公开(公告)号：US5532822A

公开(公告)日：1996-07-02

申请号：US406171

申请日：1995-03-17

申请人： Tadaaki Shinozaki ,  Manabu Toguchi ,  Kunihiro Kawae ,  Kazuo Murano

发明人： Tadaaki Shinozaki ,  Manabu Toguchi ,  Kunihiro Kawae ,  Kazuo Murano

IPC分类号： G01B11/26 ,  G01B21/00 ,  G01B21/22 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G01B9/02

CPC分类号： G03F7/70716

摘要： A method of measuring the orthogonality of a movement coordinate system of a stage unit having a stage which two-dimensionally moves along the movement coordinate system determined by first and second axes that cross each other, by mounting a measurement substrate having at least three measurement patterns on the stage, the at least three measurement patterns including at least two first patterns arranged on a line parallel to a third axis on an array coordinate system determined by the third and fourth axes crossing each other, and at least two second patterns arranged on a line parallel to the fourth axis; aligning the third axis with respect to the first axis of the movement coordinate system; obtaining a difference in an angle between the fourth axis of the array coordinate system and the second axis of the movement coordinate system as a first deviation by detecting the positions of the second patterns on the movement coordinate system in an aligned state; rotating the measurement substrate by 90 degrees from the aligned state and mounting the measurement substrate on the stage; aligning the fourth axis with respect to the first axis of the movement coordinate system; obtaining a difference in an angle between the third axis of the array coordinate system and the second axis of the movement coordinate system as a second deviation by detecting the positions of the first patterns on the movement coordinate system in the aligned state; and obtaining the orthogonality of the movement coordinate system on the basis of the first and second deviations.

摘要翻译： 一种测量具有通过安装具有至少三个测量图案的测量基板沿着彼此交叉的第一和第二轴确定的运动坐标系二维运动的台架的台架单元的运动坐标系的正交性的方法 在舞台上，至少三个测量图案包括布置在由彼此交叉的第三和第四轴确定的阵列坐标系上平行于第三轴线的线上的至少两个第一图案，以及布置在 平行于第四轴线; 相对于移动坐标系的第一轴对准第三轴; 通过在对准状态下检测移动坐标系上的第二图案的位置，获得阵列坐标系的第四轴与移动坐标系的第二轴之间的角度作为第一偏差; 将测量基板从对准状态旋转90度并将测量基板安装在平台上; 使第四轴相对于运动坐标系的第一轴对准; 通过在对准状态下检测移动坐标系上的第一图案的位置，获得阵列坐标系的第三轴与移动坐标系的第二轴之间的角度的差作为第二偏差; 并基于第一和第二偏差获得运动坐标系的正交性。