MULTILAYER DEVICE AND METHOD OF MAKING
    4.
    发明申请
    MULTILAYER DEVICE AND METHOD OF MAKING 有权
    多层设备及其制造方法

    公开(公告)号:US20070069233A1

    公开(公告)日:2007-03-29

    申请号:US11420366

    申请日:2006-05-25

    IPC分类号: H01L33/00

    摘要: The invention relates to composite articles comprising a substrate and additional layers on the substrate. According to one example, the layers are selected so that the difference in the coefficient of thermal expansion (CTE) between the substrate and a first layer on one side of the substrate is substantially equal to the CTE difference between the substrate and a second layer on the other side of the substrate. The stress caused by the CTE difference and/or shrinkage on one side of the substrate during heating or cooling is balanced by the stress caused by the CTE difference on the other side of the substrate during heating or cooling. Such stress balancing can reduce or minimize curling of the substrate.

    摘要翻译: 本发明涉及包含基底和在基底上的附加层的复合制品。 根据一个示例,选择这些层,使得衬底与衬底的一侧上的第一层之间的热膨胀系数(CTE)的差异基本上等于衬底和第二层之间的CTE差 衬底的另一面。 在加热或冷却期间由基板的一侧的CTE差异和/或收缩引起的应力由加热或冷却期间基板另一侧的CTE差异引起的应力平衡。 这种应力平衡可以减少或最小化衬底的卷曲。

    Multilayer device and method of making
    5.
    发明申请
    Multilayer device and method of making 有权
    多层设备及其制作方法

    公开(公告)号:US20050133781A1

    公开(公告)日:2005-06-23

    申请号:US10739298

    申请日:2003-12-19

    摘要: The invention relates to composite articles comprising a substrate and additional layers on the substrate. According to one example, the layers are selected so that the difference in the coefficient of thermal expansion (CTE) between the substrate and a first layer on one side of the substrate is substantially equal to the CTE difference between the substrate and a second layer on the other side of the substrate. The stress caused by the CTE difference and/or shrinkage on one side of the substrate during heating or cooling is balanced by the stress caused by the CTE difference on the other side of the substrate during heating or cooling. Such stress balancing can reduce or minimize curling of the substrate.

    摘要翻译: 本发明涉及包含基底和在基底上的附加层的复合制品。 根据一个示例,选择这些层,使得衬底与衬底的一侧上的第一层之间的热膨胀系数(CTE)的差异基本上等于衬底和第二层之间的CTE差 衬底的另一面。 在加热或冷却期间由基板的一侧的CTE差异和/或收缩引起的应力由加热或冷却期间基板另一侧的CTE差异引起的应力平衡。 这种应力平衡可以减少或最小化衬底的卷曲。