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1.发明申请公开(公告)号：US20150362723A1
公开(公告)日：2015-12-17
申请号：US14761605
申请日：2014-01-13
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Rong Cheng , Kaiming Yang , Zhao Liu , Jinchun Hu , Wensheng Yin , Haihua MU , Chuxiong Hu , Dengfeng Xu
CPC分类号： G02B26/06 , G03F7/20 , G03F7/70316 , G03F7/70408
摘要： An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.
摘要翻译： 用于激光干涉光刻系统的光栅相位调制器由基板，光栅，电动马达和光栅定位器组成。 光栅，电动机和光栅定位器都安装在基板上。 光栅为圆形或矩形，采用透射或反射型光栅。 光束入射到光栅上并产生衍射，并且当电动机驱动光栅相对于入射光束连续移动时，衍射光将产生频移，从而实现光束的相位调制。 光栅相位调制器具有相位调制速度快，调节精度高，调节范围宽等特点，提高了干涉光刻系统的整体性能。
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公开(公告)号：US09904183B2
公开(公告)日：2018-02-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu Zhu , Ming Zhang , Fan Zhi , Zhao Liu , Rong Cheng , Kaiming Yang , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US09903704B2
公开(公告)日：2018-02-27
申请号：US14900111
申请日：2014-06-05
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Leijie Wang , Ming Zhang , Zhao Liu , Rong Cheng , Kaiming Yang , Dengfeng Xu , Weinan Ye , Li Zhang , Yanpo Zhao , Huichao Qin , Li Tian , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02021 , G01B9/02022 , G01B9/02027 , G01B11/14 , G01B2290/70
摘要： A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing beam splitter, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, and is capable of improving the overall performances of an ultra-precision stage of a lithography machine as a position measurement system for this stage.
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公开(公告)号：US20150311099A1
公开(公告)日：2015-10-29
申请号：US14651385
申请日：2013-12-06
发明人： Yu Zhu , Ming Zhang , Zhao Liu , Kaiming Yang , Dengfeng Xu , Li Tian , Li Zhang , Huichao Qin , Ping an Wang , Wensheng Yin , Jinchun Hu , Haihua Mu
IPC分类号： H01L21/673
CPC分类号： H01L21/67346
摘要： A silicon wafer platform with anti-collision function comprises a silicon wafer platform body (1) and a cable platform (2). The cable platform (2) is mounted on one side of the silicon wafer platform. The silicon wafer platform comprises three airbags (3), four damping buffer elements (4) and an air source (6), the three airbags (3) being connected in series and respectively secured on the other three sides of the silicon wafer platform by an airbag support (5), two adjacent airbags (3) communicating with a gas pipeline by one damping buffer element (4), and the gas pipeline being secured on the cable platform (2) and communicating with the air source. When two silicon platforms collide, the collision is buffered by the airbags and the silicon wafer platforms are not bounced off.
摘要翻译： 具有防碰撞功能的硅晶片平台包括硅晶片平台主体（1）和电缆平台（2）。 电缆平台（2）安装在硅晶片平台的一侧。 硅晶片平台包括三个安全气囊（3），四个阻尼缓冲元件（4）和空气源（6），三个安全气囊（3）串联连接，并分别固定在硅晶片平台的另外三个侧面上 安全气囊支撑件（5），两个相邻的安全气囊（3），其通过一个阻尼缓冲元件（4）与气体管道连通，并且所述气体管道固定在所述电缆平台（2）上并与所述空气源连通。 当两个硅平台碰撞时，碰撞由气囊缓冲，硅晶片平台不会反弹。
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公开(公告)号：US20150085302A1
公开(公告)日：2015-03-26
申请号：US14396714
申请日：2013-04-10
申请人： TSINGHUA UNIVERSITY
发明人： Ming Zhang , Yu Zhu , Hao Liu , Yi Jiang , Zhao Liu , Kaiming Yang , Jinchun Hu , Dengfeng Xu , Haihua Mu , Wensheng Yin
摘要： A method for measuring displacement of a large-range moving platform, comprising: arranging multiple beams of first measuring light parallel to one another and generated by an optical path distribution device and a position sensitive detector array in a certain manner, to ensure that at least one beam of first measuring light is detected by the position sensitive detector array when a moving platform is at any position of a moving area; a detection head array capable of determining whether a light beam is shaded being used for auxiliary measurement of a position of the moving platform; and determining a position of the moving platform that corresponds to the first measuring light measured by the position sensitive detector array, to calculate displacement of the moving platform. The method effectively enlarges a measurement range of the position sensitive detector array, and implements measurement of long range displacement of the moving platform.
摘要翻译： 一种用于测量大范围移动平台的位移的方法，包括：以一定方式将由光路分布装置和位置敏感检测器阵列彼此平行并且产生的第一测量光的多个光束排列成一定的方式，以确保至少 当移动平台位于移动区域的任何位置时，位置敏感检测器阵列检测到一束第一测量光; 能够确定光束是否被遮蔽的检测头阵列用于辅助测量移动平台的位置; 以及确定与由所述位置敏感检测器阵列测量的所述第一测量光对应的所述移动平台的位置，以计算所述移动平台的位移。 该方法有效地扩大了位置敏感探测器阵列的测量范围，并实现了移动平台的远距离位移测量。
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公开(公告)号：US09869857B2
公开(公告)日：2018-01-16
申请号：US14761605
申请日：2014-01-13
申请人： Tsinghua University
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Rong Cheng , Kaiming Yang , Zhao Liu , Jinchun Hu , Wensheng Yin , Haihua Mu , Chuxiong Hu , Dengfeng Xu
CPC分类号： G02B26/06 , G03F7/20 , G03F7/70316 , G03F7/70408
摘要： An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.
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7.发明授权公开(公告)号：US09791789B2
公开(公告)日：2017-10-17
申请号：US15307797
申请日：2015-04-17
发明人： Ming Zhang , Yu Zhu , Fan Zhi , Rong Cheng , Kaiming Yang , Zhao Liu , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , G03F7/20 , G03F7/70716 , G03F7/70766 , G03F7/70775
摘要： A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US09766054B2
公开(公告)日：2017-09-19
申请号：US14379106
申请日：2013-02-08
发明人： Jinchun Hu , Yu Zhu , Wensheng Yin , Longmin Chen , Kaiming Yang , Ming Zhang , Dengfeng Xu , Haihua Mu , Chuxiong Hu , Zhao Liu
CPC分类号： G01B7/30 , G01D5/2013 , G01M13/00 , G03F7/70758
摘要： A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch τ along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.
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公开(公告)号：US09752643B2
公开(公告)日：2017-09-05
申请号：US14652055
申请日：2013-12-06
发明人： Yu Zhu , Ming Zhang , Zhao Liu , Rong Cheng , Jing Wang , Li Tian , Dengfeng Xu , Kaiming Yang , Jinchun Hu , Wensheng Yin , Haihua Mu , Hao Liu , Chuxiong Hu
IPC分类号： F16F15/067 , G03F7/20
CPC分类号： F16F15/067 , F16F2228/063 , G03F7/70 , G03F7/70716 , G03F7/70816 , G03F7/709
摘要： A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to the bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively. The system reduces the stiffness in vertical direction and prevents the influence of permanent magnet on its surroundings, while improving the bearing capacity.
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公开(公告)号：US09182217B2
公开(公告)日：2015-11-10
申请号：US14396714
申请日：2013-04-10
申请人： TSINGHUA UNIVERSITY
发明人： Ming Zhang , Yu Zhu , Hao Liu , Yi Jiang , Zhao Liu , Kaiming Yang , Jinchun Hu , Dengfeng Xu , Haihua Mu , Wensheng Yin
摘要： A method for measuring displacement of a large-range moving platform, comprising: arranging multiple beams of first measuring light parallel to one another and generated by an optical path distribution device and a position sensitive detector array in a certain manner, to ensure that at least one beam of first measuring light is detected by the position sensitive detector array when a moving platform is at any position of a moving area; a detection head array capable of determining whether a light beam is shaded being used for auxiliary measurement of a position of the moving platform; and determining a position of the moving platform that corresponds to the first measuring light measured by the position sensitive detector array, to calculate displacement of the moving platform. The method effectively enlarges a measurement range of the position sensitive detector array, and implements measurement of long range displacement of the moving platform.
摘要翻译： 一种用于测量大范围移动平台的位移的方法，包括：以一定方式将由光路分布装置和位置敏感检测器阵列彼此平行并且产生的第一测量光的多个光束排列成一定的方式，以确保至少 当移动平台位于移动区域的任何位置时，位置敏感检测器阵列检测到一束第一测量光; 能够确定光束是否被遮蔽的检测头阵列用于辅助测量移动平台的位置; 以及确定与由所述位置敏感检测器阵列测量的所述第一测量光对应的所述移动平台的位置，以计算所述移动平台的位移。 该方法有效地扩大了位置敏感探测器阵列的测量范围，并实现了移动平台的远距离位移测量。
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