摘要:
A semiconductor device including a conductive layer, a diffusion barrier layer formed over the conductive layer, including a refractory metal compound, and acquired after a surface treatment, and a metal silicide layer formed over the diffusion barrier layer. The adhesion between a diffusion barrier layer and a metal silicide layer may be improved by increasing the surface energy of the diffusion barrier layer through a surface treatment. Therefore, although the metal silicide layer is fused in a high-temperature process, it is possible to prevent a void from being caused at the interface between the diffusion barrier layer and the metal silicide layer. Moreover, it is possible to increase the adhesion between a conductive layer and the diffusion barrier layer by increasing the surface energy of the conductive layer through the surface treatment.
摘要:
A semiconductor device including a conductive layer, a diffusion barrier layer formed over the conductive layer, including a refractory metal compound, and acquired after a surface treatment, and a metal silicide layer formed over the diffusion barrier layer. The adhesion between a diffusion barrier layer and a metal silicide layer may be improved by increasing the surface energy of the diffusion barrier layer through a surface treatment. Therefore, although the metal silicide layer is fused in a high-temperature process, it is possible to prevent a void from being caused at the interface between the diffusion barrier layer and the metal silicide layer. Moreover, it is possible to increase the adhesion between a conductive layer and the diffusion barrier layer by increasing the surface energy of the conductive layer through the surface treatment.
摘要:
Provided is a battery exchange method for an electric vehicle. The battery exchange method includes (a) opening a protection cover of a battery mounting module installed at an upper portion of the electric vehicle, and transmitting an open signal to a battery charge station; (b) releasing a locking unit of a pre-mounted battery, and transmitting an unlocking signal to the battery charge station; (c) determining and storing a mounting location of the battery using an image sensor; (d) controlling movements and operations of a battery replacing robot when the unlocking signal is confirmed, and ejecting the pre-mounted battery from a battery seating base of the battery mounting module; (e) controlling movements and operations of the battery replacing robot to move a prepared fully charged battery into the battery mounting module, and mounting the fully charged battery on the battery seating base in the battery charge station.
摘要:
A method for forming a fine pattern in a semiconductor device using a quadruple patterning includes forming a first partition layer over a first material layer which is formed over a substrate, performing a photo etch process on the first partition layer to form a first partition pattern, performing an oxidation process to form a first spacer sacrificial layer over a surface of the first partition pattern, forming a second spacer sacrificial layer over the substrate structure, forming a second partition layer filling gaps between the first partition pattern, removing the second spacer sacrificial layer, performing an oxidation process to form a third spacer sacrificial layer over a surface of the second partition layer and define a second partition pattern, forming a third partition pattern filling gaps between the first partition pattern and the second partition pattern, and removing the first and third spacer sacrificial layers.
摘要:
Disclosed is an electric vehicle, a battery charging station, and an electric vehicle battery exchange reservation system including the same. The electric vehicle includes a power level detection unit adapted to detect a power level of a battery mounted on the electric vehicle; a communication unit adapted to communicate with a battery charging station; and a control unit adapted to determine a battery charging station, in which the battery of the electric vehicle is to be exchanged, based on the power level of the battery and a route of travel of the electric vehicle and transmit a battery exchange reservation command to the determined battery charging station. Based on the battery power level of the electric vehicle, a battery charging station existing along the route of travel is requested to provide battery information, and battery exchange is reserved accordingly, so that batteries can be exchanged more efficiently and conveniently.
摘要:
Disclosed is an electric vehicle battery attaching/detaching device including a battery having incision recesses formed on lateral portions, respectively, each incision recess having a lower engaging ledge; a battery mounting unit adapted to detachably mount the battery, the battery mounting unit having grasping holders formed on a bottom portion and adapted to engage with or disengage from the lower engaging ledges of the battery incision recesses; and a controller adapted to rotate the grasping holders in response to an electric signal so that the grasping holders engage with or disengage from the lower engaging ledges of the battery incision recesses.
摘要:
Provided is a battery exchanging type charging station system for an electric vehicle. The battery exchanging type charging station system includes a charging station body formed with a structure in which the electric vehicle freely enters and exits and including a battery loading unit for receiving the battery, a battery replacing robot mounted in the charging station body to perform a battery replacement operation, a charging station control unit to control the battery replacing robot such that the battery replacement operation is performed by controlling the battery replacing robot, an information recognition unit configured to obtain data on an electric vehicle that enters the charging station body and/or data on a type, size, charging state, release date, charging date or the like of the battery, and a charging station control unit that allows a replacement operation of the battery to be performed by controlling the battery replacing robot.
摘要:
Provided is an electric bus battery exchange station. The electric bus battery exchange station according to the present invention includes: an exchange station body having a battery exchange, wherein said battery exchange unit is projected out to be connected with a hole of; an imaging unit taking images of the electric bus moving toward said exchange station body; an entry process storing unit storing entry process information needed in order that the electric bus is positioned exactly below the battery exchange unit; an entry information output unit comparing an entry state of the electric bus obtained from images taken by said imaging unit with the entry information stored, and outputting entry information for modifying the entry state of the electric bus to make equal to said entry process information; and an entry information providing unit providing information outputted by said entry information output unit to the electric bus.
摘要:
A boiler includes a combustion chamber, a heat exchange section, and an outer housing. Coupling holes are formed in the outer housing, a circulation chamber is formed at a lower portion of the outer housing, and a burner is provided at an upper portion of the combustion chamber so as to generate heat in a downward direction thereof. The combustion chamber is vertically installed in one of the coupling holes, and a lower portion of the combustion chamber is communicated with the circulation chamber. The heat exchange section includes first and second heat exchangers and is vertically installed in the outer housing adjacent to the combustion chamber. An upper portion of the heat exchange section is coupled to one of the coupling holes and a lower portion of the heat exchange section is communicated with the circulation chamber.
摘要:
A method for forming a fine pattern in a semiconductor device includes forming a first polymer layer over an etch target layer, the first polymer layer including a carbon-rich polymer layer, forming a second polymer layer over the first polymer layer, the second polymer layer including a silicon-rich polymer layer, patterning the second polymer layer, oxidizing surfaces of the patterned second polymer layer, etching the first polymer layer using the patterned second polymer layer comprising the oxidized surfaces, and etching the etch target layer using the patterned second polymer layer comprising the oxidized surfaces and the etched first polymer layer.