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公开(公告)号：US5494777A
公开(公告)日：1996-02-27
申请号：US229677
申请日：1994-04-19
申请人： Shinji Shiraki , Hidetoshi Miyamoto , Masaaki Inoue , Toshiyuki Ota , Yoshiji Yumoto , Takao Miura
发明人： Shinji Shiraki , Hidetoshi Miyamoto , Masaaki Inoue , Toshiyuki Ota , Yoshiji Yumoto , Takao Miura
CPC分类号： G03F7/038 , G03F7/0045
摘要： A radiation sensitive resin composition which can be suitably used as a negative type resist having a high sensitivity, a high resolution, a high yield of residual film thickness and high thermal resistance, and which comprises (A) an alkali-soluble novolak resin, (B) a phenolic compound having a standard polystyrene-reduced weight average molecular weight of 10,000 or less such as polyvinylphenol, (C) a compound capable of cross-linking the component (A) and/or the component (B) in the presence of an acid, and (D) a radiation sensitive acid generator such as a triazine compound having a halomethyl group.
摘要翻译： 适合用作具有高灵敏度，高分辨率，高残留膜厚度和高耐热性的负型抗蚀剂的辐射敏感性树脂组合物，其包含（A）碱溶性酚醛清漆树脂（ B）具有标准聚苯乙烯换算的重均分子量为10,000以下的酚类化合物，例如聚乙烯基苯酚，（C）能够在（A）成分和/或（B）成分的存在下交联的化合物 酸和（D）辐射敏感性酸产生剂，例如具有卤代甲基的三嗪化合物。
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公开(公告)号：US5580695A
公开(公告)日：1996-12-03
申请号：US339289
申请日：1994-11-10
申请人： Makoto Murata , Takao Miura , Yoshiji Yumoto , Toshiyuki Ota , Eiichi Kobayashi
发明人： Makoto Murata , Takao Miura , Yoshiji Yumoto , Toshiyuki Ota , Eiichi Kobayashi
CPC分类号： G03F7/0045 , Y10S430/118 , Y10S430/121
摘要： A chemically amplified resist comprising an alkali-soluble resin or a resin having at least one acid-dissociable group which is alkali-insoluble or -sprairingly soluble but becomes alkali-soluble upon dissociation of said acid dissociable group due to an acid; a radiation-sensitive, acid-generating agent; and an optional component in which resist, the radiation-sensitive, acid-generating agent generates an acid upon irradiation with a radiation in the irradiated portion and the solubility of the resin component and optional component in a developing solution is varied in the irradiated portion by a chemical reaction caused by the catalytic action of the acid, whereby a pattern is formed, characterized in that a compound having a nitrogen-containing basic group is contained in the resist. Said resist is superior in developability, pattern form, resolution, focus tolerance and yield of residual film thickness, has good process stability, and can be suitably used even in irradiation with, in particular, a radiation having a wavelength equal to or smaller than far ultraviolet rays, for example, an excimer laser or the like.
摘要翻译： 一种化学放大抗蚀剂，其包含碱溶性树脂或具有至少一种酸解离基团的树脂，所述酸解离基团是由于酸而导致的所述酸解离基团的解离时为碱不溶性或易溶性但是变得碱溶性的; 辐射敏感的酸产生剂; 以及任选的组分，其中抗辐射敏感的酸产生剂在照射部分中的辐射照射时产生酸，并且树脂组分和任选组分在显影溶液中的溶解度在照射部分中变化 由酸的催化作用引起的化学反应，由此形成图案，其特征在于在抗蚀剂中含有具有含氮碱性基团的化合物。 所述抗蚀剂的显影性，图案形式，分辨率，聚焦容限和残留膜厚度的产率优异，具有良好的工艺稳定性，并且可以适用于特别是具有等于或小于远的波长的辐射 紫外线，例如准分子激光等。
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公开(公告)号：US5413896A
公开(公告)日：1995-05-09
申请号：US821806
申请日：1992-01-17
申请人： Toru Kajita , Toshiyuki Ota , Yoshiji Yumoto , Takao Miura
发明人： Toru Kajita , Toshiyuki Ota , Yoshiji Yumoto , Takao Miura
CPC分类号： G03F7/0236 , C08G8/24 , G03F7/022
摘要： An i-ray sensitive positive resist composition: which (A) comprises an alkali-soluble novolak resin obtained by subjecting (a) a phenolic mixture of B to 95 mol % of 2,3-xylenol with 95 to 5 mol % of a phenol selected from mono-, di- and tri-methyl phenols other than 2,3-xylenol or (b) a phenolic mixture of 5 to 50 mol % of 8,4-xylenol with 95 to 50 mol % of a phenol selected from mono-, di- and tri-methyl phenols other than 3,4-xylenol to polycondensation together with an aldehyde, and a 1,2-quinonediazide compound, and (B) which has sensitivity to i-ray. There is also provided a method of forming a pattern, which comprises: (1) applying the i-ray sensitive positive resist composition to a wafer to form a photosensitive layer, (2) irradiating the photosensitive layer with i-ray through a predetermined pattern, and (3) developing the pattern with a developer.
摘要翻译： 一种i射线敏感正性抗蚀剂组合物，其中（A）包含通过使（a）B至95mol％的2,3-二甲苯酚的酚类混合物与95至5mol％的苯酚（A）的碱溶性酚醛清漆树脂 选自2,3-二甲苯酚以外的单 - ，二 - 和三 - 甲基苯酚或（b）5-50mol％的8,4-二甲苯酚的酚类混合物和95-50mol％的选自单 - - 除3,4-二异戊烯酚以外的二 - 和三 - 甲基苯酚与醛缩合，和1,2-醌二叠氮化合物，和（B）对i射线具有敏感性。 还提供了形成图案的方法，其包括：（1）将i射线敏感正性抗蚀剂组合物施加到晶片以形成感光层，（2）通过预定图案以i射线照射感光层 ，（3）用开发者开发图案。
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公开(公告)号：US5376498A
公开(公告)日：1994-12-27
申请号：US975713
申请日：1992-11-13
申请人： Toru Kajita , Eiichi Kobayashi , Toshiyuki Ota , Takao Miura
发明人： Toru Kajita , Eiichi Kobayashi , Toshiyuki Ota , Takao Miura
IPC分类号： C07C37/16 , G03F7/004 , G03F7/022 , G03F7/029 , G03F7/038 , G03F7/075 , H01L21/027 , G03C1/52
CPC分类号： G03F7/0755 , C07C37/16 , C07C37/20 , G03F7/0045 , G03F7/0226 , G03F7/038
摘要： A negative type radiation-sensitive resin composition which comprises (A) an alkali-soluble resin, (B) a compound which generates an acid upon irradiation, and (C) an aromatic compound having, as functional groups, an --OR group and a --CH.sub.2 OX group, both directly bonded to the aromatic ring in which R represents a substituted methyl group, a substituted ethyl group, a silyl group, an alkoxycarbonyl group or an acyl group and in which X represents a hydrogen atom, an alkyl group having 1-5 carbon atoms or an R group which is as defined above, said aromatic compound being capable of cross-linking the alkali-soluble resin (A) in the presence of an acid, and optionally (D) a specific phenolic compound. The negative type radiation-sensitive resin composition is excellent in developability, pattern-formation, resolution and thermal durability.
摘要翻译： 一种负型辐射敏感性树脂组合物，其包含（A）碱溶性树脂，（B）照射时产生酸的化合物和（C）具有作为官能团的-OR基团和 -CH 2 X基团，其直接键合到其中R表示取代的甲基，取代的乙基，甲硅烷基，烷氧基羰基或酰基的芳环，其中X表示氢原子，具有1个 -5个碳原子或如上所定义的R基团，所述芳香族化合物能够在酸的存在下交联碱溶性树脂（A），和任选地（D）特定的酚类化合物。 负型辐射敏感性树脂组合物的显影性，图案形成，分辨率和热耐久性优异。
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公开(公告)号：US06727032B1
公开(公告)日：2004-04-27
申请号：US08797620
申请日：1997-02-07
IPC分类号： G03F7039
CPC分类号： C08G61/06 , C08G61/08 , C08L65/00 , G03F7/0045 , G03F7/039 , G03F7/0395 , Y10S430/106
摘要： A radiation-sensitive resin composition including (A) a resin containing an alicyclic skeleton in its backbone, and (B) a radiation-sensitive acid-generating agent, is provided. This composition is excellent in transparency with respect to radiation and dry etching resistance, and can give a photoresist pattern excellent in adhesion to substrates, sensitivity, resolution, and developability.
摘要翻译： 提供了包含（A）在其主链中含有脂环族骨架的树脂和（B）辐射敏感性的酸产生剂的辐射敏感性树脂组合物。 该组合物在耐辐照和耐干蚀刻性方面的透明性优异，并且可以得到对基材的粘附性，灵敏度，分辨率和显影性优异的光致抗蚀剂图案。
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公开(公告)号：US20090308513A1
公开(公告)日：2009-12-17
申请号：US12306063
申请日：2007-07-06
申请人： Toshiyuki Ota
发明人： Toshiyuki Ota
CPC分类号： B60C1/0016 , B60C2011/147 , C08C19/44 , C08K3/04 , C08K3/22 , C08K3/34 , C08K3/36 , C08K7/02 , C08L15/00
摘要： Provide are a rubber composition which enhances a low fuel consumption and a reinforcing property with a filler and maintains an abrasion resistance and a DRY performance and which has an excellent on-ice performance and an excellent WET performance and a pneumatic tire prepared by using the above rubber composition for a tread.The above rubber composition is characterized by comprising (A) a rubber component containing an end-modified conjugated diene base polymer, (B) an inorganic compound powder represented by the following Formula (I) and (C) a filler: M.xSiO2.yH2O (I) (wherein M is at least one oxide or hydroxide of metal selected from Al, Mg, Ti and Ca, and both of x and y are an integer of 0 to 10).
摘要翻译： 提供一种橡胶组合物，其通过填充剂提高低燃料消耗和增强性能，并且保持耐磨性和干燥性能，并且具有优异的冰上性能和优异的WET性能以及使用上述制备的充气轮胎 橡胶组合物用于胎面。 上述橡胶组合物的特征在于包含（A）含有末端改性共轭二烯基聚合物的橡胶组分，（B）由下式（I）表示的无机化合物粉末和（C）填料：M.xSiO 2。 yH 2 O（I）（其中M是选自Al，Mg，Ti和Ca中的金属的至少一种氧化物或氢氧化物，并且x和y均为0至10的整数）。
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公开(公告)号：US06048666A
公开(公告)日：2000-04-11
申请号：US89501
申请日：1998-06-03
申请人： Kazuaki Niwa , Masako Suzuki , Toshiyuki Ota , Hozumi Sato , Hideki Chiba
发明人： Kazuaki Niwa , Masako Suzuki , Toshiyuki Ota , Hozumi Sato , Hideki Chiba
IPC分类号： G03F7/004 , C08L61/10 , C08L61/28 , G03F7/027 , G03F7/032 , G03F7/038 , H05K3/46 , G03F7/16 , G03F7/40
CPC分类号： G03F7/038 , H05K3/4644 , Y10S430/136
摘要： A radiation sensitive resin composition comprising an alkali-soluble resin such as a polyvinyl phenol or a phenol resin other than a polyvinyl phenol having a weight average molecular weight of 2,000 or higher, a cross-linking agent such as an amino resin having two or more active methylol groups in a molecule, a particulate rubbery material comprising a cross-linked polymer chemically modified with an epoxy compound, a liquid rubbery material having a number average molecular weight between 1,000 and 10,000 and a glass transition temperature of -20.degree. C. or lower, and a radiation polymerization initiator. The composition is best suited for use as a material for preparing an insulating layer interposed between two layers of conductive wiring that are arranged in an overlaying stack.
摘要翻译： 一种辐射敏感性树脂组合物，其包含碱溶性树脂如聚乙烯基苯酚或重均分子量为2,000以上的聚乙烯基苯酚以外的酚醛树脂，具有两个以上的氨基树脂的交联剂 分子中的活性羟甲基，包含用环氧化合物化学改性的交联聚合物的颗粒状橡胶状材料，数均分子量为1,000〜10,000，玻璃化转变温度为-20℃的液态橡胶材料，或 较低的和辐射聚合引发剂。 组合物最适合用作制备布置在叠层叠层中的两层导电布线之间的绝缘层的材料。
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8.发明授权Radiation sensitive resin composition containing quinone diazide ester having two hindered phenol groups 失效含有具有两个受阻酚基团的醌二叠氮酯的辐射敏感性树脂组合物
公开(公告)号：US5672459A
公开(公告)日：1997-09-30
申请号：US621008
申请日：1996-03-22
申请人： Katsumi Inomata , Masahiro Akiyama , Toshiyuki Ota , Akira Tsuji
发明人： Katsumi Inomata , Masahiro Akiyama , Toshiyuki Ota , Akira Tsuji
CPC分类号： G03F7/022
摘要： The present invention provides a radiation sensitive resin composition which contains an alkali soluble resin and a 1,2-quinonediazide compound represented by the following formula, for example. ##STR1## The radiation sensitive resin composition of the present invention has an excellent developability, provides an excellent pattern shape, is superior in sensitivity and resolution, and has greatly improved focus latitude and heat resistance in particular. Therefore, the radiation sensitive resin composition of the present invention can be suitably used as a resist for the production of LSIs.
摘要翻译： 本发明提供了含有碱溶性树脂和下式所示的1,2-醌二叠氮化合物的辐射敏感性树脂组合物。 本发明的辐射敏感性树脂组合物具有优异的显影性，提供优异的图案形状，灵敏度和分辨率优异，特别是大大提高了聚焦纬度和耐热性。 因此，本发明的感光性树脂组合物可以适合用作制造LSI的抗蚀剂。
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公开(公告)号：US09644339B2
公开(公告)日：2017-05-09
申请号：US13581833
申请日：2011-03-01
申请人： Minoru Wada , Toshiyuki Ota
发明人： Minoru Wada , Toshiyuki Ota
CPC分类号： E02F3/434 , E02F9/2207 , E02F9/2217
摘要： A damper operation control device of a working vehicle, includes: a boom pivotably supported on a vehicle body; a bucket pivotably supported on a tip end of the boom; a lift cylinder which drives the boom; an accumulator connected to the lift cylinder through a branched oil passage; a switching valve connected to the branched oil passage between the lift cylinder and the accumulator, the switching valve switching between a connected state and a disconnected state between the lift cylinder and the accumulator; and a controller which performs switch control of the switching valve, wherein the controller includes: a state detecting unit which detects whether the bucket is in a loaded state; and a switching valve control unit which switches the switching valve to the connected state when the state detecting unit detects that the bucket is in the loaded state.
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公开(公告)号：US09037358B2
公开(公告)日：2015-05-19
申请号：US13574724
申请日：2011-12-21
申请人： Toshiyuki Ota , Nobuo Matsuyama
发明人： Toshiyuki Ota , Nobuo Matsuyama
CPC分类号： F02D11/105 , E02F9/2066 , F02D41/10 , F02D41/2422 , F02D2200/702
摘要： An engine control device of the wheel loader includes a travelling state detecting unit for detecting a travelling state of the wheel loader, a mode switching determining unit, an acceleration speed detecting unit and a switching time controlling unit. The acceleration speed detecting unit detects the acceleration speed of the wheel loader when the mode switching determining unit determines that it is required to switch between the engine output modes from a low output mode to a high output mode based on a detection result of the travelling state detecting unit. The switching time control unit controls the switching time from start to end of mode switching to be: a first time when the acceleration speed detected by the acceleration speed detecting unit is either 0 or negative; and a second time greater than the first time when the detected acceleration speed is positive.
摘要翻译： 轮式装载机的发动机控制装置包括行驶状态检测单元，用于检测轮式装载机的行驶状态，模式切换判定单元，加速度检测单元和切换时间控制单元。 加速度检测部根据行驶状态的检测结果，在模式切换判定部判定要求从低输出模式到高输出模式的发动机输出模式之间切换时，检测轮式装载机的加速度 检测单元。 开关时间控制单元控制从开始到结束模式切换的切换时间为：由加速度检测单元检测到的加速度为0或者负的第一次; 并且第二次大于检测到的加速度为正的第一次。
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