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公开(公告)号：US20150338205A1
公开(公告)日：2015-11-26
申请号：US14441821
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Ming ZHANG , Yu ZHU , Leijie WANG , Jinchun HU , Longmin CHEN , Kaiming YANG , Dengfeng XU , Wensheng YIN , Haihua MU
CPC分类号： G01B11/14 , G01B9/02002 , G01B9/02007 , G01B9/02011 , G01B2290/70 , G01D5/266 , G01D5/38
摘要： A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with a vertical polarization direction and a vertical propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.
摘要翻译： 外差光栅干涉仪的位移测量系统，包括读头，测量光栅和电子信号处理部件。 从激光管发射的激光被准直，通过第一偏振光谱仪，然后发射具有垂直偏振方向和垂直传播方向的两个光束; 两个光束通过两个声光调制器，并分别产生两个不同频率的一级衍射光束，后来分为参考光和测量光; 两个平行参考光束在通过测量信号光电转换单元之后分别形成具有正和负一阶衍射测量光的拍频电信号; 拍频信号被发送到用于信号处理的电子信号处理部件，从而实现两个方向上的线性位移的输出。
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2.发明申请公开(公告)号：US20220196383A1
公开(公告)日：2022-06-23
申请号：US17601179
申请日：2020-04-02
申请人： TSINGHUA UNIVERSITY
发明人： Yu ZHU , Jinchun HU , Rujin HAN , Chang TIAN , Ming ZHANG , Wensheng YIN , Rong CHENG , Dengfeng XU
IPC分类号： G01B9/02015 , G01B11/02
摘要： A high-resolution phase detection method and system based on a plane grating laser interferometer. The method uses a dual-frequency interferometer to measure the displacement, and the measurement signal processing comprises an integral part and a decimal portion, a phase equation set of a displacement measurement signal is constructed according to a measurement optical path principle of a heterodyne plane grating laser interferometer; a non-linear equation set for which the unknowns are instantaneous phase, interval phase and signal amplitude is established; and the equation sets above are solved by using the least squares method, so as to realize phase discrimination, thereby realizing precise displacement measurement. The method can solve the problems in the traditional time measurement-based phase detection technology, such as low measurement accuracy, and failing to satisfy small measuring range measurement. The measurement method can be applied to systems such as precision manufacturing equipment and lithography machine.
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公开(公告)号：US20210033383A1
公开(公告)日：2021-02-04
申请号：US16759294
申请日：2018-10-25
申请人： TSINGHUA UNIVERSITY
发明人： Yu ZHU , Jinchun HU , Shengwu DU , Enyao SHANG , Ming ZHANG , Wensheng YIN , Kaiming YANG , Rong CHENG
摘要： Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved. A problem of difficulty in calibration of the installation error of the multi-axis interferometer in industrial application can be solved without assistance of other displacement sensors with higher precision.
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公开(公告)号：US20170115580A1
公开(公告)日：2017-04-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu ZHU , Ming ZHANG , Fan ZHI , Zhao LIU , Rong CHENG , Kaiming YANG , Li ZHANG , Huichao QIN , Yanpo ZHAO , Li TIAN , Weinan YE , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US20220260452A1
公开(公告)日：2022-08-18
申请号：US17610730
申请日：2020-05-13
发明人： Leijie WANG , Ming ZHANG , Yu ZHU , Jiankun HAO , Xin LI , Rong CHENG , Kaiming YANG , Jinchun HU
摘要： Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame , first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.
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公开(公告)号：US20180170581A1
公开(公告)日：2018-06-21
申请号：US15568581
申请日：2016-03-15
发明人： Ming ZHANG , Yu ZHU , Anlin CHEN , Kaiming YANG , Rong CHENG , Feng LIU , Jinchun HU , Chuxiong HU , Dengfeng XU , Haihua MU
摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
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7.发明申请公开(公告)号：US20170052461A1
公开(公告)日：2017-02-23
申请号：US15307797
申请日：2015-04-17
发明人： Ming ZHANG , Yu ZHU , Fan ZHI , Rong CHENG , Kaiming YANG , Zhao LIU , Li ZHANG , Huichao QIN , Yanpo ZHAO , Li TIAN , Weinan YE , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , G03F7/20 , G03F7/70716 , G03F7/70766 , G03F7/70775
摘要： A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
摘要翻译： 由平面电动机驱动的磁悬浮的粗略运动和精细运动的集成标线片台包括可移动平台（100），平衡块（200），驱动马达，掩模板（101），基座（001），振动 隔离系统（500）和测量系统，其中，隔振系统位于平衡块和基座之间，并且掩模板安装在可移动平台上。 可移动平台的驱动马达是移动式平面马达（300）。 标线台可以降低可移动平台的驱动电机的设计复杂性。 与线性电动机相比，平面电机可以在更多方向上提供推力，减少电机数量，可移动平台的结构更紧凑，提高了可移动平台的固有频率和控制带宽，从而 控制精度提高。
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8.发明申请公开(公告)号：US20160153764A1
公开(公告)日：2016-06-02
申请号：US14900111
申请日：2014-06-05
申请人： TSINGHUA UNIVERSITY
发明人： Yu ZHU , Leijie WANG , Ming ZHANG , Zhao LIU , Rong CHENG , Kaiming YANG , Dengfeng XU , Weinan YE , Li ZHANG , Yanpo ZHAO , Huichao QIN , Li TIAN , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02021 , G01B9/02022 , G01B9/02027 , G01B11/14 , G01B2290/70
摘要： A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing spectroscope, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and even higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, etc., and is capable of improving the overall performances of an ultra-precision stage of a lithography machine as a position measurement system for this stage.
摘要翻译： 三自由度（自由度）外差光栅干涉仪位移测量系统包括双频激光器，光栅干涉仪，测量光栅，接收器和电子信号处理部件; 光栅干涉仪包括偏振光谱仪，参考光栅和折射元件; 测量系统基于光栅衍射，光学多普勒效应和光拍频率原理实现位移测量。 当光栅干涉仪和测量光栅执行三自由度线性相对运动时，系统可以输出三个线性位移。 测量系统可以达到亚纳米，甚至更高的分辨率和精度，并可同时测量三个线性位移。 该测量系统具有环境不敏感，测量精度高，体积小，重量轻等优点，能够提高作为位置测量系统的光刻机的超精密级的整体性能 在这个阶段
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公开(公告)号：US20210262834A1
公开(公告)日：2021-08-26
申请号：US17257173
申请日：2019-06-26
发明人： Ming ZHANG , Yu ZHU , Fuzhong YANG , Leijie WANG , Rong CHENG , Xin LI , Weinan YE , Jinchun HU
摘要： A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles, respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The measurement system is not over-sensitive to the environment, is small and light, and is easy to arrange. Six-degree-of-freedom ultra-precision measurement can be achieved by arranging multiple five-degree-of-freedom interferometry systems and using redundant information, thereby meeting the needs of a lithography machine workpiece table for six-degree-of-freedom position and orientation measurement.
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公开(公告)号：US20210164772A1
公开(公告)日：2021-06-03
申请号：US17257219
申请日：2019-06-26
发明人： Yu ZHU , Ming ZHANG , Leijie WANG , Fuzhong YANG , Rong CHENG , Xin LI , Weinan YE , Jinchun HU
摘要： A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.
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