摘要:
An apparatus for coating objects having a single microwave source, two or more coating chambers, and an impedance structure or a waveguide structure. The coating chambers are connected to the single microwave source. The impedance structure or waveguide structure divides the microwave energy in order to generate plasmas in the coating chambers.
摘要:
The invention relates to a discharge vessel of a quartz glass for discharge lamps with a diffusion barrier inner layer of silicon oxide, which as a single layer is applied and/or is generated on the inner surface as well as to a method for generating and/or applying such a diffusion barrier inner layer and to the use of such a discharge vessel.