公开(公告)号：US5885365A

公开(公告)日：1999-03-23

申请号：US820387

申请日：1997-03-12

申请人： Shiniti Sugai ,  Kouzou Yokota ,  Tadashi Niwayama ,  Michiaki Oda ,  Shiniti Kon

发明人： Shiniti Sugai ,  Kouzou Yokota ,  Tadashi Niwayama ,  Michiaki Oda ,  Shiniti Kon

IPC分类号： B08B9/08 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00 ,  H01L21/208 ,  B08B3/10 ,  B08B5/00 ,  B08B9/00

CPC分类号： C30B15/10 ,  B08B9/08 ,  C30B35/002

摘要： A method for cleaning and drying crucibles for use in pulling single crystals by the Czochralski method after transportation of the crucibles, includes cleaning a crucible in a cleaning process; warming the crucible with pure water heated at a temperature of at least 50.degree. C.; and drying the warmed crucible under ambient conditions.

摘要翻译： 在坩埚运输之后，通过切克劳斯基（Czochralski）法拉取单晶的坩埚清洗和干燥方法包括在清洗过程中清洁坩埚; 用在至少50℃的温度下加热的纯水加热坩埚。 并在环境条件下干燥加热的坩埚。

公开(公告)号：US5855232A

公开(公告)日：1999-01-05

申请号：US804120

申请日：1997-02-20

申请人： Michiaki Oda ,  Shiniti Sugai ,  Chihiro Tashiro

发明人： Michiaki Oda ,  Shiniti Sugai ,  Chihiro Tashiro

IPC分类号： B01J4/02 ,  B65B1/28 ,  B65B1/32 ,  C30B15/00 ,  C30B29/06 ,  C30B35/00 ,  G01G13/02 ,  G01G13/24 ,  G05D7/00 ,  H01L21/208 ,  B65B1/04 ,  B65B3/04

CPC分类号： G01G13/02 ,  B65B1/28 ,  B65B1/32 ,  G01G13/24

摘要： An automatic metering/supplying apparatus is used for subdividing a granular silicon material. A cone member is placed on the upper opening portion of a drum, which contains the granular silicon material, so as to hold the drum. Subsequently, the drum is turned upside down by a rotary-type drum-inverting machine. Meanwhile, a quartz recharge tube into which the granular silicon material is to be discharged is placed on an electronic scale so as to measure the amount of the silicon material supplied to the quartz recharge tube. A valve control unit opens the valve to start the supply of the silicon material and closes the valve when the measured weight reaches a predetermined weight. Dust produced in the vicinity of the valve is sucked by a dust collection mechanism. The automatic metering/supplying apparatus can automate work for subdividing the granular silicon material contained in the drum. Further, collection of dust maintains the working environment clean.

摘要翻译： 使用自动计量/供给装置来分割颗粒状硅材料。 锥形构件放置在包含粒状硅材料的滚筒的上开口部分上，以便保持滚筒。 随后，通过旋转式滚筒反转机将滚筒上下颠倒。 同时，将要排出颗粒状硅材料的石英再生管放置在电子秤上，以测量供应到石英再生管的硅材料的量。 阀控制单元打开阀门以开始供应硅材料，并且当测量的重量达到预定重量时关闭阀门。 在阀附近产生的灰尘被灰尘收集机构吸入。 自动计量/供给装置可以自动化用于细分包含在滚筒中的颗粒状硅材料的工作。 此外，灰尘的收集保持了工作环境的清洁。