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公开(公告)号：US5863379A
公开(公告)日：1999-01-26
申请号：US275273
申请日：1994-07-15
CPC分类号： C23C14/547 , G01B11/0683 , Y10T156/10
摘要： A multilayer film forming apparatus including a film forming chamber, a substrate on which a multilayer film is formed, an optical thickness monitoring substrate which controls an optical thickness of each layer of a multilayer film, a monitor exchange system which exchanges the optical thickness monitoring substrate for each layer and a multilayer film monitoring substrate which is disposed under the optical thickness monitoring substrate to observe spectral characteristics of the multilayer film. The invention also includes a light source which irradiates light to the optical thickness monitoring substrate and to the multilayer film monitoring substrate, an optical lens which reshapes the light radiated from the light source, an optical window which lets the light into and out of the film forming chamber, a detector which detects the light quantity reflected from the optical thickness monitoring substrate and a spectral characteristics evaluation device which measures spectral characteristics of the light reflected from the multilayer film monitoring substrate. The multilayer film monitoring substrate is fixed to a holding jig to prevent itself from inclining more than ten minutes against the disposed state.
摘要翻译： 一种多层膜形成装置，包括：成膜室，形成有多层膜的基板;控制多层膜的各层的光学厚度的光学厚度监视基板;交换光学厚度监视基板的监视器交换系统 并且设置在光学厚度监视基板下方以观察多层膜的光谱特性的多层膜监视基板。 本发明还包括将光照射到光学厚度监测基板和多层膜监视基板的光源，重新形成从光源照射的光的光学透镜，使光入射到膜的光学窗口 检测从光学厚度监测基板反射的光量的检测器和测量从多层膜监测基板反射的光的光谱特性的光谱特性评价装置。 多层膜监视基板固定在保持夹具上，以防止自身相对于处置状态倾斜超过十分钟。
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公开(公告)号：US5410411A
公开(公告)日：1995-04-25
申请号：US3807
申请日：1993-01-13
CPC分类号： H01J37/32935 , C23C14/547 , G01B11/0683 , H01J2237/30455 , H01J2237/3132
摘要： A method of and an apparatus for forming a multi-layer film, includes: a thickness control device for controlling an optical film thickness or a thickness of each of the layers of the multi-layer film; a multi-layer film monitoring substrate on which the multi-layer film is formed; a measurement device for measuring the optical characteristics of the multi-layer film formed on the multi-layer film monitoring substrate; and a processing device which processes the results obtained by the measurement device so as to feed the processed results back to the thickness control device.
摘要翻译： 一种用于形成多层膜的方法和装置，包括：用于控制多层膜的每个层的光学膜厚度或厚度的厚度控制装置; 形成有多层膜的多层膜监视基板; 用于测量形成在所述多层膜监视基板上的多层膜的光学特性的测量装置; 以及处理装置，其处理由测量装置获得的结果，以便将处理结果送回厚度控制装置。
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公开(公告)号：US06606442B2
公开(公告)日：2003-08-12
申请号：US09955038
申请日：2001-09-19
IPC分类号： G02B610
CPC分类号： G02B6/30 , G01K5/62 , G01K11/32 , G02B6/1221 , G02B6/4246
摘要： An optical waveguide component has a first optical member in which a predetermined first core pattern groove is formed and a second optical member in which a predetermined second core pattern groove is formed, the first and second optical members being combined together so that said first and second core pattern grooves are opposingly overlapped with each other, and the first and second core pattern grooves being filled with a core material.
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公开(公告)号：US06314228B1
公开(公告)日：2001-11-06
申请号：US09240693
申请日：1999-02-02
IPC分类号： G02B610
CPC分类号： G02B6/30 , G01K5/62 , G01K11/32 , G02B6/1221 , G02B6/4246
摘要： An optical waveguide component has a first optical member in which a predetermined first core pattern groove is formed and a second optical member in which a predetermined second core pattern groove is formed, the first and second optical members being combined together so that said first and second core pattern grooves are opposingly overlapped with each other, and the first and second core pattern grooves being filled with a core material.
摘要翻译： 光波导部件具有形成规定的第一芯图案槽的第一光学部件和形成有规定的第二芯图案槽的第二光学部件，第一和第二光学部件组合在一起，使得所述第一和第二光学部件 芯图案凹槽彼此相对地重叠，并且第一和第二芯图案凹槽被填充有芯材料。
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公开(公告)号：US06692327B1
公开(公告)日：2004-02-17
申请号：US09480415
申请日：2000-01-11
申请人： Masahiro Deguchi , Makoto Kitabatake , Kanji Imai , Tomohiro Sekiguchi , Hideo Kurokawa , Keisuke Koga , Tetsuya Shiratori , Toru Kawase
发明人： Masahiro Deguchi , Makoto Kitabatake , Kanji Imai , Tomohiro Sekiguchi , Hideo Kurokawa , Keisuke Koga , Tetsuya Shiratori , Toru Kawase
IPC分类号： H01J902
CPC分类号： H01J9/025 , H01J1/304 , H01J2201/30446
摘要： An electron emission element includes a substrate, a cathode electrode formed on the substrate, an anode electrode disposed so as to be opposed to the cathode electrode, an electron emission member disposed on the cathode electrode, a control electrode disposed between the cathode electrode and the anode electrode, and an insulating layer. The electron emission member includes a first member having a hole and a second member filling the hole, wherein the second member is more likely to emit electrons than the first member.
摘要翻译： 电子发射元件包括基板，形成在基板上的阴极电极，与阴极相对设置的阳极电极，设置在阴极电极上的电子发射部件，设置在阴极电极和阴极电极之间的控制电极， 阳极电极和绝缘层。 电子发射构件包括具有孔的第一构件和填充孔的第二构件，其中第二构件比第一构件更可能发射电子。
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6.发明授权Heat-plasma-jet generator capable of conducting plasma spray or heat-plasma CVD coating in a relatively wide area 失效在等离子体喷涂中引入等离子体喷涂或热等离子体CVD涂层的热等离子体发生器
公开(公告)号：US5235160A
公开(公告)日：1993-08-10
申请号：US671922
申请日：1991-03-20
申请人： Shigeo Suzuki , Takashi Nojima , Hideo Kurokawa
发明人： Shigeo Suzuki , Takashi Nojima , Hideo Kurokawa
摘要： In a heat-plasma-jet, an arc is initially generated between opposed endless ends of a pair of electrodes and is moved along the opposed endless ends of the electrodes by generating magnetic fields having the same polarity at the opposed ends of the electrodes. Thereafter, a plasma generating gas is supplied into a region in which the arc is generated.
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公开(公告)号：US07023129B1
公开(公告)日：2006-04-04
申请号：US10111264
申请日：2000-10-20
IPC分类号： H01J29/80
CPC分类号： H01J29/073 , H01J2229/0716 , H01J2229/0744
摘要： A cathode ray tube includes an electron gun for emitting at least one electron beam; a mask frame include a mask having a plurality of holes or slits for allowing the electron beam to be transmitted therethrough and a frame to which the mask is attached; and a panel including a phosphor layer to be scanned by the at least one electron beam transmitted through the plurality of holes or slits of the mask. The panel includes a plurality of stud pins for supporting the frame. The frame includes a plurality of elastic supports engaged with the plurality of stud pins. At least one of the plurality of elastic supports includes an engagement portion having an engaging hole which is engaged with one of the plurality of the stud pins and an elastic portion in contact with the one stud pin. Mask frame vibration causes the elastic portion to rub against a respective stud pin so as to generate a frictional force for attenuating the vibration of the mask frame.
摘要翻译： 阴极射线管包括用于发射至少一个电子束的电子枪; 掩模框架包括具有用于允许电子束透过的多个孔或狭缝的掩模和附着有掩模的框架; 以及包括由透过所述掩模的所述多个孔或狭缝的所述至少一个电子束扫描的荧光体层的面板。 面板包括用于支撑框架的多个螺柱销。 框架包括与多个螺柱销接合的多个弹性支撑件。 所述多个弹性支撑体中的至少一个包括具有接合孔的接合部分，所述接合孔与所述多个所述螺柱销中的一个接合，以及与所述一个螺柱销接触的弹性部分。 面罩框架振动使得弹性部分摩擦相应的柱销，从而产生用于衰减面罩框架的振动的摩擦力。
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公开(公告)号：US06827624B2
公开(公告)日：2004-12-07
申请号：US10196032
申请日：2002-07-15
IPC分类号： H01J900
CPC分类号： H01J1/316 , H01J2329/00
摘要： The first basic structure of the electron emission element of the present invention includes at least two electrodes disposed in a horizontal direction at a predetermined interval, and a plurality of electron emission portions made of a particle or an aggregate of the particles dispersively disposed between the electrodes. On the other hand, the second basic structure of the electron emission element of the present invention includes at least two electrodes disposed at a predetermined interval, a conductive layer disposed between the electrodes so as to be electrically connected thereto, and a plurality of electron emission portions made of a particle or an aggregate of the particles dispersively disposed on the surface of the conductive layer between the electrodes. According to these structures, an electron emission element with high stability can be obtained, in which emissions can be emitted efficiently and uniformly even in the absence of a bias voltage (electric field) from outside in an output (emission) direction of the electrons, by utilizing a transverse electric field generated between the electrodes disposed in a horizontal direction at a predetermined interval or an in-plane electric current flowing through the conductive layer disposed between the electrodes.
摘要翻译： 本发明的电子发射元件的第一基本结构包括以预定间隔沿水平方向布置的至少两个电极和由分散地设置在电极之间的颗粒或聚集体的多个电子发射部分 。 另一方面，本发明的电子发射元件的第二基本结构包括以预定间隔设置的至少两个电极，设置在电极之间以与其电连接的导电层和多个电子发射 分散地设置在电极之间的导电层的表面上的由颗粒或聚集体构成的部分。 根据这些结构，可以获得具有高稳定性的电子发射元件，其中即使在电子的输出（发射）方向上没有来自外部的偏置电压（电场）的情况下也可以有效且均匀地发射， 通过利用在预定间隔沿水平方向布置的电极之间产生的横向电场或流过设置在电极之间的导电层的面内电流。
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公开(公告)号：US06400091B1
公开(公告)日：2002-06-04
申请号：US09525546
申请日：2000-03-14
申请人： Masahiro Deguchi , Makoto Kitabatake , Kanji Imai , Tomohiro Sekiguchi , Hideo Kurokawa , Keisuke Koga , Tetsuya Shiratori , Toru Kawase
发明人： Masahiro Deguchi , Makoto Kitabatake , Kanji Imai , Tomohiro Sekiguchi , Hideo Kurokawa , Keisuke Koga , Tetsuya Shiratori , Toru Kawase
IPC分类号： G09G310
CPC分类号： B82Y10/00 , H01J3/021 , H01J2201/30403 , H01J2201/30457 , H01J2201/30469 , Y10S977/742 , Y10S977/842 , Y10S977/901 , Y10S977/939
摘要： An electron emission element of the present invention includes a substrate, a cathode formed on the substrate, an anode opposed to the cathode, an electron emission member disposed on the cathode, and a control electrode disposed between the cathode and the anode. During operation, the electric field intensity immediately above the electron emission member is lower than that between the control electrode and the anode. Alternatively, the spatial average of an electric field intensity between the electron emission member and the control electrode is smaller than that between the control electrode and the anode.
摘要翻译： 本发明的电子发射元件包括基板，形成在基板上的阴极，与阴极相对的阳极，设置在阴极上的电子发射部件，以及设置在阴极和阳极之间的控制电极。 在操作期间，电子发射构件正上方的电场强度低于控制电极和阳极之间的电场强度。 或者，电子发射构件和控制电极之间的电场强度的空间平均值小于控制电极和阳极之间的电场强度的空间平均值。
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公开(公告)号：US5203924A
公开(公告)日：1993-04-20
申请号：US558241
申请日：1990-07-26
申请人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
发明人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
IPC分类号： C23C16/26 , C23C16/452 , C23C16/54 , H01J37/32
CPC分类号： H01J37/32449 , C23C16/26 , C23C16/452 , C23C16/545 , H01J37/32082 , H01J37/32357 , H01J2237/338 , H01J2237/339 , Y10S427/106
摘要： A method of and an apparatus for synthesizing a diamondlike thin film on a substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to at least one of the substrate and an internal electrode provided in the first vacuum vessel.
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