公开(公告)号：US20100026996A1

公开(公告)日：2010-02-04

申请号：US12576580

申请日：2009-10-09

申请人： Takashi Okawa ,  Kenji Mitomo

发明人： Takashi Okawa ,  Kenji Mitomo

IPC分类号： G01N21/00

CPC分类号： G01N21/9503 ,  G01N21/94

摘要： When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

摘要翻译： 当测量边缘区域时，选择具有不受衍射光影响的角度的衍射光引起噪声的光电检测器，从而允许最小化灵敏度降低的检查。 这允许管理外围部分中的异常情况，其通常不能被测量，并且这也消除了对晶片的关键缺陷的疏忽，从而导致IC故障的减少。

公开(公告)号：US07616299B2

公开(公告)日：2009-11-10

申请号：US11822469

申请日：2007-07-06

申请人： Takashi Okawa ,  Kenji Mitomo

发明人： Takashi Okawa ,  Kenji Mitomo

IPC分类号： G01N21/00

CPC分类号： G01N21/9503 ,  G01N21/94

摘要： When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

摘要翻译： 当测量边缘区域时，选择具有不受衍射光影响的角度的衍射光引起噪声的光电检测器，从而允许最小化灵敏度降低的检查。 这允许管理外围部分中的异常情况，其通常不能被测量，并且这也消除了对晶片的关键缺陷的疏忽，从而导致IC故障的减少。

公开(公告)号：US07864310B2

公开(公告)日：2011-01-04

申请号：US12576580

申请日：2009-10-09

申请人： Takashi Okawa ,  Kenji Mitomo

发明人： Takashi Okawa ,  Kenji Mitomo

IPC分类号： G01N21/00

CPC分类号： G01N21/9503 ,  G01N21/94

摘要： When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

摘要翻译： 当测量边缘区域时，选择具有不受衍射光影响的角度的衍射光引起噪声的光电检测器，从而允许最小化灵敏度降低的检查。 这允许管理外围部分中的异常情况，其通常不能被测量，并且这也消除了对晶片的关键缺陷的疏忽，从而导致IC故障的减少。

公开(公告)号：US06731384B2

公开(公告)日：2004-05-04

申请号：US09973000

申请日：2001-10-10

申请人： Yoshimasa Ohshima ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Kenji Mitomo ,  Takashi Okawa ,  Akira Hamamatsu ,  Shinichi Suzuki

发明人： Yoshimasa Ohshima ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Kenji Mitomo ,  Takashi Okawa ,  Akira Hamamatsu ,  Shinichi Suzuki

IPC分类号： G01N2100

CPC分类号： G01N21/94 ,  G01N21/8806

摘要： An apparatus and method for detecting foreign particle and defect on an object in detection by means of a laser beam, in which the laser beams of different wavelengths are irradiated onto the surface of the object in detection from different angles and the state of foreign particle and defect is separately detected according to the output level of the scattered light reflected from that surface. Further, it is arranged such that the scattered light reflected from the object onto which the laser beam is irradiated from the sole source or the plurality of sources is detected in plural directions, which detecting result is compared for the detection of the directivity of said scattered light in reflection.

摘要翻译： 一种用于通过激光束检测物体中的异物和在物体上的缺陷的装置和方法，其中不同波长的激光束从不同的角度和外来粒子的状态被检测到被检测物体的表面，并且 根据从该表面反射的散射光的输出电平分别检测缺陷。 另外，从多个方向检测从单个源或多个源照射激光束的物体所反射的散射光，将该检测结果进行比较，以检测所述散射的方向性 光反射。

公开(公告)号：US20080007727A1

公开(公告)日：2008-01-10

申请号：US11822469

申请日：2007-07-06

申请人： Takashi Okawa ,  Kenji Mitomo

发明人： Takashi Okawa ,  Kenji Mitomo

IPC分类号： G01N21/88

CPC分类号： G01N21/9503 ,  G01N21/94

摘要： When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

摘要翻译： 当测量边缘区域时，选择具有不受衍射光影响的角度的衍射光引起噪声的光电检测器，从而允许最小化灵敏度降低的检查。 这允许管理外围部分中的异常情况，其通常不能被测量，并且这也消除了对晶片的关键缺陷的疏忽，从而导致IC故障的减少。

公开(公告)号：US20130181252A1

公开(公告)日：2013-07-18

申请号：US13876170

申请日：2011-09-26

申请人： Hiroomi Eguchi ,  Atsushi Onogi ,  Takashi Okawa ,  Kiyoharu Hayakawa

发明人： Hiroomi Eguchi ,  Atsushi Onogi ,  Takashi Okawa ,  Kiyoharu Hayakawa

IPC分类号： H01L29/06

CPC分类号： H01L29/0611 ,  H01L27/0676 ,  H01L29/0696 ,  H01L29/0834 ,  H01L29/1608 ,  H01L29/20 ,  H01L29/2003 ,  H01L29/7394 ,  H01L29/861

摘要： A semiconductor device includes a semiconductor layer; a first type of a first semiconductor element that is arranged in a first element region of the semiconductor layer, has first and second main electrodes, and switches current; and a second type of a second semiconductor element that is arranged in a second element region of the semiconductor layer, has third and fourth main electrodes, and freewheels the current. The first and second element regions are adjacent in a direction orthogonal to a direction in which current flows, and are formed in a loop shape over the entire element region when the semiconductor layer is viewed from above. The first main electrode is electrically connected to the third main electrode, and the second main electrode is electrically connected to the fourth main electrode. When the semiconductor layer is viewed from above, a ratio of a length of the first main electrode to a length of the second main electrode is larger than a ratio of a length of the third main electrode to a length of the fourth main electrode.

摘要翻译： 半导体器件包括半导体层; 布置在半导体层的第一元件区域中的第一半导体元件的第一类型具有第一和第二主电极并切换电流; 以及布置在所述半导体层的第二元件区域中的第二类型的第二半导体元件，具有第三和第四主电极，并且使所述电流自由转动。 第一和第二元件区域在与电流流动的方向正交的方向上相邻，并且当从上方观察半导体层时，在整个元件区域上形成为环形。 第一主电极与第三主电极电连接，第二主电极与第四主电极电连接。 当从上方观察半导体层时，第一主电极的长度与第二主电极的长度的比例大于第三主电极的长度与第四主电极的长度的比率。

公开(公告)号：US20050270721A1

公开(公告)日：2005-12-08

申请号：US11204716

申请日：2005-08-16

申请人： Takashi Okawa ,  Shigenobu Yamanaka ,  Hideki Utaki ,  Akio Harada

发明人： Takashi Okawa ,  Shigenobu Yamanaka ,  Hideki Utaki ,  Akio Harada

IPC分类号： A61B17/30 ,  B25B9/02 ,  H02H1/00

CPC分类号： A61B17/30 ,  B25B9/02

摘要： There are proposed tweezers with grounding wire for grabbing a minute object containing an infinitesimal substance, which can discharge static electricity in the human body when it is used to grab a minute object, and which thus prevents the action of static electricity on the minute object and/or infinitesimal substance therein. The tweezers with grounding wire is constructed by connecting the grounding wire 2 for discharging the static electricity when a human operates the tweezers 1 The tweezers with grounding wire is particularly useful for handling a minute object 8 containing infinitesimal substance 7 of which shape is unrecognizable with naked eyes or an optical microscope. Since static electricity in the human body or in the object handled is discharged through the grounding wire 2 from the tweezers 1, the minute object 8 and the infinitesimal substance 7 to be handled are not subject to the action of static electricity, and thus are kept free from destruction or damage of static electricity.

摘要翻译： 有人提出用接地线镊子抓住含有微量物质的微小物体，当用来抓住微小物体时，能够释放人体内的静电，从而防止静电对微小物体的作用， /或其中的微小物质。 具有接地线的镊子通过连接接地线2而构成，当人类操作镊子时，用于排放静电的地线2.具有接地线的镊子特别可用于处理包含无定形物质的微小物体8，其中形状不可识别 眼睛或光学显微镜。 由于人体或被处理物体中的静电通过接地线2从镊子1排出，所以待处理的微小物体8和无限小物质7不受静电的作用，因此被保持 免受静电破坏或损坏。

公开(公告)号：US06787769B2

公开(公告)日：2004-09-07

申请号：US10182331

申请日：2002-07-26

申请人： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa ,  Yuichi Takano ,  Masatoshi Yasutake ,  Yoshiharu Shirakawabe

发明人： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa ,  Yuichi Takano ,  Masatoshi Yasutake ,  Yoshiharu Shirakawabe

IPC分类号： G01N2300

CPC分类号： G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12

摘要： A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.

摘要翻译： 一种用于扫描型显微镜的导电探针，其通过固定到悬臂的导电纳米管探针的尖端捕获试样表面的物质信息，其中导电探针由形成在表面上的导电膜构成 悬臂，其基端部固定为导电的非导管，其中预定的悬臂的表面是接触的，以及导电沉积物，其通过从非管形管的基端部分覆盖到导电的一部分来紧固导电纳米管 电影。 导电非导体和导电膜通过导电沉积物彼此电连接。

公开(公告)号：US06759653B2

公开(公告)日：2004-07-06

申请号：US10182330

申请日：2002-07-26

申请人： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa ,  Yuichi Takano ,  Masatoshi Yasutake ,  Yoshiharu Shirakawabe

发明人： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa ,  Yuichi Takano ,  Masatoshi Yasutake ,  Yoshiharu Shirakawabe

IPC分类号： G21K700

CPC分类号： G01Q60/38 ,  G01Q70/12

摘要： A scanning type microscope that captures substance information of the surface of a specimen by the tip end of a nanotube probe needle fastened to a cantilever, in which an organic gas is decomposed by a focused ion beam in a focused ion beam apparatus, and the nanotube is bonded to the cantilever with a deposit of the decomposed component thus produced. With this probe, the quality of the nanotube probe needle can be improved by removing an unnecessary deposit adhering to the nanotube tip end portion using a ion beam, by cutting an unnecessary part of the nanotube in order to control length of the probe needle and by injecting ions into the tip end portion of the nanotube.

摘要翻译： 一种扫描型显微镜，其通过紧固在悬臂上的纳米管探针的前端捕获试样表面的物质信息，其中有机气体在聚焦离子束装置中被聚焦离子束分解，并且纳米管 与由此产生的分解成分的沉积物粘合到悬臂上。 利用该探针，可以通过使用离子束除去附着在纳米管末端部分的不必要的沉积物，通过切割不需要的纳米管部分来控制探针的长度，并且通过 将离子注入纳米管的前端部。

公开(公告)号：US6107510A

公开(公告)日：2000-08-22

申请号：US225553

申请日：1999-01-05

申请人： Shuji Ebata ,  Hideaki Ogino ,  Takashi Okawa ,  Kinya Tsuji

发明人： Shuji Ebata ,  Hideaki Ogino ,  Takashi Okawa ,  Kinya Tsuji

IPC分类号： C07C253/28 ,  C07C253/00

CPC分类号： C07C253/28 ,  C07D213/85

摘要： There are disclosed a process for producing a nitrile compound which comprises catalytically reacting an alkyl group-substituted aromatic compound or an alkyl group-substituted heterocyclic compound with a mixed gas containing ammonia and oxygen in the presence of 1 a catalyst comprising a vanadium oxide, a chromium oxide, a boron oxide, a molybdenum oxide, and an oxide of an alkali metal or an alkaline earth metal or 2 a catalyst comprising a vanadium oxide, a chromium oxide, a boron oxide, an alkali metal oxide, and a heteropolyacid. According to the above process and by virtue of the specific catalyst, it is made possible to produce a nitrile compound having an aromatic ring or a heterocyclic ring in an extremely advantageous manner, that is, in high yield at high selectivity to the objective product.

摘要翻译： 公开了一种制备腈化合物的方法，该方法包括在+ E，crc 1 + EE催化剂存在下使烷基取代的芳族化合物或烷基取代的杂环化合物与含有氨和氧的混合气体催化反应 包括氧化钒，氧化铬，氧化硼，氧化钼和碱金属或碱土金属的氧化物，或+ E，crc 2 + EE，包含氧化钒，氧化铬，硼 氧化物，碱金属氧化物和杂多酸。 根据上述方法，通过具体的催化剂，可以非常有利地制备具有芳香环或杂环的腈化合物，即高目标产物的高选择性。