公开(公告)号：US06848470B2

公开(公告)日：2005-02-01

申请号：US10775104

申请日：2004-02-11

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处以特定延迟时间Deltat达到设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US06820632B2

公开(公告)日：2004-11-23

申请号：US10162552

申请日：2002-06-06

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US06422264B1

公开(公告)日：2002-07-23

申请号：US09734640

申请日：2000-12-13

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

公开(公告)号：US06408879B1

公开(公告)日：2002-06-25

申请号：US09127817

申请日：1998-08-03

申请人： Tadahiro Ohmi ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Keiji Hirao ,  Takashi Hirose ,  Michio Yamaji ,  Kazuhiro Yoshikawa

发明人： Tadahiro Ohmi ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Keiji Hirao ,  Takashi Hirose ,  Michio Yamaji ,  Kazuhiro Yoshikawa

IPC分类号： F16K1100

CPC分类号： F16K27/003 ,  Y10T137/87684

摘要： A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

公开(公告)号：US07673649B2

公开(公告)日：2010-03-09

申请号：US10597303

申请日：2005-01-13

申请人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

发明人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

IPC分类号： B65D81/20

CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

摘要： The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

摘要翻译： 本发明提供一种真空绝热阀，其可以在气体供给系统或排气系统中在高温下使用，并且由于其绝热性能优异，也可以制成大小小型的真空绝热阀。 使用包括阀体和致动器的阀的真空隔热阀和容纳阀的真空保温箱，上述真空保温箱S由方形的下部真空夹套S5形成， 圆筒形真空绝热管接收部分J的侧面并且其上表面打开，方形的上部真空夹套S4气密地装配到下部真空套筒S5上并且其下表面打开。

公开(公告)号：US20090032115A1

公开(公告)日：2009-02-05

申请号：US10597303

申请日：2005-01-13

申请人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

发明人： Tadahiro Ohmi ,  Yukio Minami ,  Kenji Tubota ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Koji Kawada ,  Toshio Nariai

IPC分类号： F16K51/02 ,  F16K27/00

CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

摘要： The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

摘要翻译： 本发明提供一种真空绝热阀，其可以在气体供给系统或排气系统中在高温下使用，并且由于其绝热性能优异，也可以制成大小小型的真空绝热阀。 使用包括阀体和致动器的阀的真空隔热阀和容纳阀的真空保温箱，上述真空保温箱S由方形的下部真空夹套S5形成， 圆筒形真空绝热管接收部分J的侧面并且其上表面打开，方形的上部真空夹套S4气密地装配到下部真空套筒S5上并且其下表面打开。

公开(公告)号：US20060174977A1

公开(公告)日：2006-08-10

申请号：US10646855

申请日：2003-08-21

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

IPC分类号： C23C22/24 ,  C23C8/80

CPC分类号： C23C8/02 ,  C23C26/00 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/31678

摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm

摘要翻译： 本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。 能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。 本发明包括以下步骤：在涂覆表面的表面粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬之后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜

公开(公告)号：US08137787B1

公开(公告)日：2012-03-20

申请号：US09889269

申请日：2000-01-13

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

IPC分类号： B32B15/04 ,  B32B9/00 ,  B32B19/00

CPC分类号： C23C8/02 ,  C23C26/00 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/31678

摘要： The object of the present invention is to form a chromium-oxide film, excellent in corrosion resistance, without containing an oxide film of other metal onto the metallic material. The chromium-oxide passivation film, excellent in corrosion resistance, without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for safely supplying fluid with hard corrosivity is able to be provided. One step of forming the passivation film consisting of a chromium oxide layer by giving heat treatment, in an oxidizing atmosphere, after coating chromium on the metallic material having a surface roughness (Ra) not more than 1.5 μm.

摘要翻译： 本发明的目的是形成耐腐蚀性优异的氧化铬膜，而不含金属材料上的其它金属的氧化膜。 可以廉价且短时间地形成不含有其它金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供用于安全地供给具有硬腐蚀性的流体的流体供给系统。 在表面粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬后，在氧化气氛中进行热处理，形成由氧化铬层构成的钝化膜的一个步骤。

公开(公告)号：US07935385B2

公开(公告)日：2011-05-03

申请号：US10646855

申请日：2003-08-21

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

IPC分类号： B05D3/02 ,  B05D3/04 ,  C25D5/50

CPC分类号： C23C8/02 ,  C23C26/00 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/31678

摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm

摘要翻译： 本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。 能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。 本发明包括以下步骤：在涂覆表面的粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜

公开(公告)号：US20080003441A1

公开(公告)日：2008-01-03

申请号：US11878976

申请日：2007-07-30

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

IPC分类号： B32B15/04

CPC分类号： C23C8/02 ,  C23C26/00 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/31678

摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm

摘要翻译： 本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。 能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。 本发明包括以下步骤：在涂覆表面的表面粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬之后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜