公开(公告)号：US08034177B2

公开(公告)日：2011-10-11

申请号：US11660201

申请日：2005-10-17

申请人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，以在塑料容器的内表面上形成阻挡膜，并且设置有气体供给管（101），该气体供给管具有气体流路（101a） 供给与气体供给管（101）的端部螺纹连接的中间气体（G）和绝缘构件（103），与该气体供给管（101）齐平并具有与气体流路（101a）连通的气体出口（102）。

公开(公告)号：US20080017113A1

公开(公告)日：2008-01-24

申请号：US11660201

申请日：2005-10-17

申请人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C16/513

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，在塑料容器的内表面上形成阻挡膜，并且设置有具有气体流路（101a）的气体供给管（101） 供给与气体供给管（101）的端部螺纹连接的中间气体（G）和绝缘部件（103），与该气体流通通路（101a）连通的气体出口（102） 。

公开(公告)号：US08418650B2

公开(公告)日：2013-04-16

申请号：US13229393

申请日：2011-09-09

申请人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，以在塑料容器的内表面上形成阻挡膜，并且设置有气体供给管，该气体供给管具有供给中等气体的气体流路， 绝缘构件螺纹连接到气体供给管的与其齐平的端部并且具有与气体流路连通的气体出口。

公开(公告)号：US20120000771A1

公开(公告)日：2012-01-05

申请号：US13229393

申请日：2011-09-09

申请人： Seiji GOTO ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji GOTO ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C14/34

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，以在塑料容器的内表面上形成阻挡膜，并且设置有气体供给管，该气体供给管具有供给中等气体的气体流路， 绝缘构件螺纹连接到气体供给管的与其齐平的端部并且具有与气体流路连通的气体出口。

公开(公告)号：US20100096393A1

公开(公告)日：2010-04-22

申请号：US12524784

申请日：2007-11-22

申请人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

发明人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

IPC分类号： B65D23/02 ,  B65D25/14 ,  C23C16/50 ,  C23C16/00

CPC分类号： C23C16/503 ,  B65D23/02 ,  B65D25/14 ,  C23C16/045 ,  C23C16/509 ,  H01J37/32348 ,  H01J37/32623 ,  H05H1/24 ,  H05H1/2406 ,  H05H2001/2412

摘要： A barrier-film forming apparatus that forms a barrier film on an inner face of a container (12) having a concave or convex portion (12a) as a processing target, including: a dielectric member (50) having a cavity sized to enclose the container (12), an external electrode (13) covering an outer circumference of the dielectric member (50), an exhaust unit installed on an end face of the external electrode (13) on a side where a mouth (11) of the container (12) is located, with an insulating member (26) interposed therebetween, and depressurizing inside of the container (12) through an exhaust pipe (14), an internal electrode (17) inserted from a side of the exhaust pipe (14) and also serving as a gas blowout unit that blows out medium gas (19) for generating a barrier film into the container (12), and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode (13) and a ground electrode.

摘要翻译： 一种在具有作为加工对象的凹部或凸部（12a）的容器（12）的内面上形成阻挡膜的阻隔膜形成装置，包括：电介质部件（50），其具有被设定为包围 容器（12），覆盖电介质构件（50）的外周的外部电极（13），安装在外部电极（13）的端面上的容器（12）的侧面上的排气单元 （12），其间插入有绝缘构件（26），并且通过排气管（14）向容器（12）的内部减压，从排气管（14）侧插入的内部电极（17） 并且还用作将用于产生阻挡膜的介质气体（19）吹出到容器（12）中的气体吹出单元;以及电场施加单元，其在外部电极（13）之间施加用于产生排气的电场， 和接地电极。

公开(公告)号：US08950356B2

公开(公告)日：2015-02-10

申请号：US12524784

申请日：2007-11-22

申请人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

发明人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

IPC分类号： C23C16/00 ,  H05H1/24 ,  B65D23/02 ,  C23C16/04 ,  C23C16/509 ,  H01J37/32

CPC分类号： C23C16/503 ,  B65D23/02 ,  B65D25/14 ,  C23C16/045 ,  C23C16/509 ,  H01J37/32348 ,  H01J37/32623 ,  H05H1/24 ,  H05H1/2406 ,  H05H2001/2412

摘要： A barrier-film forming apparatus that forms a barrier film on an inner face of a container having a concave or convex portion as a processing target, including: a dielectric member having a cavity sized to enclose the container, an external electrode covering an outer circumference of the dielectric member, an exhaust unit installed on an end face of the external electrode on a side where a mouth of the container is located, with an insulating member interposed therebetween, and depressurizing inside of the container through an exhaust pipe, an internal electrode inserted from a side of the exhaust pipe and also serving as a gas blowout unit that blows out medium gas for generating a barrier film into the container, and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode and a ground electrode.

摘要翻译： 一种阻隔膜形成装置，其在具有凹部或凸部的容器的内表面上形成阻挡膜作为加工对象，所述阻挡膜形成装置包括：电介质构件，其具有用于封闭所述容器的尺寸的空腔，覆盖外周的外部电极 所述绝缘构件安装在所述外部电极的位于所述容器的口侧的端面上的排气单元，其间具有绝缘构件，并且通过排气管对所述容器的内部进行减压，所述内部电极 从排气管的一侧插入并且还用作将用于产生阻挡膜的介质气体吹出到容器中的气体吹出单元，以及电场施加单元，其在外部电极和外部电极之间施加用于产生排气的电场 接地电极。

公开(公告)号：US20090188430A1

公开(公告)日：2009-07-30

申请号：US11883580

申请日：2006-01-24

申请人： Satoshi Matsuda ,  Yuji Asahara ,  Hideo Yamakoshi ,  Seiji Goto

发明人： Satoshi Matsuda ,  Yuji Asahara ,  Hideo Yamakoshi ,  Seiji Goto

IPC分类号： B05C11/00

CPC分类号： H05H1/46 ,  C23C16/26 ,  C23C16/52 ,  H05H2001/4682

摘要： The present invention realizes an impedance control for avoiding the extinction of a plasma caused due to a sudden change in a load impedance, which may occur immediately after the plasma is generated. A film-forming apparatus of the present invention includes a power supply; a matching circuit; an electrode configured to receive electric power from the power supply through the matching circuit, and to generate a plasma inside a film forming chamber for accommodating a film forming target based on the electric power; and a control section configured to control an impedance of the matching circuit. The control section keeps the impedance of the matching circuit constant during a first period starting at a first time t1 when the power supply starts to supply the electric power to the electrode, and controls the impedance of the matching circuit based on a reflected-wave power from the electrode for a second period starting at a second time t2 when the first period ends.

摘要翻译： 本发明实现了一种阻抗控制，用于避免在等离子体产生后立即发生的负载阻抗突然变化引起的等离子体消光。 本发明的成膜装置包括：电源; 匹配电路; 电极，被配置为通过匹配电路从电源接收电力，并且在用于基于电力容纳成膜靶的成膜室内产生等离子体; 以及控制部，被配置为控制所述匹配电路的阻抗。 控制部在电源开始向电极供给电力时，在从第一时刻t1开始的第一期间保持匹配电路的阻抗恒定，并且基于反射波功率来控制匹配电路的阻抗 从第一时段结束时的第二时刻t2开始的第二期间。

公开(公告)号：US08587916B2

公开(公告)日：2013-11-19

申请号：US13420008

申请日：2012-03-14

申请人： Hideo Yamakoshi ,  Yuichiro Kamino ,  Yuji Asahara ,  Yasunori Watanabe ,  Atsuhiro Iyomasa ,  Toru Hashigami ,  Kohei Murakami ,  Tomonori Okumura

发明人： Hideo Yamakoshi ,  Yuichiro Kamino ,  Yuji Asahara ,  Yasunori Watanabe ,  Atsuhiro Iyomasa ,  Toru Hashigami ,  Kohei Murakami ,  Tomonori Okumura

IPC分类号： H05F3/00

CPC分类号： B64D45/02 ,  F16B5/0258 ,  F16B43/001

摘要： A long-life lightning protection fastener or the like to prevent explosion for aircrafts at low cost is provided, the fastener having a light weight, ensuring sufficient lightning protection, and having extremely less failures and high reliability. A ring-shaped ring member 40A made of resin is mounted on a collar 26. This ring member 40A is interposed between a member 22 and the collar 26 and is in intimate contact with both of the member 22 and the collar 26, thereby sealing an interface with the member 22 for sealing and preventing the occurrence of an arc at an outer perimeter edge of the collar 26.

摘要翻译： 提供了一种长寿命防雷紧固件等，以便以低成本防止飞机爆炸，该紧固件具有重量轻，确保足够的防雷保护，并具有极少的故障和高的可靠性。 由树脂制成的环形环构件40A安装在套环26上。该环件40A插入在构件22和套环26之间，并且与构件22和套环26两者紧密接触，从而密封 与构件22接合，用于密封并防止在套环26的外周边缘处发生电弧。

公开(公告)号：US20100269897A1

公开(公告)日：2010-10-28

申请号：US12672868

申请日：2009-01-09

申请人： Satoshi Sakai ,  Yuji Asahara ,  Yasuyuki Kobayashi ,  Masafumi Mori ,  Shigenori Tsuruga ,  Nobuki Yamashita

发明人： Satoshi Sakai ,  Yuji Asahara ,  Yasuyuki Kobayashi ,  Masafumi Mori ,  Shigenori Tsuruga ,  Nobuki Yamashita

IPC分类号： H01L31/0352 ,  H01L31/18 ,  H01L31/0224

CPC分类号： H01L31/1884 ,  H01L31/022425 ,  H01L31/0236 ,  H01L31/02366 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/056 ,  H01L31/076 ,  Y02E10/52 ,  Y02E10/548

摘要： A photovoltaic device that exhibits improved light absorption properties for the electric power generation layer and a process for producing such a photovoltaic device are provided by optimizing the surface shape of the back surface structure. A photovoltaic device 100 comprising a first transparent electrode layer 2, an electric power generation layer 3, a second transparent electrode layer 6 and a back electrode layer 4 provided sequentially on a substrate 1, wherein the back electrode layer 4 comprises a thin film of silver, and the surface of the second transparent electrode layer 6 on the surface of the back electrode layer 4 has a fine uneven texture, for which the surface area magnification ratio relative to the projected surface area is not less than 10% and not more than 32%. Also, a photovoltaic device comprising a first transparent electrode layer 2, an electric power generation layer 3, a second transparent electrode layer 6 and a back electrode layer 4 provided sequentially on a substrate 1, wherein the back electrode layer 4 comprises a thin film of silver, the back electrode layer-side surface of the second transparent electrode layer 6 has a fine uneven texture, and the second transparent electrode layer 6 comprises needle-like crystals.

摘要翻译： 通过优化后表面结构的表面形状，提供了表现出对于发电层的改善的光吸收性能的光电器件和用于制造这种光伏器件的工艺。 光电器件100包括依次设置在基板1上的第一透明电极层2，发电层3，第二透明电极层6和背面电极层4，其中背面电极层4包括银的薄膜 并且背面电极层4的表面上的第二透明电极层6的表面具有微细的凹凸纹理，相对于投影表面积的表面积倍率不小于10％且不大于32 ％。 另外，包括依次设置在基板1上的第一透明电极层2，发电层3，第二透明电极层6和背面电极层4的光电器件，其中背面电极层4包括： 银，第二透明电极层6的背面电极层侧表面具有微细的凹凸纹理，第二透明电极层6包括针状晶体。

公开(公告)号：US20100229935A1

公开(公告)日：2010-09-16

申请号：US12671868

申请日：2009-01-07

申请人： Satoshi Sakai ,  Yuji Asahara ,  Yasuyuki Kobayashi ,  Masafumi Mori ,  Shigenori Tsuruga ,  Nobuki Yamashita

发明人： Satoshi Sakai ,  Yuji Asahara ,  Yasuyuki Kobayashi ,  Masafumi Mori ,  Shigenori Tsuruga ,  Nobuki Yamashita

IPC分类号： H01L31/0224 ,  H01L31/04 ,  H01L31/028

CPC分类号： H01L31/022466 ,  H01L21/02554 ,  H01L21/02573 ,  H01L21/02631 ,  H01L31/022483 ,  H01L31/0236 ,  H01L31/02366 ,  H01L31/0547 ,  H01L31/0687 ,  H01L31/1884 ,  Y02E10/52 ,  Y02E10/544

摘要： The short-circuit current of a photovoltaic device is improved by optimizing the transparent conductive layer. A photovoltaic device comprising a first transparent electrode layer, an electric power generation layer, a second transparent electrode layer and a back electrode layer on a substrate, wherein the film thickness of the second transparent electrode layer is not less than 80 nm and not more than 100 nm, and the light absorptance for the second transparent electrode layer in a wavelength region from not less than 600 nm to not more than 1,000 nm is not more than 1.5%. Also, a photovoltaic device wherein the film thickness of the second transparent electrode layer is not less than 80 nm and not more than 100 nm, and the reflectance for light reflected at the second transparent electrode layer and the back electrode layer is not less than 91% in the wavelength region from not less than 600 nm to not more than 1,000 nm.

摘要翻译： 通过优化透明导电层来改善光伏器件的短路电流。 一种光电器件，包括在基板上的第一透明电极层，发电层，第二透明电极层和背面电极层，其中所述第二透明电极层的膜厚度不小于80nm且不大于 100nm，并且在不小于600nm至不大于1000nm的波长区域中的第二透明电极层的光吸收率不大于1.5％。 此外，第二透明电极层的膜厚为80nm以上且100nm以下的光电转换装置，第二透明电极层和背面电极层的反射率为91以上 在不小于600nm至不大于1000nm的波长区域中的％。