电极层的集电体; 正极端子和负极端子，其设置成通过接合部从外部容器内部突出到外部; 以及注入到外容器中的电解液。 正极端子包括铝端子基板和形成在位于外部容器外部的端子基板的外端部的表面上的镀镍涂层; 镍镀层的内边缘位于接合部分内。

公开(公告)号：US09012089B2

公开(公告)日：2015-04-21

申请号：US12168253

申请日：2008-07-07

申请人： Nobuo Ando ,  Kenji Kojima

发明人： Nobuo Ando ,  Kenji Kojima

IPC分类号： H01M4/00 ,  H01M4/131 ,  H01G9/008 ,  H01G9/04 ,  H01G11/06 ,  H01G11/12 ,  H01G11/38 ,  H01G11/46 ,  H01G11/50 ,  H01G11/70 ,  H01M4/133 ,  H01M4/137 ,  H01M4/485 ,  H01M4/587 ,  H01M4/60 ,  H01M4/72 ,  H01M4/74 ,  H01M10/04 ,  H01M10/052 ,  H01M10/0525 ,  H01M10/0585 ,  H01M10/0587 ,  H01M12/00 ,  H01M10/0564 ,  H01M4/02

CPC分类号： H01M4/131 ,  H01G9/016 ,  H01G9/058 ,  H01G11/06 ,  H01G11/12 ,  H01G11/38 ,  H01G11/46 ,  H01G11/50 ,  H01G11/70 ,  H01M4/133 ,  H01M4/137 ,  H01M4/485 ,  H01M4/587 ,  H01M4/606 ,  H01M4/72 ,  H01M4/742 ,  H01M10/044 ,  H01M10/052 ,  H01M10/0525 ,  H01M10/0564 ,  H01M10/0585 ,  H01M10/0587 ,  H01M12/005 ,  H01M2004/028 ,  Y02E60/122 ,  Y02E60/13 ,  Y02T10/7011 ,  Y02T10/7022

摘要： A positive electrode system of an electric storage device includes first and second positive electrodes. The first and second positive electrodes include current collectors, and first and second positive-electrode mixture layers, respectively. The negative electrode system of the electric storage device has a negative electrode including a current collector and a negative-electrode mixture layer. The first positive electrode and the second positive electrode are arranged across the negative electrode. The first positive-electrode mixture layer and the second positive-electrode mixture layer are connected to each other, and of different types. Through-holes are formed in the current collector of the negative electrode arranged between the first positive-electrode mixture layer and the second positive-electrode mixture layer.

摘要翻译： 蓄电装置的正极系统包括第一和第二正极。 第一和第二正极分别包括集流器，第一和第二正极混合物层。 蓄电装置的负极系具有含有集电体和负极混合层的负极。 第一正极和第二正极跨越负极配置。 第一正电极混合层和第二正电极混合层彼此连接，不同类型。 布置在第一正极混合层和第二正极混合层之间的负极集电体上形成通孔。

公开(公告)号：US08524440B2

公开(公告)日：2013-09-03

申请号：US12983729

申请日：2011-01-03

申请人： Yuko Yamashita ,  Nobuo Ando

发明人： Yuko Yamashita ,  Nobuo Ando

IPC分类号： G03F7/26

CPC分类号： G03F7/0045 ,  G03F7/0046 ,  G03F7/0397

摘要： The present invention provides a photoresist composition comprisinga resin which comprises a structural unit represented by the formula (I): wherein Q1 and Q2 independently represent a fluorine atom etc., U represents a C1-C20 divalent hydrocarbon group etc., X1 represents —O—CO— etc., and A+ represents an organic counter ion, and a compound represented by the formula (D′): wherein R51, R52, R53 and R54 independently represent a C1-C20 alkyl group etc., and A11 represents a C1-C36 saturated cyclic hydrocarbon group which may have one or more substituents and which may contain one or more heteroatoms.

摘要翻译： 本发明提供了包含树脂的光致抗蚀剂组合物，其包含式（I）表示的结构单元：其中Q1和Q2独立地表示氟原子等，U表示C1-C20二价烃基等，X 1表示 - O-CO-等，A +表示有机抗衡离子，由式（D'）表示的化合物：其中R51，R52，R53和R54独立地表示C1-C20烷基等，A11表示 可以具有一个或多个取代基且可以含有一个或多个杂原子的C 1 -C 36饱和环烃基。

公开(公告)号：US08476473B2

公开(公告)日：2013-07-02

申请号：US12552085

申请日：2009-09-01

申请人： Ichiki Takemoto ,  Nobuo Ando ,  Mitsuhiro Hata

发明人： Ichiki Takemoto ,  Nobuo Ando ,  Mitsuhiro Hata

IPC分类号： C07C69/63 ,  C07C69/74

CPC分类号： C07C67/08 ,  C07C67/11 ,  C07C69/63 ,  C07C2601/02 ,  C07C2601/04 ,  C07C2601/08 ,  C07C2601/14 ,  C07C2602/42 ,  C07C2603/74 ,  G03F7/0045 ,  G03F7/0392

摘要： A compounds represented by the Formula (I) or the Formula (I′). wherein Z1 and Z2 independently represent a hydrogen atom, a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group, provided that at least one of Z1 and Z2 represent a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group; rings Y1 and Y2 independently represents an optionally substituted C3 to C20 alicyclic hydrocarbon group; Q1 to Q4 and Q′1 to Q′4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; and m and n independently represent an integer of 0 to 5.

摘要翻译： 由式（I）或式（I'）表示的化合物。 其中Z 1和Z 2独立地表示氢原子，C 1至C 12烷基或C 3至C 12环状饱和烃基，条件是Z 1和Z 2中的至少一个表示C 1至C 12烷基或C 3至C 12环状饱和烃 组; 环Y1和Y2独立地表示任选取代的C 3至C 20脂环族烃基; Q1至Q4和Q'1至Q'4独立地表示氟原子或C1至C6全氟烷基; m和n独立地表示0〜5的整数。