公开(公告)号：US07768178B2

公开(公告)日：2010-08-03

申请号：US12178761

申请日：2008-07-24

申请人： Takamichi Fujii ,  Tsuyoshi Mita ,  Yoshikazu Hishinuma

发明人： Takamichi Fujii ,  Tsuyoshi Mita ,  Yoshikazu Hishinuma

IPC分类号： H01L41/04 ,  B41J2/45

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1646 ,  H01L41/0805 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

摘要： In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.

摘要翻译： 在压电元件中，在形成于基板表面的第一电极上依次形成第一电极，第一压电膜，第二压电膜和第二电极，中间电极设置在第一和第二电极之间 第二压电薄膜。 第一和第二压电膜中的每一个具有10微米或更小的厚度，并且具有面向基板的第一表面和与第一表面相对的第二表面。 第一表面和第二表面中的至少一个具有0.5微米或更小的算术平均表面粗糙度（Ra）。

公开(公告)号：US20090026887A1

公开(公告)日：2009-01-29

申请号：US12178761

申请日：2008-07-24

申请人： Takamichi Fujii ,  Tsuyoshi Mita ,  Yoshikazu Hishinuma

发明人： Takamichi Fujii ,  Tsuyoshi Mita ,  Yoshikazu Hishinuma

IPC分类号： H02N2/04 ,  H01L41/047

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1646 ,  H01L41/0805 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

摘要： In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.

摘要翻译： 在压电元件中，在形成于基板表面的第一电极上依次形成第一电极，第一压电膜，第二压电膜和第二电极，中间电极设置在第一和第二电极之间 第二压电薄膜。 第一和第二压电膜中的每一个具有10微米或更小的厚度，并且具有面向基板的第一表面和与第一表面相对的第二表面。 第一表面和第二表面中的至少一个具有0.5微米或更小的算术平均表面粗糙度（Ra）。

公开(公告)号：US07958608B2

公开(公告)日：2011-06-14

申请号：US12206518

申请日：2008-09-08

申请人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

发明人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

IPC分类号： H04R17/10 ,  H01L21/302

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/49156

摘要： The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The ink-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.

摘要翻译： 压电元件包括​​基板，形成在基板上的第一电极，形成在第一电极上的压电膜和形成在压电膜的第二侧上的第二电极，该第二电极远离形成第一电极的第一侧。 第一电极由与基板接触的第一层和与压电膜接触的第二层构成。 第一层由与衬底不同的速率进行湿蚀刻的材料形成。 喷墨头包括压电装置，用于通过墨水口喷射墨滴并设置在压电装置上的液滴存储/排出构件和响应于压电装置的膨胀或收缩而振动的隔膜， 压电装置和液滴存储/排出构件。

公开(公告)号：US20090066763A1

公开(公告)日：2009-03-12

申请号：US12206518

申请日：2008-09-08

申请人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

发明人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

IPC分类号： B41J2/045 ,  H01L41/00

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/49156

摘要： The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The in %-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.

摘要翻译： 压电元件包括​​基板，形成在基板上的第一电极，形成在第一电极上的压电膜和形成在压电膜的第二侧上的第二电极，该第二电极远离形成第一电极的第一侧。 第一电极由与基板接触的第一层和与压电膜接触的第二层构成。 第一层由与衬底不同的速率进行湿蚀刻的材料形成。 in-jet头包括压电装置，用于通过墨水口喷射墨滴并设置在压电装置上的液滴存储/排出构件和用于响应于压电装置的膨胀或收缩振动的隔膜，并且设置在 压电装置和液滴存储/排出构件。

公开(公告)号：US08104155B2

公开(公告)日：2012-01-31

申请号：US12413019

申请日：2009-03-27

申请人： Tsuyoshi Mita

发明人： Tsuyoshi Mita

IPC分类号： H04R17/10

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/14266 ,  B41J2002/14411 ,  B41J2202/21 ,  H01L41/0973 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49155

摘要： The method of manufacturing a piezoelectric actuator, includes the steps of: forming a lower electrode film on an insulating substrate; forming a piezoelectric film on the lower electrode film; forming a slit on the piezoelectric film to expose a portion of the lower electrode film on an upper surface side of the piezoelectric film; forming an insulating layer which covers a portion of the piezoelectric film; forming an upper electrode film so as to span the insulating layer and the piezoelectric film; forming, on the piezoelectric film, a lower wire in connection with the portion of the lower electrode film exposed through the slit; depositing a first metal film on the lower wire and thereby making a film thickness of the lower wire greater than a film thickness of the lower electrode film; and depositing a second metal film on a portion of the upper electrode film on the insulating layer and thereby making a film thickness of the portion of the upper electrode film on the insulating layer greater than a film thickness of a portion of the upper electrode film that has been deposited directly on the piezoelectric film.

摘要翻译： 制造压电致动器的方法包括以下步骤：在绝缘基板上形成下电极膜; 在下电极膜上形成压电膜; 在所述压电膜上形成狭缝以在所述压电膜的上表面侧露出所述下电极膜的一部分; 形成覆盖所述压电膜的一部分的绝缘层; 形成上电极膜以跨越绝缘层和压电膜; 在压电膜上形成与通过狭缝暴露的下电极膜的部分相连的下导线; 在下导线上沉积第一金属膜，从而使下导线的膜厚大于下电极膜的膜厚; 以及在所述绝缘层上的所述上部电极膜的一部分上沉积第二金属膜，从而使得所述绝缘层上的所述上部电极膜的所述部分的膜厚度大于所述上部电极膜的一部分的膜厚度， 已直接沉积在压电薄膜上。

公开(公告)号：US07882636B2

公开(公告)日：2011-02-08

申请号：US12490145

申请日：2009-06-23

申请人： Tsuyoshi Mita ,  Kazuo Sanada

发明人： Tsuyoshi Mita ,  Kazuo Sanada

IPC分类号： B21D53/76

CPC分类号： B41J2/1634 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14459 ,  Y10T29/42 ,  Y10T29/49401

摘要： An inkjet head, comprising: a pressure chamber which are arranged two-dimensionally, and deformed by pressure generating unit and discharging ink from nozzles communicated with the pressure chamber; and a piezoelectric element which is included in the pressure generating unit, said piezoelectric element including a thin film piezoelectric element formed by means of a thin film forming technique.

摘要翻译： 一种喷墨头，包括：压力室，其二维布置，并由压力产生单元变形并从与所述压力室连通的喷嘴排出墨; 以及包括在所述压力发生单元中的压电元件，所述压电元件包括​​通过薄膜形成技术形成的薄膜压电元件。

公开(公告)号：US07665831B2

公开(公告)日：2010-02-23

申请号：US10950419

申请日：2004-09-28

申请人： Tsuyoshi Mita

发明人： Tsuyoshi Mita

IPC分类号： B41J2/45 ,  B41J29/38

CPC分类号： B41J2/14233 ,  B41J2002/14459 ,  B41J2002/14491

摘要： The image forming apparatus in which a plurality of ink chambers filled with ink are aligned, said ink chambers being expanded or contracted and ink being discharged from nozzles of the ink chambers onto a recording medium, by applying a voltage to piezoelectric elements provided on the outer perimeter or the outer side of the ink chambers, wherein said piezoelectric elements are arranged in a substantially parallel plane to the nozzle surface; and shorting devices which short the electrodes of said piezoelectric elements are provided.

摘要翻译： 其中填充有油墨的多个油墨室对准的图像形成装置，所述油墨室被膨胀或收缩，并且油墨从油墨室的喷嘴排出到记录介质上，通过向设置在外部的压电元件施加电压 周边或油墨室的外侧，其中所述压电元件布置在与喷嘴表面基本上平行的平面中; 并且提供使所述压电元件的电极短路的短路装置。

公开(公告)号：US07524039B2

公开(公告)日：2009-04-28

申请号：US11434804

申请日：2006-05-17

申请人： Tsuyoshi Mita

发明人： Tsuyoshi Mita

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14419 ,  B41J2202/11

摘要： The liquid ejection head comprises: a pressure chamber which is connected to an ejection port ejecting liquid, the liquid being supplied to the pressure chamber from a supply flow channel; and a piezoelectric element which forms a wall surface of the pressure chamber facing to the ejection port, wherein, during liquid ejection, the liquid inside the pressure chamber is pressurized by means of displacement of the piezoelectric element in d33 direction, and a gap formed between a partition of the pressure chamber and the piezoelectric element is made narrower than during refilling, in such a manner that flow resistance of the liquid from the pressure chamber toward the supply flow channel becomes greater than during refilling.

摘要翻译： 液体喷射头包括：压力室，连接到喷射口喷射液体，液体从供给流路供给到压力室; 以及压电元件，其形成面向喷射口的压力室的壁面，其中，在液体喷射期间，压力室内的液体通过压电元件在d33方向上的位移而被加压， 使得压力室和压电元件的分隔比在再填充期间更窄，使得液体从压力室朝向供给流动通道的流动阻力变得大于再填充期间的流动阻力。

公开(公告)号：US07500728B2

公开(公告)日：2009-03-10

申请号：US11068867

申请日：2005-03-02

申请人： Tsuyoshi Mita ,  Yasukazu Nihei

发明人： Tsuyoshi Mita ,  Yasukazu Nihei

IPC分类号： B41J29/38 ,  B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1639 ,  B41J2/1646 ,  B41J2/175 ,  B41J2202/21

摘要： The liquid discharge head comprises: a three-dimensional structure which defines a space including a pressure chamber filled with liquid and a flow channel for supplying the liquid to the pressure chamber, at least a part of the three-dimensional structure being formed by depositing layers composed of at least two different composition materials on a substrate according to a deposition method; and a drive element which causes discharge of the liquid from the pressure chamber through a nozzle.

摘要翻译： 液体排出头包括：三维结构，其限定包括填充有液体的压力室和用于将液体供应到压力室的流动通道的空间，至少一部分三维结构通过沉积层 根据沉积方法在基材上由至少两种不同的组合物材料组成; 以及驱动元件，其通过喷嘴使来自压力室的液体排出。

公开(公告)号：US07352538B2

公开(公告)日：2008-04-01

申请号：US10687404

申请日：2003-10-16

申请人： Kazuaki Kurihara ,  Masaharu Hida ,  Tsuyoshi Mita

发明人： Kazuaki Kurihara ,  Masaharu Hida ,  Tsuyoshi Mita

IPC分类号： G11B5/56 ,  H02N2/12

CPC分类号： H02N2/046 ,  G11B5/4826 ,  G11B5/5552

摘要： The present invention has an object to provide a small, light-weight, impact-resistant, high-accuracy, and low-cost piezoelectric actuator which can achieve a large displacement at a low drive voltage as well as an information storage device which incorporates the piezoelectric actuator and has high recording density. The piezoelectric actuator according to the present invention is equipped with a hinge plate 220 which has a central portion 221, two lateral portions 222 extending point-symmetrically from both ends of the central portion 221, and two limbs 223 extending point-symmetrically and non-linear symmetrically from both ends of the central portion 221 as well as with a piezoelectric element 210 which brings the two limbs 223 toward and away from each other.

摘要翻译： 本发明的目的是提供一种小型，重量轻，耐冲击，高精度和低成本的压电致动器，其可以在低驱动电压下实现大的位移，并且提供一种信息存储装置，其包括 压电致动器并具有高记录密度。 根据本发明的压电致动器装备有铰链板220，铰链板220具有中心部分221，从中心部分221的两端点对称延伸的两个侧部部分222和两个点对称和非对称延伸的两个分支223， 从中心部分221的两端线性对称，以及使两个肢体223彼此朝向和远离的压电元件210。