公开(公告)号：US07926910B2

公开(公告)日：2011-04-19

申请号：US11764844

申请日：2007-06-19

申请人： Tae-woon Cha ,  Young-nam Kwon ,  Jae-chang Lee

发明人： Tae-woon Cha ,  Young-nam Kwon ,  Jae-chang Lee

IPC分类号： B41J2/135

CPC分类号： B41J2/1606 ,  B41J2/162 ,  B41J2/164

摘要： A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.

摘要翻译： 用于喷墨头的喷嘴板和喷嘴板的制造方法包括具有喷嘴的硅基板，形成在硅基板的外表面上的热氧化硅层和喷嘴的内壁，粘合层沉积在 形成在硅衬底的外表面上并由氧化硅形成的热氧化硅层和沉积在粘合层上的拒墨涂层。

公开(公告)号：US07922289B2

公开(公告)日：2011-04-12

申请号：US12041018

申请日：2008-03-03

申请人： Jae-chang Lee ,  Tae-kyung Lee ,  Tae-woon Cha

发明人： Jae-chang Lee ,  Tae-kyung Lee ,  Tae-woon Cha

IPC分类号： B41J2/14

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J2/162 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631

摘要： Provided are a nozzle plate of an inkjet printhead and a method of manufacturing the same. The nozzle plate includes: a substrate including a plurality of nozzles; and a plurality of first grooves formed on the surface of a substrate around the nozzles. In this structure, ink remaining on the surface of the nozzle plate can be efficiently removed.

摘要翻译： 提供一种喷墨打印头的喷嘴板及其制造方法。 喷嘴板包括：包括多个喷嘴的基板; 以及形成在所述喷嘴周围的基板的表面上的多个第一凹槽。 在这种结构中，可以有效地去除留在喷嘴板表面上的油墨。

公开(公告)号：US07909438B2

公开(公告)日：2011-03-22

申请号：US11775424

申请日：2007-07-10

申请人： Tae-kyung Lee ,  Sang-kwon Wee ,  Jae-woo Chung ,  Tae-woon Cha ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Sang-kwon Wee ,  Jae-woo Chung ,  Tae-woon Cha ,  Jae-chang Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/1433 ,  B41J2002/14475

摘要： A piezoelectric type inkjet printhead includes an upper substrate including a pressure chamber to be filled with ink that is to be ejected, a reservoir to store ink that flowed in from an ink container, a restrictor connect the reservoir to one end of the pressure chamber, an intermediate substrate comprising a damper formed on a portion of the intermediate substrate, which corresponds to other end of the pressure chamber, a lower substrate comprising a nozzle to eject ink and formed in a portion of the lower substrate, which corresponds to the damper, a hydrophobic layer formed on a bottom of the lower substrate, and a piezoelectric actuator formed on the upper substrate to supply driving power to eject ink to the pressure chamber, wherein the nozzle is formed in the lower substrate at a predetermined depth from a bottom surface of the lower substrate.

摘要翻译： 压电型喷墨打印头包括：上部基板，其包括要填充要喷射的墨的压力室;存储器，用于存储从墨水容器流入的墨水;限制器将储存器连接到压力室的一端; 中间基板，包括形成在所述中间基板的与所述压力室的另一端相对应的部分上的阻尼器，下部基板，包括用于喷射墨水并形成在所述下部基板的对应于所述阻尼器的部分中的喷嘴， 形成在所述下基板的底部上的疏水层，以及形成在所述上基板上以提供驱动力以将油墨喷射到所述压力室的压电致动器，其中所述喷嘴形成在所述下基板中， 的下基板。

公开(公告)号：US20080129799A1

公开(公告)日：2008-06-05

申请号：US11775424

申请日：2007-07-10

申请人： Tae-kyung Lee ,  Sang-kwon Wee ,  Jae-woo Chung ,  Tae-woon Cha ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Sang-kwon Wee ,  Jae-woo Chung ,  Tae-woon Cha ,  Jae-chang Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/1433 ,  B41J2002/14475

摘要： A piezoelectric type inkjet printhead includes an upper substrate including a pressure chamber to be filled with ink that is to be ejected, a reservoir to store ink that flowed in from an ink container, a restrictor connect the reservoir to one end of the pressure chamber, an intermediate substrate comprising a damper formed on a portion of the intermediate substrate, which corresponds to other end of the pressure chamber, a lower substrate comprising a nozzle to eject ink and formed in a portion of the lower substrate, which corresponds to the damper, a hydrophobic layer formed on a bottom of the lower substrate, and a piezoelectric actuator formed on the upper substrate to supply driving power to eject ink to the pressure chamber, wherein the nozzle is formed in the lower substrate at a predetermined depth from a bottom surface of the lower substrate.

摘要翻译： 压电型喷墨打印头包括：上部基板，其包括要填充要喷射的墨的压力室;存储器，用于存储从墨水容器流入的墨水;限制器将储存器连接到压力室的一端; 中间基板，包括形成在所述中间基板的与所述压力室的另一端相对应的部分上的阻尼器，下部基板，包括用于喷射墨水并形成在所述下部基板的对应于所述阻尼器的部分中的喷嘴， 形成在所述下基板的底部上的疏水层，以及形成在所述上基板上以提供驱动力以将油墨喷射到所述压力室的压电致动器，其中所述喷嘴形成在所述下基板中， 的下基板。

公开(公告)号：US07703895B2

公开(公告)日：2010-04-27

申请号：US11333540

申请日：2006-01-18

申请人： Jae-chang Lee ,  Jae-woo Chung ,  Sung-gyu Kang

发明人： Jae-chang Lee ,  Jae-woo Chung ,  Sung-gyu Kang

IPC分类号： B41J2/045

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1637 ,  B41J2002/14306 ,  B41J2002/14411 ,  B41J2002/14419

摘要： A piezoelectric inkjet printhead including an upper substrate, having an ink inlet, a manifold connected with the ink inlet, and a plurality of pressure chambers arranged along at least one side of the manifold, wherein the ink inlet passes through the upper substrate, and the manifold and the pressure chambers are formed in a lower surface of the upper substrate, a lower substrate disposed directly adjacent the upper substrate, the lower substrate having a plurality of restrictors each connecting the manifold with one end of each of the pressure chambers, and a plurality of nozzles each being formed in a position of the lower substrate that corresponds to the other end of each of the pressure chambers to vertically pass through the lower substrate, wherein the plurality of restrictors are formed in an upper surface of the lower substrate, and a plurality of piezoelectric actuators.

摘要翻译： 一种压电喷墨打印头，包括具有墨入口，与墨入口连接的歧管的上基板和沿着歧管的至少一侧布置的多个压力室，其中墨入口穿过上基板， 歧管和压力室形成在上基板的下表面中，下基板直接邻近上基板设置，下基板具有多个限制器，每个限制器将歧管与每个压力室的一端连接，并且 多个喷嘴各自形成在下基板的对应于每个压力室的另一端的位置以垂直地穿过下基板，其中多个限制器形成在下基板的上表面中，以及 多个压电致动器。

公开(公告)号：US20070195134A1

公开(公告)日：2007-08-23

申请号：US11581333

申请日：2006-10-17

申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

公开(公告)号：US20070134928A1

公开(公告)日：2007-06-14

申请号：US11505416

申请日：2006-08-17

申请人： Jae-chang Lee ,  Chang-seung Lee ,  Jae-woo Chung ,  Duck-su Kim ,  Kyo-yeol Lee

发明人： Jae-chang Lee ,  Chang-seung Lee ,  Jae-woo Chung ,  Duck-su Kim ,  Kyo-yeol Lee

IPC分类号： H01L21/302

CPC分类号： B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2002/14411

摘要： A silicon wet etching method to form at least two elements having different shapes in a silicon substrate using at least two wet etching processes includes forming a first etch mask made of parylene on a surface of the silicon substrate, forming a first element in the substrate by wet etching the silicon substrate for a first time using the first etch mask, forming a second etch mask made of a silicon oxide layer on the surface of the silicon substrate, and forming a second element by wet etching the silicon substrate for a second time using the second etch mask.

摘要翻译： 使用至少两个湿蚀刻工艺在硅衬底中形成具有不同形状的至少两种元件的硅湿式蚀刻方法包括在硅衬底的表面上形成由聚对二甲苯制成的第一蚀刻掩模，在衬底中形成第一元件，通过 使用第一蚀刻掩模第一次湿蚀刻硅衬底，在硅衬底的表面上形成由氧化硅层制成的第二蚀刻掩模，并且通过湿法蚀刻硅衬底第二次来形成第二元件，第二次使用 第二蚀刻掩模。

公开(公告)号：US20060150408A1

公开(公告)日：2006-07-13

申请号：US11327367

申请日：2006-01-09

申请人： Seung-gyu Kang ,  Jae-woo Chung ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Seung-gyu Kang ,  Jae-woo Chung ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： B21D53/76

CPC分类号： B41J2/1642 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  Y10T29/49401

摘要： A method of forming nozzles in an inkjet printhead including forming ink inlets in a first surface of a substrate, polishing a second surface of the substrate after the forming of the ink inlets, and forming ink outlets in the second surface of the substrate after the polishing of the second surface, the ink outlets communicating with the ink inlets.

摘要翻译： 一种在喷墨打印头中形成喷嘴的方法，包括在基板的第一表面中形成墨入口，在形成墨入口之后抛光基板的第二表面，以及在抛光之后在基板的第二表面中形成墨出口 的墨水出口与墨水入口连通。

公开(公告)号：US08813363B2

公开(公告)日：2014-08-26

申请号：US12722843

申请日：2010-03-12

申请人： Jae-chang Lee ,  Jae-woo Chung ,  Kyo-yool Lee ,  Chang-seung Lee ,  Sung-gyu Kang

发明人： Jae-chang Lee ,  Jae-woo Chung ,  Kyo-yool Lee ,  Chang-seung Lee ,  Sung-gyu Kang

IPC分类号： B21D53/76 ,  B23P17/00 ,  H01L41/22 ,  H04R17/00 ,  H01L41/00

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a piezoelectric inkjet printhead includes processing a lower silicon-on-insulator substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer, processing the lower silicon-on-insulator substrate by etching the second silicon layer to form a manifold, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, and a plurality of dampers connected with the pressure chambers, and by etching the first silicon layer and the intervening oxide layer to form a plurality of vertical nozzles through the first silicon layer and the intervening oxide layer to corresponding ones of the plurality of dampers, stacking and bonding an upper substrate on the lower substrate, reducing the upper substrate to a predetermined thickness, and forming a piezoelectric actuator on the upper substrate.

摘要翻译： 一种制造压电喷墨打印头的方法包括：通过第一硅层，中间氧化物层和第二硅层处理具有顺序层叠结构的下硅绝缘体上基板，通过以下方式处理下硅绝缘体上基板： 蚀刻所述第二硅层以形成歧管，沿所述歧管的至少一侧布置并与所述歧管连接的多个压力室以及与所述压力室连接的多个阻尼器，并且通过蚀刻所述第一硅层和所述第二硅层 形成多个垂直喷嘴，通过第一硅层和中间氧化物层到多个阻尼器中的相应的阻尼器，堆叠并结合下基板上的上基板，将上基板还原成预定厚度;以及 在上基板上形成压电致动器。

公开(公告)号：US20100319195A1

公开(公告)日：2010-12-23

申请号：US12852613

申请日：2010-08-09

申请人： Jong-beom Kim ,  Jae-chang Lee

发明人： Jong-beom Kim ,  Jae-chang Lee

IPC分类号： B23P17/00

CPC分类号： B41J2/1628 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/49401

摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.

摘要翻译： 提供一种压电喷墨打印头及其制造方法。 压电喷墨打印头包括第一和第二单晶硅衬底。 墨流路设置在第一基板的第一表面中。 墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴 用于喷墨。 第二基板结合到第一基板，从而完成油墨流动路径。 多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。 在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。