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公开(公告)号:US20110146577A1
公开(公告)日:2011-06-23
申请号:US12975708
申请日:2010-12-22
申请人: SUHAIL ANWAR , John M. White , Soo Young Choi , Gaku Furuta , Shinichi Kurita , Carl Sorenson , Robin L. Tiner
发明人: SUHAIL ANWAR , John M. White , Soo Young Choi , Gaku Furuta , Shinichi Kurita , Carl Sorenson , Robin L. Tiner
IPC分类号: C23C16/455 , C23C16/458 , C23C16/50 , B05B1/14
CPC分类号: C23C16/4585 , C23C16/45565 , C23C16/5096 , H01J37/32174 , H01J37/32449 , H01J37/32541 , H01J37/3255
摘要: Embodiments of the present invention generally relate to a gas distribution showerhead having insulated corner regions to reduce arcing and improve deposition uniformity control. In one embodiment, the gas distribution showerhead is formed of a conductive material with material from the corner regions removed. Corner members formed substantially in the shape of the removed portion of corner regions are attached to the conductive showerhead. The corner members may be made of a material having electrical insulating properties, such as a ceramic or insulating polymer.
摘要翻译: 本发明的实施方案一般涉及具有绝缘拐角区域以减少电弧放电并改善沉积均匀性控制的气体分配喷头。 在一个实施例中,气体分配喷头由导电材料形成,其中去除了角部区域的材料。 基本上形成角部区域的去除部分形状的角部件被附接到导电花洒。 角部件可以由具有电绝缘性的材料制成,例如陶瓷或绝缘聚合物。
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公开(公告)号:USD680946S1
公开(公告)日:2013-04-30
申请号:US29353504
申请日:2010-01-09
申请人: Suhail Anwar , John M. White , Soo Young Choi , Gaku Furuta , Shinichi Kurita , Carl Sorenson , Robin L. Tiner
设计人: Suhail Anwar , John M. White , Soo Young Choi , Gaku Furuta , Shinichi Kurita , Carl Sorenson , Robin L. Tiner
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公开(公告)号:USD669032S1
公开(公告)日:2012-10-16
申请号:US29353503
申请日:2010-01-09
申请人: Suhail Anwar , John M. White , Soo Young Choi , Gaku Furuta , Shinichi Kurita , Carl Sorenson , Robin L. Tiner
设计人: Suhail Anwar , John M. White , Soo Young Choi , Gaku Furuta , Shinichi Kurita , Carl Sorenson , Robin L. Tiner
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公开(公告)号:US20090084863A1
公开(公告)日:2009-04-02
申请号:US12243412
申请日:2008-10-01
申请人: Carl Sorenson
发明人: Carl Sorenson
IPC分类号: E01B5/02
CPC分类号: A63F7/3622 , A63F7/28
摘要: The present invention provide a rail system for transporting spherical objects comprising: a first flexible rail; a second flexible rail; a flexible spine; and a connector attached to said first flexible rail, said second flexible rail, and said flexible spine. The connector allows for the track to be easily adjusted, while providing rigidity to hold the flexible rails and spline into position during use.
摘要翻译: 本发明提供一种用于输送球形物体的轨道系统,包括:第一柔性轨道; 第二个弹性导轨; 灵活的脊椎 以及连接到所述第一柔性导轨,所述第二柔性导轨和所述柔性脊柱的连接器。 连接器允许轨道易于调节,同时提供刚性以在使用期间将柔性轨道和花键保持在适当位置。
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公开(公告)号:US07882788B2
公开(公告)日:2011-02-08
申请号:US12243412
申请日:2008-10-01
申请人: Carl Sorenson
发明人: Carl Sorenson
IPC分类号: A63G1/00
CPC分类号: A63F7/3622 , A63F7/28
摘要: The present invention provide a rail system for transporting spherical objects comprising: a first flexible rail; a second flexible rail; a flexible spine; and a connector attached to said first flexible rail, said second flexible rail, and said flexible spine. The connector allows for the track to be easily adjusted, while providing rigidity to hold the flexible rails and spline into position during use.
摘要翻译: 本发明提供一种用于输送球形物体的轨道系统,包括:第一柔性轨道; 第二个弹性导轨; 灵活的脊椎 以及连接到所述第一柔性导轨,所述第二柔性导轨和所述柔性脊柱的连接器。 连接器允许轨道易于调节,同时提供刚性以在使用期间将柔性轨道和花键保持在适当位置。
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