公开(公告)号：US11307018B2

公开(公告)日：2022-04-19

申请号：US17257219

申请日：2019-06-26

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Fuzhong Yang ,  Rong Cheng ,  Xin Li ,  Weinan Ye ,  Jinchun Hu

IPC分类号： G01B9/02003 ,  G01B9/02015 ,  G01B11/06 ,  G01B9/02

摘要： A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.

公开(公告)号：US20150077032A1

公开(公告)日：2015-03-19

申请号：US14395471

申请日：2013-04-15

申请人： TSINGHUA UNIVERSITY

发明人： Kaiming Yang ,  Yu Zhu ,  Dongdong Yu ,  Rong Cheng ,  Ming Zhang ,  Xin Li ,  Haihua Mu ,  Jinchun Hu ,  Dengfeng Xu ,  Wensheng Yin ,  Guofeng Ji

IPC分类号： G05B19/18

CPC分类号： G05B19/18 ,  G05B2219/41117 ,  H02P25/06

摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods; inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.

摘要翻译： 线性电动机的单自由度隔振装置及其运动控制方法。 防振装置包括平衡块，防漂移驱动单元和控制单元。 平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。 防漂移驱动单元连接到用于控制平衡块的位置的平衡块。 提供两种运动控制方法; 向控制单元输入第二光栅尺信号作为反馈以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。

公开(公告)号：US09904183B2

公开(公告)日：2018-02-27

申请号：US15307752

申请日：2015-04-17

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Yu Zhu ,  Ming Zhang ,  Fan Zhi ,  Zhao Liu ,  Rong Cheng ,  Kaiming Yang ,  Li Zhang ,  Huichao Qin ,  Yanpo Zhao ,  Li Tian ,  Weinan Ye ,  Jin Zhang ,  Wensheng Yin ,  Haihua Mu ,  Jinchun Hu

IPC分类号： G03F7/20

CPC分类号： G03F7/70716 ,  G03F7/70725 ,  G03F7/70733 ,  G03F7/70758 ,  G03F7/70766 ,  G03F7/70775

摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.

公开(公告)号：US09903704B2

公开(公告)日：2018-02-27

申请号：US14900111

申请日：2014-06-05

申请人： TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Leijie Wang ,  Ming Zhang ,  Zhao Liu ,  Rong Cheng ,  Kaiming Yang ,  Dengfeng Xu ,  Weinan Ye ,  Li Zhang ,  Yanpo Zhao ,  Huichao Qin ,  Li Tian ,  Jin Zhang ,  Wensheng Yin ,  Haihua Mu ,  Jinchun Hu

IPC分类号： G01B9/02 ,  G01B11/14

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02021 ,  G01B9/02022 ,  G01B9/02027 ,  G01B11/14 ,  G01B2290/70

摘要： A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing beam splitter, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, and is capable of improving the overall performances of an ultra-precision stage of a lithography machine as a position measurement system for this stage.

公开(公告)号：US09310797B2

公开(公告)日：2016-04-12

申请号：US14395471

申请日：2013-04-15

申请人： TSINGHUA UNIVERSITY

发明人： Kaiming Yang ,  Yu Zhu ,  Dongdong Yu ,  Rong Cheng ,  Ming Zhang ,  Xin Li ,  Haihua Mu ,  Jinchun Hu ,  Dengfeng Xu ,  Wensheng Yin ,  Guofeng Ji

IPC分类号： G05B5/01 ,  G05B11/00 ,  G05B19/18 ,  H02P25/06

CPC分类号： G05B19/18 ,  G05B2219/41117 ,  H02P25/06

摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods: inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.

摘要翻译： 线性电动机的单自由度隔振装置及其运动控制方法。 防振装置包括平衡块，防漂移驱动单元和控制单元。 平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。 防漂移驱动单元连接到用于控制平衡块的位置的平衡块。 提供两种运动控制方法：将第二光栅尺信号输入到控制单元作为反馈，以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。

公开(公告)号：US10597172B2

公开(公告)日：2020-03-24

申请号：US15760540

申请日：2016-07-18

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Yu Zhu ,  Anlin Chen ,  Ming Zhang ,  Kaiming Yang ,  Rong Cheng

IPC分类号： G01C19/30 ,  G01C19/46 ,  B64G1/28 ,  H02K16/04 ,  H02K41/03 ,  H02K16/00 ,  G01C19/24 ,  H02K5/128

摘要： Disclosed is a magnetic-fluid momentum sphere, which is used for satellite attitude adjustment. The magnetic-fluid momentum sphere comprises stators and a spherical shell. The stators are classified into three groups, axes of the three groups of stators are orthogonal to each other, each group comprises two stators arranged symmetrically about the center of the spherical shell, and the inner surfaces of the stators are spherical surfaces. The spherical shell is formed by combining two hemispherical shells, the material of the spherical shell is a non-ferromagnetic material, the inner surfaces of the stators closely adhere to the outer surface of the spherical shell, there is no relative movement between the spherical shell and the inner surfaces of the stators, and the spherical shell is filled with magnetic fluid. The magnetic-fluid momentum sphere achieves a small size and mass, low costs, and small coupling among the axes.

公开(公告)号：US20150362723A1

公开(公告)日：2015-12-17

申请号：US14761605

申请日：2014-01-13

申请人： TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Rong Cheng ,  Kaiming Yang ,  Zhao Liu ,  Jinchun Hu ,  Wensheng Yin ,  Haihua MU ,  Chuxiong Hu ,  Dengfeng Xu

IPC分类号： G02B26/06 ,  G03F7/20

CPC分类号： G02B26/06 ,  G03F7/20 ,  G03F7/70316 ,  G03F7/70408

摘要： An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.

摘要翻译： 用于激光干涉光刻系统的光栅相位调制器由基板，光栅，电动马达和光栅定位器组成。 光栅，电动机和光栅定位器都安装在基板上。 光栅为圆形或矩形，采用透射或反射型光栅。 光束入射到光栅上并产生衍射，并且当电动机驱动光栅相对于入射光束连续移动时，衍射光将产生频移，从而实现光束的相位调制。 光栅相位调制器具有相位调制速度快，调节精度高，调节范围宽等特点，提高了干涉光刻系统的整体性能。

公开(公告)号：US11022423B2

公开(公告)日：2021-06-01

申请号：US16759294

申请日：2018-10-25

申请人： TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Jinchun Hu ,  Shengwu Du ,  Enyao Shang ,  Ming Zhang ,  Wensheng Yin ,  Kaiming Yang ,  Rong Cheng

IPC分类号： G01B9/02 ,  G01B11/02

摘要： Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved. A problem of difficulty in calibration of the installation error of the multi-axis interferometer in industrial application can be solved without assistance of other displacement sensors with higher precision.

公开(公告)号：US10532832B2

公开(公告)日：2020-01-14

申请号：US15568581

申请日：2016-03-15

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Ming Zhang ,  Yu Zhu ,  Anlin Chen ,  Kaiming Yang ,  Rong Cheng ,  Feng Liu ,  Jinchun Hu ,  Chuxiong Hu ,  Dengfeng Xu ,  Haihua Mu

IPC分类号： G01C19/00 ,  B64G1/24 ,  H02N15/00 ,  H02K16/00 ,  G05D1/08

摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.

公开(公告)号：US09995569B2

公开(公告)日：2018-06-12

申请号：US15568118

申请日：2016-03-15

申请人： Tsinghua University ,  Beijing U-Precision Tech Co., Ltd.

发明人： Yu Zhu ,  Ming Zhang ,  Anlin Chen ,  Rong Cheng ,  Kaiming Yang ,  Feng Liu ,  Yujing Song ,  Fan Zhi ,  Jinchun Hu ,  Dengfeng Xu ,  Haihua Mu ,  Chuxiong Hu

IPC分类号： G01B11/14 ,  G01N11/04 ,  G01D5/28 ,  G03F9/00

CPC分类号： G01B11/14 ,  G01B11/002 ,  G01B11/272 ,  G01D5/38 ,  G03F7/70758 ,  G03F7/70775 ,  G03F9/7046

摘要： A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.