公开(公告)号：US07173363B2

公开(公告)日：2007-02-06

申请号：US11012060

申请日：2004-12-15

申请人： Stefan Gertud Marie Hendriks ,  Thomas Augustus Mattaar ,  Gerardus Jacobus Cornelis Catharina Maria Leenheers

发明人： Stefan Gertud Marie Hendriks ,  Thomas Augustus Mattaar ,  Gerardus Jacobus Cornelis Catharina Maria Leenheers

IPC分类号： H01L41/08

CPC分类号： G03F7/70825 ,  G03F7/70758 ,  H02N2/021

摘要： A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The possible displacement of the object is limited by the maximum shear of the piezo actuators. To increase the possible displacement, the piezo actuators may be controlled to perform a linear shear sequence or a shuffle sequence. During the linear shear sequence, the object is moved; during the shuffle sequence the object is substantially stationary, while the piezo actuators are repositioned with respect to the object, after which the object may be moved further using the linear shear sequence.

摘要翻译： 本文介绍了一种压电致动器系统。 压电致动器系统包括可以延长和剪切的多个压电致动器。 使用延长和剪切，压电致动器系统分别响应于第一和第二控制信号来夹持并移动物体。 物体的可能位移受到压电致动器的最大剪切力的限制。 为了增加可能的位移，可以控制压电致动器以执行线性剪切序列或混洗序列。 在线性剪切序列期间，物体被移动; 在混洗序列期间，物体基本上是静止的，而压电致动器相对于物体重新定位，之后物体可以使用线性剪切序列进一步移动。