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公开(公告)号：US20220154334A1
公开(公告)日：2022-05-19
申请号：US17541681
申请日：2021-12-03
Inventor： Igor Bargatin , Keivan Davami
IPC: C23C16/455 , C23C16/01 , C23C16/12 , C23C16/50 , H01J37/32
Abstract: A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.
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公开(公告)号：US11198938B2
公开(公告)日：2021-12-14
申请号：US16787733
申请日：2020-02-11
Inventor： Igor Bargatin , Keivan Davami
Abstract: A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.
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公开(公告)号：US20170183772A1
公开(公告)日：2017-06-29
申请号：US15456718
申请日：2017-03-13
Inventor： Igor Bargatin , Keivan Davami
IPC: C23C16/455 , H01J37/32 , C23C16/50
CPC classification number: C23C16/45525 , C23C16/01 , C23C16/12 , C23C16/45555 , C23C16/50 , H01J37/321 , H01J2237/334
Abstract: A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.
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公开(公告)号：US20240344196A1
公开(公告)日：2024-10-17
申请号：US18613241
申请日：2024-03-22
Inventor： Igor Bargatin , Keivan Davami
IPC: C23C16/455 , C23C16/01 , C23C16/12 , C23C16/50 , H01J37/32 , H01L21/3065
CPC classification number: C23C16/45525 , C23C16/01 , C23C16/12 , C23C16/45555 , C23C16/50 , H01J37/321 , H01J2237/334 , H01L21/3065
Abstract: A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.
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公开(公告)号：US11939672B2
公开(公告)日：2024-03-26
申请号：US17541681
申请日：2021-12-03
Inventor： Igor Bargatin , Keivan Davami
IPC: H01L21/3065 , C23C16/01 , C23C16/12 , C23C16/455 , C23C16/50 , H01J37/32
CPC classification number: C23C16/45525 , C23C16/01 , C23C16/12 , C23C16/45555 , C23C16/50 , H01J37/321 , H01J2237/334 , H01L21/3065
Abstract: A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.
