公开(公告)号：US4901669A

公开(公告)日：1990-02-20

申请号：US47328

申请日：1987-05-08

申请人： Takashi Yamamoto ,  Shozo Kaneko ,  Tadashi Gengo ,  Joji Ichinari ,  Hiroshi Fujiyama ,  Yoshio Kayumi ,  Masayoshi Murata

发明人： Takashi Yamamoto ,  Shozo Kaneko ,  Tadashi Gengo ,  Joji Ichinari ,  Hiroshi Fujiyama ,  Yoshio Kayumi ,  Masayoshi Murata

IPC分类号： C23C16/517 ,  H01L21/205

CPC分类号： C23C16/517 ,  H01L21/02532 ,  H01L21/0262

摘要： The present invention is directed to a method for forming a thin film on a substrate by the use of a glow discharge plasma which comprises generating a magnetic field in a direction which crosses an electric field for discharge at right angles and fluctuating the magnetic field. The present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, means for reducing the pressure in the reaction vessel and means for introducing the feed of reaction gases to the reaction vessel, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for causing a glow discharge is fed to the electrodes for discharge, a coil surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles to an electric field generated between the electrodes for discharge, and an AC power source for generating a magnetic field fed to the coil, whereby a thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.

摘要翻译： 本发明涉及一种通过使用辉光放电等离子体在衬底上形成薄膜的方法，该方法包括在与电场交叉的方向上产生磁场，以便以直角放电并使磁场发生波动。 本发明还涉及一种用于实施上述方法的装置，该装置由反应容器，用于降低反应容器内的压力的装置和将反应气体进料引入反应容器的装置，排出电极 面对面设置在反应容器内，将用于引起辉光放电的电压供给到放电用电极的电源，围绕放电用电极的线圈，用于沿垂直方向交叉的方向产生磁场 在用于放电的电极之间产生的电场和用于产生馈送到线圈的磁场的AC电源，由此在支撑在放电电场的范围外并与该方向平行的基板上形成薄膜 的电场。

公开(公告)号：US4912928A

公开(公告)日：1990-04-03

申请号：US221418

申请日：1988-07-19

申请人： Shozo Kaneko ,  Susumu Sato ,  Tadashi Gengo ,  Jiro Takada ,  Joji Ichinari ,  Misao Yamamura ,  Shuya Nagayama

发明人： Shozo Kaneko ,  Susumu Sato ,  Tadashi Gengo ,  Jiro Takada ,  Joji Ichinari ,  Misao Yamamura ,  Shuya Nagayama

IPC分类号： B01D53/94 ,  B01D53/86 ,  F01N3/04 ,  F01N3/08 ,  F01N3/20 ,  F01N3/28 ,  F01N5/02 ,  F02B3/06 ,  F02G5/02 ,  F22B1/18

CPC分类号： F01N3/206 ,  B01D53/8631 ,  F01N3/043 ,  F01N3/2889 ,  F01N5/02 ,  F02G5/02 ,  F01N2610/02 ,  F02B3/06 ,  Y02E20/14 ,  Y02T10/16 ,  Y02T10/166

摘要： An exhaust heat exchanger system recovers heat from exhaust gas emitted from a prime mover, for example, a diesel engine, gas engine, gas turbine, etc., and/or to reduce harmful components such as NO.sub.X (nitrogen oxides). A high-temperature side heat exchanger section and a low-temperature side heat exchanger section are disposed in a single casing and these heat exchanger sections are connected together through a duct. An exhaust gas purifying catalyst is disposed in the duct. Accordingly, it is possible to simplify the mechanism of the exhaust heat exchanger system, reduce the overall size of the system, lower the production cost and minimize the installation space. Further, the exhaust gas purifying operation is efficiently carried out by the action of the catalyst.

公开(公告)号：US4676425A

公开(公告)日：1987-06-30

申请号：US805296

申请日：1985-12-05

申请人： Hiroshi Fujimura ,  Hideharu Kobayashi ,  Shozo Kaneko ,  Atsumasa Iwanaga ,  Joji Ichinari

发明人： Hiroshi Fujimura ,  Hideharu Kobayashi ,  Shozo Kaneko ,  Atsumasa Iwanaga ,  Joji Ichinari

IPC分类号： B23K37/053 ,  B23P6/00 ,  B23K37/02

CPC分类号： B23K37/0533 ,  B23P6/00

摘要： A steel tube working apparatus is composed of a clamping device consisting of a pair of clamps, a pair of projecting plates, means for actuating the clamps and the projecting plates, a pair of guide bars and a main body frame; a base plate having a pair of guide rollers fitting to the guide bars fixedly secured to its opposite ends; and working means connected to the base plate in a movable and rotatable manner. A cutting device, a beveling device, a welding device, etc. are selectively connected to the base plate as the working means.

摘要翻译： 钢管加工装置由夹紧装置，一对突出板，用于致动夹具和突出板的装置，一对导杆和主体框架构成的夹紧装置构成。 底板，其具有一对导向辊，该导向辊适配于固定地固定到其相对端的导杆; 以及以可移动和可旋转的方式连接到基板的工作装置。 作为工作装置，切割装置，斜切装置，焊接装置等选择性地连接到基板。

公开(公告)号：US4872347A

公开(公告)日：1989-10-10

申请号：US151093

申请日：1988-02-01

申请人： Yoshimi Okabe ,  Keiichi Iwamoto ,  Masaaki Torichigai ,  Shozo Kaneko ,  Joji Ichinari ,  Kiyoshi Koizumi

发明人： Yoshimi Okabe ,  Keiichi Iwamoto ,  Masaaki Torichigai ,  Shozo Kaneko ,  Joji Ichinari ,  Kiyoshi Koizumi

IPC分类号： G01N29/04 ,  F22B37/00 ,  F28G15/00 ,  G01N29/265 ,  G01N29/28

CPC分类号： F28G15/00 ,  F22B37/00 ,  F22B37/003 ,  G01N29/265 ,  G01N29/28 ,  G01N2291/02854 ,  G01N2291/02872 ,  G01N2291/02881 ,  G01N2291/2636

摘要： An automated ultrasonic examination system for heat transfer tubes in a boiler makes it possible to perform ultrsonic examination from inside of the heat transfer tubes without necessitating the removal of scale from the outer surfaces of the boiler tubes by polishing and without necessitating access to places where manual measurements are difficult or impossible to make. The system includes an insert tube adapted to be inserted into a cylindrical header to which one of the heat transfer tubes are connected, an insert tube moving device for moving the insert tube in the axial direction of the header and revolving it about its own axis, an ejection nozzle provided on the insert tube, a water pump for feeding pressurized water to the ejection nozzle, a cable adapted to be inserted from the ejection nozzle into the heat transfer tube as passed through the insert tube by the pressurized water fed from the water pump, a cable accommodation tank for accommodating the cable, a revolving submerged ultrasonic probe mounted at the tip end of the cable, and an ultrasonic examination unit for processing signals sent from the probe and displaying the results of examination. Preferably, a device for detecting a length of the cable inserted into the heat transfer tube is provided in the automated ultrasonic examination system.